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    • 4. 发明授权
    • Mechanism and method for controlling focal point position of UV light and apparatus and method for inspection
    • UV灯的焦点位置控制机构及方法及检测方法
    • US06801650B1
    • 2004-10-05
    • US09661743
    • 2000-09-14
    • Hiroki KikuchiAsahiko NogamiMasayuki Morita
    • Hiroki KikuchiAsahiko NogamiMasayuki Morita
    • G06K900
    • G01R31/2887G01N21/9501G01N21/956G01N2021/9513G01N2021/95676G01R31/311G03F7/70483G03F7/70691
    • A method and apparatus for controlling the focal position of the UV light for auto-focussing the converged UV light, and a method and apparatus and for inspecting a device, such as a semiconductor wafer or liquid crystal using the converged UV light, in which the UV light converged is to be auto-focussed accurately and speedily. The method includes an inspection stage 11 for supporting a semiconductor wafer, an objective lens for UV light 40 or converging a UV laser light for illuminating the laser light converged to the semiconductor wafer, a distance sensor 41 secured to this objective lens for UV light 40 to detect the distance to the semiconductor wafer and a controller for causing movement of the inspection stage 11 in a perpendicular direction. The controller causes the distance between the objective lens for UV light 40 and the semiconductor wafer to coincide with the target distance T based on the distance as detected by the distance sensor 41.
    • 用于控制用于自动聚焦的UV光的UV光的焦点位置的方法和装置,以及使用会聚的UV光来检测诸如半导体晶片或液晶的装置的方法和装置,其中 紫外光会聚是准确,快速地自动聚焦。 该方法包括:用于支撑半导体晶片的检查台11,用于UV光40的物镜或会聚用于照射会聚到半导体晶片的激光的UV激光;固定到该用于UV光40的物镜的距离传感器41 以检测到半导体晶片的距离和用于使检查台11沿垂直方向移动的控制器。 控制器使得用于UV光40的物镜与半导体晶片之间的距离与距离传感器41检测到的距离相对应于目标距离T.