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    • 2. 发明授权
    • Surface acoustic wave device and method for manufacturing the same
    • 表面声波装置及其制造方法
    • US08698580B2
    • 2014-04-15
    • US12958472
    • 2010-12-02
    • Shinichi Fukuda
    • Shinichi Fukuda
    • H03H9/64H03H9/145
    • H03H9/02992
    • A surface acoustic wave device includes first interconnections and second interconnections connected to a potential different from a potential connected to the first interconnections that are arranged on a piezoelectric substrate. The first interconnections three-dimensionally intersect with the second interconnections with insulating layers made of a thermosetting resin, disposed therebetween. Interdigital electrodes defining IDTs are films which have six-fold rotational symmetric spots appearing in an XRD pole figure and which are defined by Al films or Al—Cu alloy films containing Cu in an amount not greater than the solubility limit at about 25° C.
    • 表面声波装置包括连接到不同于连接到布置在压电基板上的第一互连的电位的电位的第一互连和第二互连。 第一互连件与具有由热固性树脂制成的绝缘层的第二互连三维相交,置于它们之间。 定义IDT的叉指电极是在XRD极图中出现六重旋转对称点的膜,其由含有不大于约25℃溶解度极限的Cu的Al膜或Al-Cu合金膜限定。
    • 7. 发明申请
    • SURFACE ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
    • 表面声波装置及其制造方法
    • US20110102108A1
    • 2011-05-05
    • US12958472
    • 2010-12-02
    • Shinichi FUKUDA
    • Shinichi FUKUDA
    • H03H9/64H04R17/00
    • H03H9/02992
    • A surface acoustic wave device includes first interconnections and second interconnections connected to a potential different from a potential connected to the first interconnections that are arranged on a piezoelectric substrate. The first interconnections three-dimensionally intersect with the second interconnections with insulating layers made of a thermosetting resin, disposed therebetween. Interdigital electrodes defining IDTs are films which have six-fold rotational symmetric spots appearing in an XRD pole figure and which are defined by Al films or Al—Cu alloy films containing Cu in an amount not greater than the solubility limit at about 25° C.
    • 表面声波装置包括连接到不同于连接到布置在压电基板上的第一互连的电位的电位的第一互连和第二互连。 第一互连件与具有由热固性树脂制成的绝缘层的第二互连三维相交,置于它们之间。 定义IDT的叉指电极是在XRD极图中出现六重旋转对称点的膜,其由含有不大于约25℃溶解度极限的Cu的Al膜或Al-Cu合金膜限定。