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    • 5. 发明申请
    • LOW CONTACT RESISTANCE SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING THE SAME
    • 低接触电阻半导体结构及其制造方法
    • US20120241752A1
    • 2012-09-27
    • US13301298
    • 2011-11-21
    • Te-Chung WangFu-Bang ChenHsiu-Mu Tang
    • Te-Chung WangFu-Bang ChenHsiu-Mu Tang
    • H01L33/30H01L33/42
    • H01L33/42H01L33/38H01L2933/0016
    • A low contact resistance semiconductor structure includes a substrate, a semiconductor stacked layer, a low contact resistance layer and a transparent conductive layer. The low contact resistance layer is formed on one side of a P-type GaN layer of the semiconductor stacked layer. The low contact resistance layer is formed at a thickness smaller than 100 Angstroms and made of a material selected from the group consisting of aluminum, gallium, indium, and combinations thereof. Through the low contact resistance layer, the resistance between the P-type GaN layer and transparent conductive layer can be reduced and light emission efficiency can be improved when being used on LEDs. The method of fabricating the low contact resistance semiconductor structure of the invention forms a thin and consistent low contact resistance layer through a Metal Organic Chemical Vapor Deposition (MOCVD) method to enhance matching degree among various layers.
    • 低接触电阻半导体结构包括衬底,半导体堆叠层,低接触电阻层和透明导电层。 低接触电阻层形成在半导体层叠层的P型GaN层的一侧。 低接触电阻层形成厚度小于100埃,由选自铝,镓,铟及其组合的材料制成。 通过低接触电阻层,可以降低P型GaN层和透明导电层之间的电阻,并且在用于LED时可以提高发光效率。 本发明的低接触电阻半导体结构的制造方法通过金属有机化学气相沉积(MOCVD)方法形成薄且一致的低接触电阻层,以增强各层之间的匹配度。
    • 6. 发明授权
    • Low contact resistance semiconductor structure and method of fabricating the same
    • 低接触电阻半导体结构及其制造方法
    • US08659029B2
    • 2014-02-25
    • US13301298
    • 2011-11-21
    • Te-Chung WangFu-Bang ChenHsiu-Mu Tang
    • Te-Chung WangFu-Bang ChenHsiu-Mu Tang
    • H01L33/00
    • H01L33/42H01L33/38H01L2933/0016
    • A low contact resistance semiconductor structure includes a substrate, a semiconductor stacked layer, a low contact resistance layer and a transparent conductive layer. The low contact resistance layer is formed on one side of a P-type GaN layer of the semiconductor stacked layer. The low contact resistance layer is formed at a thickness smaller than 100 Angstroms and made of a material selected from the group consisting of aluminum, gallium, indium, and combinations thereof. Through the low contact resistance layer, the resistance between the P-type GaN layer and transparent conductive layer can be reduced and light emission efficiency can be improved when being used on LEDs. The method of fabricating the low contact resistance semiconductor structure of the invention forms a thin and consistent low contact resistance layer through a Metal Organic Chemical Vapor Deposition (MOCVD) method to enhance matching degree among various layers.
    • 低接触电阻半导体结构包括衬底,半导体堆叠层,低接触电阻层和透明导电层。 低接触电阻层形成在半导体层叠层的P型GaN层的一侧。 低接触电阻层形成厚度小于100埃,由选自铝,镓,铟及其组合的材料制成。 通过低接触电阻层,可以降低P型GaN层和透明导电层之间的电阻,并且在用于LED时可以提高发光效率。 本发明的低接触电阻半导体结构的制造方法通过金属有机化学气相沉积(MOCVD)方法形成薄且一致的低接触电阻层,以增强各层之间的匹配度。