专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06801650B1 Mechanism and method for controlling focal point position of UV light and apparatus and method for inspection 失效
标题翻译： UV灯的焦点位置控制机构及方法及检测方法
公开(公告)号：US06801650B1
公开(公告)日：2004-10-05
申请号：US09661743
申请日：2000-09-14
申请人： Hiroki Kikuchi , Asahiko Nogami , Masayuki Morita
发明人： Hiroki Kikuchi , Asahiko Nogami , Masayuki Morita
IPC分类号： G06K900
CPC分类号： G01R31/2887 , G01N21/9501 , G01N21/956 , G01N2021/9513 , G01N2021/95676 , G01R31/311 , G03F7/70483 , G03F7/70691
摘要： A method and apparatus for controlling the focal position of the UV light for auto-focussing the converged UV light, and a method and apparatus and for inspecting a device, such as a semiconductor wafer or liquid crystal using the converged UV light, in which the UV light converged is to be auto-focussed accurately and speedily. The method includes an inspection stage 11 for supporting a semiconductor wafer, an objective lens for UV light 40 or converging a UV laser light for illuminating the laser light converged to the semiconductor wafer, a distance sensor 41 secured to this objective lens for UV light 40 to detect the distance to the semiconductor wafer and a controller for causing movement of the inspection stage 11 in a perpendicular direction. The controller causes the distance between the objective lens for UV light 40 and the semiconductor wafer to coincide with the target distance T based on the distance as detected by the distance sensor 41.
摘要翻译：用于控制用于自动聚焦的UV光的UV光的焦点位置的方法和装置，以及使用会聚的UV光来检测诸如半导体晶片或液晶的装置的方法和装置，其中紫外光会聚是准确，快速地自动聚焦。该方法包括：用于支撑半导体晶片的检查台11，用于UV光40的物镜或会聚用于照射会聚到半导体晶片的激光的UV激光;固定到该用于UV光40的物镜的距离传感器41 以检测到半导体晶片的距离和用于使检查台11沿垂直方向移动的控制器。控制器使得用于UV光40的物镜与半导体晶片之间的距离与距离传感器41检测到的距离相对应于目标距离T.

2. 发明授权

US06541747B1 Focal mechanism and method for controlling focal point position, and apparatus and method for inspecting semiconductor wafer 失效
标题翻译：用于控制焦点位置的焦点机构和方法，以及用于检查半导体晶片的装置和方法
公开(公告)号：US06541747B1
公开(公告)日：2003-04-01
申请号：US09661890
申请日：2000-09-14
申请人： Hiroki Kikuchi , Asahiko Nogami
发明人： Hiroki Kikuchi , Asahiko Nogami
IPC分类号： G02B2740
CPC分类号： G02B7/36
摘要： For effecting auto-focussing of an objective lens used for observing a semiconductor wafer, a semiconductor microscopic device includes an inspection stage for supporting a semiconductor wafer and an objective lens for observing the semiconductor wafer. For automatic focussing of the objective lens, a defocussing magnitude of a light spot is detected using a knife edge. A collimator lens is oscillated by a voice coil motor to oscillate the light spot on the wafer. A peak value of the defocussing quantity detected at this time is peak-held to generate a position detection signal. The inspection stage is vertically moved so that this position detection signal will be equal to a pre-set target value.
摘要翻译：为了实现用于观察半导体晶片的物镜的自动聚焦，半导体微观器件包括用于支撑半导体晶片的检查台和用于观察半导体晶片的物镜。对于物镜的自动聚焦，使用刀刃检测光点的散焦幅度。准直透镜由音圈电机振荡以使晶片上的光点振荡。此时检测到的聚焦量的峰值被峰值保持以产生位置检测信号。检查台垂直移动，使得该位置检测信号将等于预定的目标值。

3. 发明授权

US08457550B2 Wireless communication device and power receiving device 有权
标题翻译：无线通信设备和电力接收设备
公开(公告)号：US08457550B2
公开(公告)日：2013-06-04
申请号：US12543930
申请日：2009-08-19
申请人： Tetsuro Goto , Shinichi Fukuda , Asahiko Nogami
发明人： Tetsuro Goto , Shinichi Fukuda , Asahiko Nogami
IPC分类号： H04B5/00
CPC分类号： H04B5/02 , G06K7/0008 , H01Q1/2208 , H02J5/005 , H02J7/025 , H02J50/12
摘要： A wireless communication device is provided and includes: a first communication processing unit performing communication in an electromagnetic induction system by using a first antenna unit; a second communication processing unit performing communication at higher speed than the first communication processing unit by a system or a communication frequency different from the electromagnetic induction system by using a second antenna unit; and a power generation unit generating power at least for performing communication operations from a carrier signal received by the first antenna unit. The power is generated in the power generation unit by switching a frequency resonance characteristic of the first antenna unit.
摘要翻译：提供了一种无线通信设备，包括：第一通信处理单元，通过使用第一天线单元在电磁感应系统中执行通信; 第二通信处理单元，通过使用第二天线单元的系统或与电磁感应系统不同的通信频率，以比第一通信处理单元更高的速度进行通信; 以及发电单元，至少用于从由所述第一天线单元接收的载波信号进行通信操作。通过切换第一天线单元的频率共振特性，在发电单元中产生功率。

4. 发明授权

US5814732A Laser doppler speed measuring apparatus 失效
标题翻译：激光多普勒测速仪
公开(公告)号：US5814732A
公开(公告)日：1998-09-29
申请号：US708319
申请日：1996-09-05
申请人： Asahiko Nogami
发明人： Asahiko Nogami
IPC分类号： G01P3/36 , G01S7/491 , G01S7/497 , G01S17/50 , G01S17/58 , G01N21/41
CPC分类号： G01S17/58 , G01S7/4912 , G01S7/497
摘要： A laser Doppler speed measuring apparatus comprises a laser light source, a photodetector, an FM demodulator, and an integrated filter circuit. A selector switch is interposed between the FM demodulator and the integrated filter circuit so as to ensure switching between an output of the FM demodulator and a terminal for directly receiving an external signal.
摘要翻译：激光多普勒速度测量装置包括激光光源，光电检测器，FM解调器和集成滤波电路。在FM解调器和集成滤波器电路之间插入选择器开关，以确保FM解调器的输出与用于直接接收外部信号的端子之间的切换。

5. 发明授权

US08436718B2 Noncontact communication apparatus and noncontact communication method 有权
标题翻译：非接触通信装置和非接触通信方法
公开(公告)号：US08436718B2
公开(公告)日：2013-05-07
申请号：US12801318
申请日：2010-06-03
申请人： Tetsuro Goto , Shinichi Fukuda , Asahiko Nogami
发明人： Tetsuro Goto , Shinichi Fukuda , Asahiko Nogami
IPC分类号： H04Q5/22 , H03H7/00
CPC分类号： G06K7/0008 , G06K7/10158 , G06K7/10198 , G06K7/10217
摘要： A noncontact communication apparatus is disclosed which includes: an antenna resonance circuit configured to have a coil for communicating with an opposite party through electromagnetic coupling; a changing block configured to change a Q-factor of the antenna resonance circuit; and a control block configured to control the antenna resonance circuit to transmit and receive data to and from the opposite party at one of a plurality of communication speeds prepared beforehand, the control block further controlling the changing block to reduce the Q-factor the higher the communication speed in use.
摘要翻译：公开了一种非接触通信装置，其包括：天线谐振电路，其被配置为具有用于通过电磁耦合与对方通信的线圈; 改变块，被配置为改变天线谐振电路的Q因子; 以及控制块，其被配置为控制所述天线谐振电路以预先准备的多个通信速度中的一个传输和向对方接收数据，所述控制块进一步控制所述改变块以降低Q因子通信速度在使用中。

6. 发明申请

US20100210207A1 WIRELESS COMMUNICATION DEVICE AND POWER RECEIVING DEVICE 有权
标题翻译：无线通信设备和功率接收设备
公开(公告)号：US20100210207A1
公开(公告)日：2010-08-19
申请号：US12543930
申请日：2009-08-19
申请人： Tetsuro Goto , Shinichi Fukuda , Asahiko Nogami
发明人： Tetsuro Goto , Shinichi Fukuda , Asahiko Nogami
IPC分类号： H04B5/00
CPC分类号： H04B5/02 , G06K7/0008 , H01Q1/2208 , H02J5/005 , H02J7/025 , H02J50/12
摘要： A wireless communication device is provided and includes: a first communication processing unit performing communication in an electromagnetic induction system by using a first antenna unit; a second communication processing unit performing communication at higher speed than the first communication processing unit by a system or a communication frequency different from the electromagnetic induction system by using a second antenna unit; and a power generation unit generating power at least for performing communication operations from a carrier signal received by the first antenna unit. The power is generated in the power generation unit by switching a frequency resonance characteristic of the first antenna unit.
摘要翻译：提供了一种无线通信设备，包括：第一通信处理单元，通过使用第一天线单元在电磁感应系统中执行通信; 第二通信处理单元，通过使用第二天线单元的系统或与电磁感应系统不同的通信频率，以比第一通信处理单元更高的速度进行通信; 以及发电单元，至少用于从由所述第一天线单元接收的载波信号进行通信操作。通过切换第一天线单元的频率共振特性，在发电单元中产生功率。

7. 发明授权

US6128083A Displacement measuring apparatus 有权
标题翻译：位移测量仪
公开(公告)号：US6128083A
公开(公告)日：2000-10-03
申请号：US287046
申请日：1999-04-06
申请人： Asahiko Nogami
发明人： Asahiko Nogami
IPC分类号： G01B9/02 , G01B11/00
CPC分类号： G01B9/02069 , G01B9/0201 , G01B9/02083
摘要： The displacement measuring apparatus of a laser interference technology includes a probe 3 which delivers at a photodetector 17 an RF signal of which a modulated component proportional to a displacement of an object 2 under measurement. The apparatus has also a phase-demodulation circuit 9 in which an interference signal produced by shifting the frequency of the RF signal to an intermediate frequency is phase-demodulated on the basis of the carrier signal for supply to a light modulator 16. Thus the apparatus can detect a displacement of the object with a high resolution.
摘要翻译：激光干涉技术的位移测量装置包括探针3，其在光电检测器17处传送与被测量物体2的位移成比例的调制分量的RF信号。该装置还具有相位解调电路9，其中通过将RF信号的频率偏移到中频产生的干扰信号基于用于提供给光调制器16的载波信号被相位解调。因此，装置可以以高分辨率检测物体的位移。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式