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1. 发明申请

US20090138995A1 ATOM PROBE COMPONENT TREATMENTS 审中-公开
标题翻译：原子探针组分处理
公开(公告)号：US20090138995A1
公开(公告)日：2009-05-28
申请号：US11917672
申请日：2006-06-16
申请人： Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Robert M. Ulfig , Scott A. Wiener
发明人： Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Robert M. Ulfig , Scott A. Wiener
IPC分类号： G12B21/00
CPC分类号： H01J37/3056 , H01J37/32853 , H01J37/32862
摘要： The present invention relates to treatments for atom probe components. For example, certain aspects are directed toward processes for treating an atom probe component that includes removing material from a surface of the atom probe component (e.g., using an ion beam, a plasma, a chemical etching process, and/or photonic energy). Another aspect of the invention is directed toward a method for treating an atom probe specimen that includes using a computing device to automatically control a voltage used in an ion sputtering process. Still other aspects of the invention are directed toward methods for treating an atom probe component that includes introducing photonic energy proximate to a surface of the atom probe component, annealing at least a portion of a surface of the atom probe component, coating at least a portion of a surface of the atom probe component, and/or cooling at least a portion of the atom probe component.
摘要翻译：本发明涉及原子探针成分的处理。例如，某些方面涉及用于处理原子探针组分的方法，其包括从原子探针组分的表面除去材料（例如，使用离子束，等离子体，化学蚀刻工艺和/或光能）。本发明的另一方面涉及一种用于处理原子探针样品的方法，其包括使用计算装置自动控制在离子溅射工艺中使用的电压。本发明的其它方面涉及用于处理原子探针组分的方法，所述方法包括将光子能引入到原子探针组分的表面附近，退火至少部分原子探针组分的表面，涂覆至少一部分的原子探针组分的表面，和/或冷却原子探针组分的至少一部分。

2. 发明申请

US20090114620A1 ATOM PROBE ELECTRODE TREATMENTS 审中-公开
标题翻译：原子探针电极处理
公开(公告)号：US20090114620A1
公开(公告)日：2009-05-07
申请号：US11917685
申请日：2005-07-21
申请人： Robert M. Ulfig , Joseph H. Bunton , Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Scott A. Wiener
发明人： Robert M. Ulfig , Joseph H. Bunton , Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Scott A. Wiener
IPC分类号： B44C1/22 , B05D5/12
CPC分类号： H01J37/285
摘要： A method for treating an atom probe electrode (120), which comprises the steps of providing an atom electrode (120) having a surface (123) and an aperture (122); and removing material (604) from the surface (123) to reduce a potential of the atom probe electrode creating a non-uniformity in an electric field (502) when the atom probe electrode is used in a atom probe device during specimen analysis.
摘要翻译：一种用于处理原子探针电极（120）的方法，其包括提供具有表面（123）和孔径（122）的原子电极（120）的步骤; 以及当在样本分析期间在原子探针装置中使用原子探针电极时，从表面（123）去除材料（604）以减小原子探针电极在电场（502）中产生不均匀性的电位。

3. 发明申请

US20100288926A1 ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS 审中-公开
标题翻译：原子探针数据及相关系统和方法
公开(公告)号：US20100288926A1
公开(公告)日：2010-11-18
申请号：US12294716
申请日：2007-03-27
申请人： Scott A. Wiener , Thomas F. Kelly , David J. Larson , Keith J. Thompson , Robert M. Ulfig , Brian P. Geiser , Thomas C. Kunicki , Raymond W. O'Neill , Jason Schneir
发明人： Scott A. Wiener , Thomas F. Kelly , David J. Larson , Keith J. Thompson , Robert M. Ulfig , Brian P. Geiser , Thomas C. Kunicki , Raymond W. O'Neill , Jason Schneir
IPC分类号： G01B21/30
CPC分类号： H01J37/285 , H01J37/265 , H01J2237/24571 , H01J2237/24592
摘要： The present invention relates to atom probe data and associated systems and methods. Aspects of the invention are directed toward a computing system configured to predict a characteristic associated with an atom probe specimen that includes a data set receiving component configured to receive a three-dimensional data set associated with a portion of the specimen. The system further includes a predicting/calculating component configured to predict the characteristic associated with the specimen based on the data set. Other aspects of the invention are directed toward a method for evaluating a manufacturing process using atom probe data that includes receiving a three-dimensional data set associated with a portion of a microelectronic assembly produced by a manufacturing process. The method further includes determining a variation between the data set and a configuration expected to result from the manufacturing process.
摘要翻译：本发明涉及原子探针数据及相关系统和方法。本发明的方面针对被配置为预测与原子探针样本相关联的特征的计算系统，所述特征包括被配置为接收与样本的一部分相关联的三维数据集的数据集接收部件。该系统还包括预测/计算部件，其被配置为基于数据集预测与样本相关联的特性。本发明的其它方面涉及使用原子探测器数据来评估制造过程的方法，该方法包括接收与由制造过程产生的微电子组件的一部分相关联的三维数据集。该方法还包括确定数据集与期望从制造过程产生的配置之间的变化。

4. 发明申请

US20100204927A1 ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS 审中-公开
标题翻译： ATOM探测数据处理和相关系统
公开(公告)号：US20100204927A1
公开(公告)日：2010-08-12
申请号：US12296700
申请日：2007-04-12
申请人： Brian P. Geiser , Thomas F. Kelly , Jason Schneir , Jay P. Roberts , David J. Larson , Scott A. Wiener
发明人： Brian P. Geiser , Thomas F. Kelly , Jason Schneir , Jay P. Roberts , David J. Larson , Scott A. Wiener
IPC分类号： G06F19/00 , G06T15/00 , G01N31/00
CPC分类号： H01J37/285 , H01J37/265 , H01J2237/153 , H01J2237/223 , H01J2237/226 , H01J2237/24571 , H01J2237/24592
摘要： The present invention relates to atom probe data processes and associated systems. Aspects of the invention are directed toward a computing system configured to process atom probe data that includes a data set receiving component configured to receive a first three-dimensional data set. The first three-dimensional data set has a first data element structure and is based on data collected from performing an atom probe process on a portion of an atom probe specimen. The system further includes a data set constructing component configured to create a second three-dimensional data set having a second data element structure different than the first data element structure. In selected embodiments, the system can further include a Fourier Transform component configured to perform a Fourier Transform on a portion of the second three-dimensional data set.
摘要翻译：本发明涉及原子探针数据处理和相关系统。本发明的方面针对被配置为处理原子探测数据的计算系统，该原子探测数据包括被配置为接收第一三维数据集的数据集接收部件。第一个三维数据集具有第一数据元素结构，并且基于在原子探针样本的一部分上执行原子探测过程收集的数据。该系统还包括一个数据集构成部件，被配置为创建具有与第一数据元素结构不同的第二数据元素结构的第二三维数据集。在所选择的实施例中，系统还可以包括被配置为在第二三维数据集的一部分上执行傅里叶变换的傅立叶变换分量。

5. 发明授权

US08575544B1 Methods and devices for improving atom probe detector performance 有权
标题翻译：提高原子探针探测器性能的方法和装置
公开(公告)号：US08575544B1
公开(公告)日：2013-11-05
申请号：US13053790
申请日：2011-03-22
申请人： Thomas F. Kelly , Daniel R. Lenz , Scott A. Wiener
发明人： Thomas F. Kelly , Daniel R. Lenz , Scott A. Wiener
IPC分类号： H01J49/40
CPC分类号： H01J49/025 , H01J37/244 , H01J37/285 , H01J2237/2446
摘要： An atom probe includes a detector which registers the time of flight of ions evaporated from a specimen, as well as the positions on the detector at which the ions impact and the kinetic energies of the ions. The detected position allows the original locations of the ions on the specimen to be mapped, and the times of flight and kinetic energies can be spectrally analyzed (e.g., binned into sets of like values) to determine the elemental identities of the ions. The use of kinetic energy data as well as time of flight data can allow more accurate identification of composition than where time of flight data are used alone, as in traditional atom probes.
摘要翻译：原子探针包括一个检测器，其记录从样品蒸发的离子的飞行时间，以及离子冲击的检测器上的位置和离子的动能。检测到的位置允许映射样品上的离子的原始位置，并且可以对飞行时间和动能进行频谱分析（例如，分组成相似值的集合），以确定离子的元素身份。使用动能数据以及飞行时间数据可以比单纯使用飞行时间数据更准确地识别组成，如同传统的原子探针一样。

6. 发明授权

US07884323B2 Atom probes, atom probe specimens, and associated methods 有权
标题翻译：原子探针，原子探针标本和相关方法
公开(公告)号：US07884323B2
公开(公告)日：2011-02-08
申请号：US12064020
申请日：2006-08-15
申请人： Thomas F. Kelly , Joseph H. Bunton , Scott A. Wiener
发明人： Thomas F. Kelly , Joseph H. Bunton , Scott A. Wiener
IPC分类号： G01N23/00
CPC分类号： G01N23/22
摘要： The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
摘要翻译：本发明一般涉及原子探针，原子探针试样和相关方法。例如，某些方面涉及用于分析样本的一部分的方法，所述方法包括选择感兴趣区域并移动靠近感兴趣区域的边界区域中的材料的一部分，使得感兴趣区域的至少一部分相对于边界区域的至少一部分突出。该方法还包括分析感兴趣区域的一部分。本发明的其它方面涉及通过使光子能量通过从光子器件分离并与光子器件间隔开的透镜系统来在原子探测过程中施加光子能量的方法。本发明的其它方面涉及将光子能量从电极的外表面反射到样本上的方法。

7. 发明申请

US20080308728A1 Atom Probes, Atom Probe Specimens, and Associated Methods 有权
标题翻译：原子探针，原子探针样品和相关方法
公开(公告)号：US20080308728A1
公开(公告)日：2008-12-18
申请号：US12064020
申请日：2006-08-15
申请人： Thomas F. Kelly , Joseph H. Bunton , Scott A. Wiener
发明人： Thomas F. Kelly , Joseph H. Bunton , Scott A. Wiener
IPC分类号： G01N23/00
CPC分类号： G01N23/22
摘要： The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
摘要翻译：本发明一般涉及原子探针，原子探针试样和相关方法。例如，某些方面涉及用于分析样本的一部分的方法，所述方法包括选择感兴趣区域并移动靠近感兴趣区域的边界区域中的材料的一部分，使得感兴趣区域的至少一部分相对于边界区域的至少一部分突出。该方法还包括分析感兴趣区域的一部分。本发明的其它方面涉及通过使光子能量通过从光子器件分离并与光子器件间隔开的透镜系统来在原子探测过程中施加光子能量的方法。本发明的其它方面涉及将光子能量从电极的外表面反射到样本上的方法。

8. 发明授权

US06700121B1 Methods of sampling specimens for microanalysis 失效
标题翻译：微量分析样品取样方法
公开(公告)号：US06700121B1
公开(公告)日：2004-03-02
申请号：US10428372
申请日：2003-05-01
申请人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
发明人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
IPC分类号： G01N132
CPC分类号： G01N1/32 , Y10T436/25
摘要： Methods of sampling specimens for microanalysis, particularly microanalysis by atom probe microscopy, include steps of forming a study specimen in a first study object (as by use of focused ion beam milling); removing the study specimen from the study object; situating the study specimen on a second study object; and microanalyzing the study specimen. Where the first study object is of particular interest for study, the study specimen may be taken from a functional portion of the first study object so that microanalysis will provide information regarding this functional portion. Where the second study object is of particular interest for study, the second study object may be subjected to manufacturing processes (e.g., deposition of layers of materials) after the study specimen is situated thereon so that the study specimen will provide information regarding the results of the manufacturing process. The study specimen may have study regions formed thereon which are particularly suitable for study by atom probes, e.g., regions bearing raised protrusions, at virtually any point during the process, thereby greatly enhancing the speed and efficiency of specimen preparation.
摘要翻译：用于微量分析的样品取样方法，特别是通过原子探针显微镜进行微量分析的方法包括在第一研究对象中（如通过使用聚焦离子束研磨）形成研究样品的步骤; 从研究对象中取出研究标本; 将研究样本置于第二个研究对象上; 并微观分析研究样本。如果第一研究对象对于研究特别感兴趣，则研究样本可以从第一研究对象的功能部分获取，使得微量分析将提供关于该功能部分的信息。在第二研究对象特别感兴趣的研究中，第二研究对象可以在研究样本位于其上之后进行制造过程（例如，材料层的沉积），使得研究样本将提供关于制造过程。研究样本可以具有在其上形成的研究区域，其特别适合于在原子探针（例如，具有凸起突起的区域）的研究中，在该过程中的几乎任何点，从而大大提高了样品制备的速度和效率。

9. 发明授权

US06576900B2 Methods of sampling specimens for microanalysis 有权
标题翻译：微量分析样品取样方法
公开(公告)号：US06576900B2
公开(公告)日：2003-06-10
申请号：US09861405
申请日：2001-05-18
申请人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
发明人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
IPC分类号： G01N132
CPC分类号： G01N1/32 , Y10T436/25
摘要： Methods of sampling specimens for microanalysis, particularly microanalysis by atom probe microscopy, include steps of forming a study specimen in a first study object (as by use of focused ion beam milling); removing the study specimen from the study object; situating the study specimen on a second study object; and microanalyzing the study specimen. Where the first study object is of particular interest for study, the study specimen may be taken from a functional portion of the first study object so that microanalysis will provide information regarding this functional portion. Where the second study object is of particular interest for study, the second study object may be subjected to manufacturing processes (e.g., deposition of layers of materials) after the study specimen is situated thereon so that the study specimen will provide information regarding the results of the manufacturing process. The study specimen may have study regions formed thereon which are particularly suitable for study by atom probes, e.g., regions bearing raised protrusions, at virtually any point during the process, thereby greatly enhancing the speed and efficiency of specimen preparation.
摘要翻译：用于微量分析的样品取样方法，特别是通过原子探针显微镜进行微量分析的方法包括在第一研究对象中（如通过使用聚焦离子束研磨）形成研究样品的步骤; 从研究对象中取出研究标本; 将研究样本置于第二个研究对象上; 并微观分析研究样本。如果第一研究对象对于研究特别感兴趣，则研究样本可以从第一研究对象的功能部分获取，使得微量分析将提供关于该功能部分的信息。在第二研究对象特别感兴趣的研究中，第二研究对象可以在研究样本位于其上之后进行制造过程（例如，材料层的沉积），使得研究样本将提供关于制造过程。研究样本可以具有在其上形成的研究区域，其特别适合于在原子探针（例如，具有凸起突起的区域）的研究中，在该过程中的几乎任何点，从而大大提高了样品制备的速度和效率。

10. 发明授权

US5440124A High mass resolution local-electrode atom probe 失效
标题翻译：高质量分辨率的局部电极原子探针
公开(公告)号：US5440124A
公开(公告)日：1995-08-08
申请号：US272204
申请日：1994-07-08
申请人： Thomas F. Kelly , Patrick P. Camus , David J. Larson , Louis M. Holzman , Sateeshchandra S. Bajikar
发明人： Thomas F. Kelly , Patrick P. Camus , David J. Larson , Louis M. Holzman , Sateeshchandra S. Bajikar
IPC分类号： G01Q90/00 , H01J37/285
CPC分类号： H01J37/285 , H01J49/0004
摘要： An atom probe provides rapidly pulsed field evaporation/desorption of ions from a tip utilizing a local extraction electrode positioned closely adjacent to the tip. A bias potential is applied between the tip and the local extraction electrode which provides an electric field at the tip which is less than but near the field intensity required for field evaporation of ions. Additional potential is applied between the tip and the extraction electrode in relatively low over-voltage pulses to obtain field evaporation of ions without substantially accelerating the ions. The ions extracted from the tip by the sharply defined pulses pass through an aperture in the extraction electrode and are accelerated by a large potential difference between the tip and a detector spaced from the tip and the local extraction electrode. An intermediate acceleration electrode may be positioned between the extraction electrode and the detector, with the acceleration electrode having an aperture therein to pass ions therethrough to the detector. The acceleration electrode is maintained at a higher potential with respect to the tip than the extraction electrode, and may be maintained at the same potential as the detector so that ions passed through the acceleration electrode coast to the detector. The use of relatively low voltage pulses to obtain evaporation of ions permits rapid repetition of the pulses, on the order of hundreds of thousands of pulses per second, to allow rapid accumulation of atom probe data.
摘要翻译：原子探针使用位于尖端附近定位的局部提取电极，从尖端提供离子的快速脉冲场蒸发/解吸。在尖端和局部引出电极之间施加偏置电位，该电极提供尖端处的电场，该电场小于但接近于离子的场蒸发所需的场强。在相对低的过电压脉冲中，在尖端和引出电极之间施加额外的电位，以获得离子的场蒸发而基本不加速离子。通过尖锐的脉冲从尖端提取的离子通过提取电极中的孔，并通过尖端和与尖端和局部引出电极间隔开的检测器之间的大的电位差加速。中间加速电极可以位于提取电极和检测器之间，其中加速电极在其中具有孔，以将离子穿过其中到达检测器。加速电极相对于提取电极保持在比尖端更高的电位，并且可以保持在与检测器相同的电位，使得通过加速电极的离子滑行到检测器。使用相对较低电压的脉冲来获得离子蒸发允许脉冲的快速重复，每秒数十万个脉冲数量级，以允许原子探针数据的快速累积。

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