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1. 发明授权

US07191661B2 Capacitive pressure sensor 失效
标题翻译：电容式压力传感器
公开(公告)号：US07191661B2
公开(公告)日：2007-03-20
申请号：US11107510
申请日：2005-04-15
申请人： Torsten Ohms , Oliver Stoll
发明人： Torsten Ohms , Oliver Stoll
IPC分类号： G01L9/12
CPC分类号： G01L9/0073
摘要： A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.
摘要翻译：由两个彼此相对并且以真空密封的方式彼此接合的绝缘体上硅（SOI）晶片构成的电容式压力传感器，在两个晶片之间形成凹部。第一晶片专门支持测量所施加的压力所需的评估电路和电容电极，并且第二晶片具有通过表面微机械工艺形成的凹部，其中与第一晶片的电容电极对置电极。第二晶片同时形成第一晶片的盖。

2. 发明申请

US20050229711A1 Capacitive pressure sensor and method of manufacture 失效
标题翻译：电容式压力传感器及其制造方法
公开(公告)号：US20050229711A1
公开(公告)日：2005-10-20
申请号：US11107510
申请日：2005-04-15
申请人： Torsten Ohms , Oliver Stoll
发明人： Torsten Ohms , Oliver Stoll
IPC分类号： G01L9/00 , B81B3/00 , B81B7/00 , G01L9/12 , H01G7/00 , H01L29/84
CPC分类号： G01L9/0073
摘要： A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.
摘要翻译：由两个彼此相对并且以真空密封的方式彼此接合的绝缘体上硅（SOI）晶片构成的电容式压力传感器，在两个晶片之间形成凹部。第一晶片专门支持测量所施加的压力所需的评估电路和电容电极，并且第二晶片具有通过表面微机械工艺形成的凹部，其中与第一晶片的电容电极对置电极。第二晶片同时形成第一晶片的盖。

3. 发明授权

US09081027B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US09081027B2
公开(公告)日：2015-07-14
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01P3/44 , G01C19/574 , F16F1/02
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率，提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

4. 发明申请

US20110132087A1 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US20110132087A1
公开(公告)日：2011-06-09
申请号：US12925750
申请日：2010-10-27
申请人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
发明人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
摘要翻译：描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可由第二激励装置激发到第二振动并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

5. 发明申请

US20110023600A1 MICROMECHANICAL YAW-RATE SENSOR 有权
标题翻译：微电子传感器
公开(公告)号：US20110023600A1
公开(公告)日：2011-02-03
申请号：US12834953
申请日：2010-07-13
申请人： Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译：一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件，包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

6. 发明授权

US08950258B2 Micromechanical angular acceleration sensor and method for measuring an angular acceleration 有权
标题翻译：微机械角加速度传感器和角加速度测量方法
公开(公告)号：US08950258B2
公开(公告)日：2015-02-10
申请号：US13479746
申请日：2012-05-24
申请人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
发明人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： G01P15/10 , G01P15/12 , G01P15/09 , H01L41/113
CPC分类号： G01P15/0922 , H01L41/1132
摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
摘要翻译：公开了一种用于测量角加速度的微机械角加速度传感器。传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。压阻和/或压电元件布置在地震块的切口中。还公开了传感器的相应方法和用途。

7. 发明授权

US08443668B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08443668B2
公开(公告)日：2013-05-21
申请号：US12925750
申请日：2010-10-27
申请人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
发明人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
摘要翻译：描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可被第二激励装置激发到第二振动并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

8. 发明申请

US20120297878A1 Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration 有权
标题翻译：微机械角加速度传感器和测量角加速度的方法
公开(公告)号：US20120297878A1
公开(公告)日：2012-11-29
申请号：US13479746
申请日：2012-05-24
申请人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
发明人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： G01P15/097
CPC分类号： G01P15/0922 , H01L41/1132
摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
摘要翻译：公开了一种用于测量角加速度的微机械角加速度传感器。传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。压阻和/或压电元件布置在地震块的切口中。还公开了传感器的相应方法和用途。

9. 发明申请

US20100122576A1 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US20100122576A1
公开(公告)日：2010-05-20
申请号：US12587487
申请日：2009-10-06
申请人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
发明人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
IPC分类号： G01C19/56
CPC分类号： G01C19/5755 , G01C19/574 , G01C19/5747 , G01C19/5762
摘要： A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.
摘要翻译：旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。

10. 发明申请

US20060021961A1 Micromechanical component and method for manufacturing such a component 失效
标题翻译：微机械部件及其制造方法
公开(公告)号：US20060021961A1
公开(公告)日：2006-02-02
申请号：US11187346
申请日：2005-07-21
申请人： Joerg Muchow , Torsten Ohms , Volkmar Senz , Guenther-Nino-Carlo Ullrich , Ronald Gampp
发明人： Joerg Muchow , Torsten Ohms , Volkmar Senz , Guenther-Nino-Carlo Ullrich , Ronald Gampp
IPC分类号： C23F1/00 , B44C1/22
CPC分类号： B81B3/0072 , B81B2203/0127
摘要： A method and a micromechanical component which counteract manufacturing-process-related mechanical stresses in the membrane are provided. The membrane is formed on a substrate in a layer system and spans a cavity in the substrate. The layer system includes at least one base layer formed on the substrate for circuit elements. At least one structured masking layer is also formed on the base layer for defining the circuit elements. The masking layer is structured in the area of the membrane in such a way that mechanical stresses acting in the area of the membrane under vacuum are at least partially compensated, the intrinsic stress of the masking layer being taken into account in the layout of the structuring.
摘要翻译：提供了一种抵抗膜中与制造过程相关的机械应力的方法和微机械部件。膜在层系统中的基底上形成并跨越衬底中的空腔。层系统包括在用于电路元件的基板上形成的至少一个基底层。至少一个结构化掩模层也形成在基底层上以限定电路元件。屏蔽层被构造在膜的区域中，使得在真空下作用在膜的区域中的机械应力被至少部分地补偿，掩蔽层的固有应力在结构化的布局中被考虑。

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