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1. 发明申请

US20090138995A1 ATOM PROBE COMPONENT TREATMENTS 审中-公开
标题翻译：原子探针组分处理
公开(公告)号：US20090138995A1
公开(公告)日：2009-05-28
申请号：US11917672
申请日：2006-06-16
申请人： Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Robert M. Ulfig , Scott A. Wiener
发明人： Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Robert M. Ulfig , Scott A. Wiener
IPC分类号： G12B21/00
CPC分类号： H01J37/3056 , H01J37/32853 , H01J37/32862
摘要： The present invention relates to treatments for atom probe components. For example, certain aspects are directed toward processes for treating an atom probe component that includes removing material from a surface of the atom probe component (e.g., using an ion beam, a plasma, a chemical etching process, and/or photonic energy). Another aspect of the invention is directed toward a method for treating an atom probe specimen that includes using a computing device to automatically control a voltage used in an ion sputtering process. Still other aspects of the invention are directed toward methods for treating an atom probe component that includes introducing photonic energy proximate to a surface of the atom probe component, annealing at least a portion of a surface of the atom probe component, coating at least a portion of a surface of the atom probe component, and/or cooling at least a portion of the atom probe component.
摘要翻译：本发明涉及原子探针成分的处理。例如，某些方面涉及用于处理原子探针组分的方法，其包括从原子探针组分的表面除去材料（例如，使用离子束，等离子体，化学蚀刻工艺和/或光能）。本发明的另一方面涉及一种用于处理原子探针样品的方法，其包括使用计算装置自动控制在离子溅射工艺中使用的电压。本发明的其它方面涉及用于处理原子探针组分的方法，所述方法包括将光子能引入到原子探针组分的表面附近，退火至少部分原子探针组分的表面，涂覆至少一部分的原子探针组分的表面，和/或冷却原子探针组分的至少一部分。

2. 发明申请

US20090114620A1 ATOM PROBE ELECTRODE TREATMENTS 审中-公开
标题翻译：原子探针电极处理
公开(公告)号：US20090114620A1
公开(公告)日：2009-05-07
申请号：US11917685
申请日：2005-07-21
申请人： Robert M. Ulfig , Joseph H. Bunton , Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Scott A. Wiener
发明人： Robert M. Ulfig , Joseph H. Bunton , Thomas F. Kelly , David J. Larson , Richard L. Martens , Keith J. Thompson , Scott A. Wiener
IPC分类号： B44C1/22 , B05D5/12
CPC分类号： H01J37/285
摘要： A method for treating an atom probe electrode (120), which comprises the steps of providing an atom electrode (120) having a surface (123) and an aperture (122); and removing material (604) from the surface (123) to reduce a potential of the atom probe electrode creating a non-uniformity in an electric field (502) when the atom probe electrode is used in a atom probe device during specimen analysis.
摘要翻译：一种用于处理原子探针电极（120）的方法，其包括提供具有表面（123）和孔径（122）的原子电极（120）的步骤; 以及当在样本分析期间在原子探针装置中使用原子探针电极时，从表面（123）去除材料（604）以减小原子探针电极在电场（502）中产生不均匀性的电位。

3. 发明授权

US06700121B1 Methods of sampling specimens for microanalysis 失效
标题翻译：微量分析样品取样方法
公开(公告)号：US06700121B1
公开(公告)日：2004-03-02
申请号：US10428372
申请日：2003-05-01
申请人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
发明人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
IPC分类号： G01N132
CPC分类号： G01N1/32 , Y10T436/25
摘要： Methods of sampling specimens for microanalysis, particularly microanalysis by atom probe microscopy, include steps of forming a study specimen in a first study object (as by use of focused ion beam milling); removing the study specimen from the study object; situating the study specimen on a second study object; and microanalyzing the study specimen. Where the first study object is of particular interest for study, the study specimen may be taken from a functional portion of the first study object so that microanalysis will provide information regarding this functional portion. Where the second study object is of particular interest for study, the second study object may be subjected to manufacturing processes (e.g., deposition of layers of materials) after the study specimen is situated thereon so that the study specimen will provide information regarding the results of the manufacturing process. The study specimen may have study regions formed thereon which are particularly suitable for study by atom probes, e.g., regions bearing raised protrusions, at virtually any point during the process, thereby greatly enhancing the speed and efficiency of specimen preparation.
摘要翻译：用于微量分析的样品取样方法，特别是通过原子探针显微镜进行微量分析的方法包括在第一研究对象中（如通过使用聚焦离子束研磨）形成研究样品的步骤; 从研究对象中取出研究标本; 将研究样本置于第二个研究对象上; 并微观分析研究样本。如果第一研究对象对于研究特别感兴趣，则研究样本可以从第一研究对象的功能部分获取，使得微量分析将提供关于该功能部分的信息。在第二研究对象特别感兴趣的研究中，第二研究对象可以在研究样本位于其上之后进行制造过程（例如，材料层的沉积），使得研究样本将提供关于制造过程。研究样本可以具有在其上形成的研究区域，其特别适合于在原子探针（例如，具有凸起突起的区域）的研究中，在该过程中的几乎任何点，从而大大提高了样品制备的速度和效率。

4. 发明授权

US06576900B2 Methods of sampling specimens for microanalysis 有权
标题翻译：微量分析样品取样方法
公开(公告)号：US06576900B2
公开(公告)日：2003-06-10
申请号：US09861405
申请日：2001-05-18
申请人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
发明人： Thomas F. Kelly , Richard L. Martens , Steven L. Goodman
IPC分类号： G01N132
CPC分类号： G01N1/32 , Y10T436/25
摘要： Methods of sampling specimens for microanalysis, particularly microanalysis by atom probe microscopy, include steps of forming a study specimen in a first study object (as by use of focused ion beam milling); removing the study specimen from the study object; situating the study specimen on a second study object; and microanalyzing the study specimen. Where the first study object is of particular interest for study, the study specimen may be taken from a functional portion of the first study object so that microanalysis will provide information regarding this functional portion. Where the second study object is of particular interest for study, the second study object may be subjected to manufacturing processes (e.g., deposition of layers of materials) after the study specimen is situated thereon so that the study specimen will provide information regarding the results of the manufacturing process. The study specimen may have study regions formed thereon which are particularly suitable for study by atom probes, e.g., regions bearing raised protrusions, at virtually any point during the process, thereby greatly enhancing the speed and efficiency of specimen preparation.
摘要翻译：用于微量分析的样品取样方法，特别是通过原子探针显微镜进行微量分析的方法包括在第一研究对象中（如通过使用聚焦离子束研磨）形成研究样品的步骤; 从研究对象中取出研究标本; 将研究样本置于第二个研究对象上; 并微观分析研究样本。如果第一研究对象对于研究特别感兴趣，则研究样本可以从第一研究对象的功能部分获取，使得微量分析将提供关于该功能部分的信息。在第二研究对象特别感兴趣的研究中，第二研究对象可以在研究样本位于其上之后进行制造过程（例如，材料层的沉积），使得研究样本将提供关于制造过程。研究样本可以具有在其上形成的研究区域，其特别适合于在原子探针（例如，具有凸起突起的区域）的研究中，在该过程中的几乎任何点，从而大大提高了样品制备的速度和效率。

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