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    • 5. 发明授权
    • Cerium oxide sol and abrasive
    • 氧化铈溶胶和磨料
    • US07887714B2
    • 2011-02-15
    • US10015675
    • 2001-12-17
    • Isao OtaKenji TanimotoTohru Nishimura
    • Isao OtaKenji TanimotoTohru Nishimura
    • C09K13/00
    • B82Y30/00C01F17/0043C01P2002/01C01P2002/72C01P2004/10C01P2004/61C01P2004/62C01P2004/64C01P2006/12C09G1/02C09K3/1472
    • There is provided an abrasive used for polishing a substrate which comprises silica as a main component, for example a rock crystal, a quartz glass for photomask, for CMP of an organic film, Inter Layer Dielectric (ILD) and shallow trench isolation of a semiconductor device, or for polishing a hard disk made of glass.A sol which particles are dispersed in a medium, wherein the particles have a particle size of 0.005 to 1 μm and comprise as a main component crystalline cerium oxide of the cubic system and as an additional component a lanthanum compound, a neodymium compound or a combination thereof, wherein the additional component is contained in X/(Ce+X) molar ratio of 0.001 to 0.5 in which X is lanthanum atoms, neodymium atoms or a combination thereof.The sol is prepared by reacting an aqueous solution which a cerium (III) salt is mixed with a lanthanum (III) salt and/or a neodymium (III) salt, with an alkaline substance to give a suspension in which cerium (III) hydroxide is homogeneously mixed with lanthanum (III) hydroxide and/or neodymium (III) hydroxide, and blowing oxygen or a gas containing oxygen into the suspension.
    • 提供了用于抛光基底的磨料,其包括二氧化硅作为主要成分,例如岩石晶体,用于光掩模的石英玻璃,用于有机膜的CMP,层间介电(ILD)和半导体的浅沟槽隔离 装置或用于抛光由玻璃制成的硬盘。 一种溶胶,其中颗粒分散在介质中,其中颗粒的粒度为0.005至1μm,并且包含作为立方体系的结晶二氧化铈的主要组分,并且作为附加组分的镧化合物,钕化合物或组合 其中所述附加成分以X =(Ce + X)摩尔比为0.001〜0.5,X为镧原子,钕原子或其组合。 通过使铈(III)盐与镧(III)盐和/或钕(III)盐混合的水溶液与碱性物质反应制备溶胶,得到悬浮液,其中氢氧化铈(III) 与氢氧化镧(III)和/或氢氧化钕(III)均匀混合,并将氧气或含有氧的气体吹入悬浮液中。
    • 8. 发明授权
    • Crystalline ceric oxide sol and process for producing the same
    • 结晶氧化铈溶胶及其制备方法
    • US06706082B2
    • 2004-03-16
    • US10076500
    • 2002-02-19
    • Isao OtaTohru NishimuraKenji Tanimoto
    • Isao OtaTohru NishimuraKenji Tanimoto
    • C01P1700
    • C09G1/02B82Y30/00C01F17/0043C01P2004/53C01P2004/64C01P2006/12C01P2006/40C09K3/1436C09K3/1463
    • Substantially monodisperse crystalline ceric oxide sols and processes for producing such sols are provided. Sols include crystalline ceric oxide particles having a particle size I (particle size converted from specific surface area by gas absorption method) ranging from 10 nm to 200 nm and a ratio of particle size II (particle size measured by dynamic light scattering method) to particle size I ranging from 2 to 6. Sols can be prepared by reacting a cerium (III) salt with an alkaline substance in an aqueous medium under an inert gas atmosphere to obtain a suspension of cerium (III) hydroxide, immediately blowing oxygen or a gas containing oxygen into the suspension to obtain a sol comprising crystalline ceric oxide particles, and wet grinding the resulting sol. Sols are also prepared by calcining cerium carbonate at a temperature of 300 to 1100° C. to give cerium oxide particles, and wet-grinding the resulting particles.
    • 提供了基本上单分散的结晶二氧化铈溶胶和制备这种溶胶的方法。 熔体包括10nm至200nm范围内的粒径I(通过气体吸收法从比表面积转化的粒径)和粒径II(通过动态光散射法测量的粒径)与粒子的比例的结晶二氧化铈粒子 尺寸I范围为2至6.可以通过在惰性气体气氛下在水性介质中使铈(III)盐与碱性物质反应制备,以获得氢氧化铈(III)的悬浮液,立即吹入氧气或气体 将氧气加入到悬浮液中以获得包含结晶二氧化铈颗粒的溶胶,并湿法研磨所得溶胶。 还可以通过在300〜1100℃的温度下煅烧碳酸铈以制备氧化铈颗粒并湿磨研磨所得的颗粒来制备。