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    • 2. 发明授权
    • Polishing composition
    • 抛光组成
    • US06398827B1
    • 2002-06-04
    • US09605542
    • 2000-06-29
    • Isao OtaTohru NishimuraYoshitane WatanabeYoshiyuki KashimaKiyomi EmaYutaka Ohmori
    • Isao OtaTohru NishimuraYoshitane WatanabeYoshiyuki KashimaKiyomi EmaYutaka Ohmori
    • C09K314
    • C09K3/1463C09G1/02
    • The present invention relates to a polishing composition for polishing alumina disks, polishing substrates having silica surfaces and semiconductor wafers, comprising a stable aqueous silica sol containing moniliform colloidal silica particles having a ratio (D1/D2) of a particle diameter D1 nm (as measured by dynamic light scattering method) to a mean particle diameter D2 (as measured by nitrogen absorption method) of 3 or more, wherein D1 is between 50 to 800 nm and D2 is between 10 to 120 nm, said moniliform colloidal silica particles being composed of spherical colloidal silica particles and a metal oxide-containing silica bond which bonds these spherical colloidal silica particles together, wherein the spherical colloidal silica particles are linked together in rows in only one plane by observation through an electron microscope, and further wherein said polishing composition contains 0.5 to 50% by weight of said moniliform colloidal silica particles.
    • 本发明涉及一种用于抛光氧化铝盘的抛光组合物,具有二氧化硅表面的抛光衬底和半导体晶片,其包含稳定的含水二氧化硅溶胶,其含有粒径为D1nm(D1 / D2)的粒径为D1nm 通过动态光散射法)至平均粒径D2(通过氮吸收法测定)为3以上,其中D1为50〜800nm,D2为10〜120nm,所述观察胶体二氧化硅粒子为 球形胶体二氧化硅颗粒和将这些球形胶体二氧化硅颗粒结合在一起的含金属氧化物的二氧化硅结合体,其中通过电子显微镜观察,球形胶体二氧化硅颗粒在一个平面内以行排列在一起,并且其中所述抛光组合物含有 0.5〜50重量%的所述念珠状胶体二氧化硅粒子。
    • 3. 发明授权
    • Silica-magnesium fluoride hydrate composite sols and process for their preparation
    • 二氧化硅 - 氟化镁水合物复合溶胶及其制备方法
    • US06291535B1
    • 2001-09-18
    • US09455928
    • 1999-12-07
    • Yoshitane WatanabeKeitaro SuzukiOsamu TanegashimaYoshinari Koyama
    • Yoshitane WatanabeKeitaro SuzukiOsamu TanegashimaYoshinari Koyama
    • B01F312
    • B82Y30/00C01B33/14C01F5/28C01P2004/50C01P2004/64
    • A sol comprising silica-magnesium fluoride hydrate composite colloidal particles used in an anti-reflection coating material for forming an anti-reflection coating and a process for its preparation are provided. A sol comprising silica-magnesium fluoride hydrate composite colloidal particles having a ratio of silica to magnesium fluoride hydrate MgF2.nH2O, n being in the range between 0.25 and 0.5, in terms of a SiO2/MgF2 weight ratio of from 0.01 to 5 and a primary particle size of 5 to 50 nm. A process for the preparation of an aqueous sol comprising silica-magnesium fluoride hydrate composite colloidal particles which comprises the steps of adding an aqueous fluoride solution to a mixture liquid of a silica sol and an aqueous magnesium salt solution to produce a slurry of an agglomerate comprising silica-magnesium fluoride hydrate composite colloidal particles and removing the salts formed as by-products. A process for the preparation of an organosol further comprising the step of replacing water in the aqueous sol with an organic solvent.
    • 提供一种包含用于形成抗反射涂层的防反射涂层材料中的二氧化硅 - 氟化镁水合物复合胶体颗粒及其制备方法。 包含二氧化硅 - 氟化镁水合物复合胶体粒子的溶胶,SiO 2 / MgF 2重量比为0.01〜5,二氧化硅与氟化镁水合物的比例为MgF 2·nH 2 O,n为0.25〜0.5的范围, 一次粒径为5〜50nm。 一种制备包含二氧化硅 - 氟化镁水合物复合胶体颗粒的水性溶胶的方法,包括以下步骤:向二氧化硅溶胶和镁盐水溶液的混合液中加入氟化钠水溶液,以产生附聚物的浆料,其包含 二氧化硅 - 氟化镁水合物复合胶体颗粒并除去作为副产物形成的盐。 一种制备有机溶胶的方法,还包括用有机溶剂代替水溶胶中的水的步骤。