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    • 1. 发明授权
    • Sintered product of silicon nitride
    • 氮化硅烧结制品
    • US5804523A
    • 1998-09-08
    • US853410
    • 1997-05-09
    • Takehiro OdaKoichi TanakaTomohiro IwaidaSentaro YamamotoShoji KohsakaMasahiro SatoHideki UchimuraKenichi Tajima
    • Takehiro OdaKoichi TanakaTomohiro IwaidaSentaro YamamotoShoji KohsakaMasahiro SatoHideki UchimuraKenichi Tajima
    • C04B35/593C04B35/587
    • C04B35/593C04B35/5935
    • A sintered product of silicon nitride containing not smaller than 70 mol % of a .beta.-silicon nitride as well as an element of the Group 3a at least including Lu of periodic table and impurity oxygen, wherein when the content of the element of the Group 3a of periodic table and the content of the impurity oxygen are, respectively, expressed being reckoned as the amount of an oxide of the element of the Group 3a of periodic table (RE.sub.2 O.sub.3) and as the amount of SiO.sub.2 of impurity oxygen, their total amount is from 2 to 30 mol %, the molar ratio (SiO.sub.2 /RE.sub.2 O.sub.3) of the amount of the element of the Group 3a of periodic table reckoned as the oxide (RE.sub.2 O.sub.3) thereof to the amount of impurity oxygen reckoned as SiO.sub.2 is from 1.6 to 10, and the intergranular phase of the sintered product chiefly comprises a crystal phase consisting of the element of the Group 3a of periodic table, silicon and oxygen and a process for producing the same. The sintered product has a large strength from room temperature through up to high temperatures and maintains excellent resistance against oxidation even at high temperatures, and exhibits excellent resistance against creeping and excellent breaking toughness.
    • 包含不小于70mol%的β-氮化硅的氮化硅的烧结产品以及至少包括Lu的元素周期表和杂质氧的第3a族的元素,其中当第3a族元素的含量 的周期表和杂质氧的含量分别表示为元素周期表(RE 2 O 3)的第3a族元素的氧化物的量和杂质氧的SiO 2的量,它们的总量是 2〜30摩尔%时,作为氧化物(RE 2 O 3)的元素周期表中的元素的量与作为SiO 2计算的杂质氧的量的摩尔比(SiO 2 / RE 2 O 3)为1.6〜10 ,并且烧结体的晶间相主要包含由元素周期表第3a族元素,硅和氧组成的结晶相及其制造方法。 该烧结体从室温至高温具有很大的强度,即使在高温下也能保持优异的抗氧化性,并且具有优异的抗蠕变性和优异的断裂韧性。
    • 4. 再颁专利
    • Ceramic sintered product and process for producing the same
    • 陶瓷烧结产品及其制造方法
    • USRE39120E1
    • 2006-06-06
    • US10124067
    • 2002-04-16
    • Yoshihisa SechiMasahiro SatoHiroshi AidaShoji KohsakaYutaka Hayashi
    • Yoshihisa SechiMasahiro SatoHiroshi AidaShoji KohsakaYutaka Hayashi
    • C04B35/195
    • H01L23/15C04B35/195H01L2924/0002H01L2924/00
    • Low thermal expansion ceramics contains a cordierite crystal phase, wherein a phase of a crystalline compound containing at least one element selected from the group consisting of an alkaline earth element other than Mg, a rare earth element, Ga and In, is precipitated in the grain boundaries of said crystal phase, said ceramics has a relative density of not smaller than 95%, a coefficient of thermal expansion of not larger than 1×10−6/° C. at 10 to 40° C., and a Young's modulus of not smaller than 130 GPa. That is, the ceramics has a small coefficient of thermal expansion, is deformed very little depending upon a change in the temperature, has a very high Young's modulus and is highly rigid and is resistance against external force such as vibration. Accordingly, the ceramics is very useful as a member for supporting a wafer or an optical system is a lithography apparatus that forms high resolution circuit patterns on a silicon wafer.
    • 低热膨胀陶瓷含有堇青石结晶相,其中含有选自Mg以外的碱土金属元素,稀土元素,Ga和In中的至少一种元素的结晶化合物的相析出在晶粒中 所述晶相的边界,所述陶瓷的相对密度不低于95%,热膨胀系数在10-40℃下不大于1×10 -6 /℃, 杨氏模量不小于130GPa。 也就是说,陶瓷具有小的热膨胀系数,根据温度的变化而变形很小,具有非常高的杨氏模量,并且是高度刚性的并且是抗外力如振动的抵抗力。 因此,陶瓷作为用于支撑晶片的部件是非常有用的,或者光学系统是在硅晶片上形成高分辨率电路图案的光刻设备。
    • 5. 发明授权
    • Ceramic sintered product and process for producing the same
    • 陶瓷烧结产品及其制造方法
    • US06265334B1
    • 2001-07-24
    • US09177977
    • 1998-10-22
    • Yoshihisa SechiMasahiro SatoHiroshi AidaShoji Kohsaka
    • Yoshihisa SechiMasahiro SatoHiroshi AidaShoji Kohsaka
    • C04B35195
    • H01L23/15C04B35/195H01L2924/0002H01L2924/00
    • Low thermal expansion ceramics contains a cordierite crystal phase, wherein a phase of a crystalline compound containing at least one element selected from the group consisting of an alkaline earth element other than Mg, a rare earth element, Ga and In, is precipitated in the grain boundaries of said crystal phase, said ceramics has a relative density of not smaller than 95%, a coefficient of thermal expansion of not larger than 1×10−6/° C. at 10 to 40° C., and a Young's modulus of not smaller than 130 GPa. That is, the ceramics has a small coefficient of thermal expansion, is deformed very little depending upon a change in the temperature, has a very high Young's modulus and is highly rigid and is resistance against external force such as vibration. Accordingly, the ceramics is very useful as a member for supporting a wafer or an optical system is a lithography apparatus that forms high resolution circuit patterns on a silicon wafer.
    • 低热膨胀陶瓷含有堇青石结晶相,其中含有选自Mg以外的碱土金属元素,稀土元素,Ga和In中的至少一种元素的结晶化合物的相析出在晶粒中 所述结晶相的边界,所述陶瓷的相对密度不低于95%,热膨胀系数在10〜40℃不大于1×10 -6 /℃,杨氏模量不小于 超过130 GPa。 也就是说,陶瓷具有小的热膨胀系数,根据温度的变化而变形很小,具有非常高的杨氏模量,并且是高度刚性的并且是抗外力如振动的抵抗力。 因此,陶瓷作为用于支撑晶片的部件是非常有用的,或者光学系统是在硅晶片上形成高分辨率电路图案的光刻设备。
    • 7. 发明授权
    • Fuel cell
    • 燃料电池
    • US07351487B2
    • 2008-04-01
    • US10424889
    • 2003-04-28
    • Shoji YamashitaShoji Kohsaka
    • Shoji YamashitaShoji Kohsaka
    • H01M8/12
    • H01M8/1226H01M4/9066H01M8/0217H01M8/1253H01M8/1286H01M8/2425H01M8/243Y02E60/525Y02P70/56
    • A fuel cell comprising a gas-permeable and electrically conducting support substrate having a fuel gas passage formed therein; a fuel-electrode layer formed on said substrate; a solid electrolytic layer formed on said support substrate so as to cover said fuel-electrode layer and containing ZrO2 in which rare earth elements are existing in the form of solid solutions; and an oxygen-electrode provided on the solid electrolytic layer so as to face said fuel-electrode layer; wherein said support substrate is formed of a metal of the iron family and/or an oxide of a metal of the iron family, and a rare-earth oxide containing at least one kind of element selected from the group consisting of Y, Lu, Yb, Tm, Er, Ho, Dy, Gd, Sm and Pr. The invention brings a coefficient of thermal expansion of the support substrate close to that of the solid electrolytic layer, and prevents a reduction in the performance of the solid electrolyte caused by the diffusion of elements from the support substrate.
    • 一种燃料电池,包括具有形成在其中的燃料气体通道的透气且导电的支撑基板; 形成在所述基板上的燃料电极层; 形成在所述支撑基板上的固体电解质层,以便覆盖所述燃料电极层并且含有稀土元素以固溶体的形式存在的ZrO 2 N 2; 以及设置在所述固体电解质层上以与所述燃料电极层相对的氧电极; 其特征在于,所述支撑基板由铁族的金属和/或所述铁族的金属的氧化物形成,并且含有选自Y,Lu,Yb中的至少一种元素的稀土氧化物 ,Tm,Er,Ho,Dy,Gd,Sm和Pr。 本发明使支撑基板的热膨胀系数接近固体电解质层的热膨胀系数,并且防止由于元件从支撑基板的扩散而导致的固体电解质性能的降低。
    • 8. 发明授权
    • Fuel cell
    • 燃料电池
    • US07285348B2
    • 2007-10-23
    • US10789932
    • 2004-02-27
    • Shoji YamashitaTakashi OnoShoji KohsakaKazuto MatsukamiMasato Nishihara
    • Shoji YamashitaTakashi OnoShoji KohsakaKazuto MatsukamiMasato Nishihara
    • H01M8/12H01M8/24
    • H01M8/0247H01M8/1231H01M8/2425H01M8/2432
    • A solid oxide fuel cell comprising an electrically conducting electrode-support substrate, an inner electrode layer, a solid electrolyte layer, an outer electrode layer and an interconnector, wherein said electrode-support substrate includes a flat plate having two flat surfaces which are in parallel with each other and forming a plurality of gas flow passages therein, and curved portions located at both ends of said flat plate, and said outer electrode layer is laminated on the solid electrolyte layer so as to be opposed to the other surface of said flat plate where the interconnector is not provided but so as not to be opposed to said curved portions. The solid oxide fuel cell features a small voltage drop, an increased output density, and is easily produced exhibiting stable characteristics.
    • 一种固体氧化物燃料电池,包括导电电极支撑基板,内部电极层,固体电解质层,外部电极层和互连器,其中所述电极支撑基板包括具有平行的两个平坦表面的平板 彼此形成多个气流通道,并且位于所述平板的两端的弯曲部分和所述外电极层层压在固体电解质层上以与所述平板的另一表面相对 其中没有设置互连器,而是不与所述弯曲部分相对。 固体氧化物燃料电池具有小的电压降,增加的输出密度,并且容易产生,表现出稳定的特性。
    • 9. 发明授权
    • Corrosion-resistant member
    • 耐腐蚀构件
    • US06258741B1
    • 2001-07-10
    • US09201030
    • 1998-11-30
    • Shoji KohsakaYumiko ItohHitoshi MatsunosakoHidemi MatsumotoMasahito Nakanishi
    • Shoji KohsakaYumiko ItohHitoshi MatsunosakoHidemi MatsumotoMasahito Nakanishi
    • C04B35563
    • C04B35/563
    • This invention relates to a corrosion-resistant member used in a region in which a gas or a plasma of a halogen-containing compound is used, in a process for producing semiconductors, especially a member used as jigs such as a supporter for supporting a material to be treated, or as an inner wall member in an apparatus for producing semiconductors, which has a high corrosion resistance to a fluorine type or a chlorine type corrosive gas, or a fluorine type or a chlorine type plasma. According to this invention, there are provided a corrosion-resistant member to be used ina region in which a gas or plasma of a halogen compound is used in a process of producing a semiconductor, wherein at least surface exposed to the gas or plasma is formed of a boron carbide sintered body having a relative density of at least 96% and containing 300 ppm or below, in a total amount, of an alkali metal, an alkalin earth metal and a transition metal, and a process for producing the same.
    • 本发明涉及在半导体制造方法中使用的含卤素化合物的气体或等离子体的区域中使用的耐腐蚀性构件,特别是用作支撑材料的支撑体等的构件 作为对氟类或氯型腐蚀性气体或氟型或氯型等离子体具有高耐腐蚀性的半导体制造装置中的内壁部件。 根据本发明,提供了在制造半导体的工艺中使用卤素化合物的气体或等离子体的区域中使用的耐腐蚀构件,其中形成至少暴露于气体或等离子体的表面 的碳化硼烧结体及其制造方法,其总量相对于碱金属,碱土金属和过渡金属的相对密度为96%以上且含有300ppm以下。
    • 10. 发明授权
    • Illuminating display device for use with a mosaic panel
    • 照明显示装置,用于镶嵌面板
    • US5390093A
    • 1995-02-14
    • US198858
    • 1994-02-18
    • Tomiharu HimenoShoji Kohsaka
    • Tomiharu HimenoShoji Kohsaka
    • H02B1/04F21V29/00G09F9/33H02B15/04
    • F21V29/505G09F9/3026G09F9/33F21V29/004F21Y2101/00Y10S362/80
    • Disclosed is an illuminating display device for use with a mosaic panel, in which necessary display devices, measuring instruments, and the like are mounted to a crosswise-shaped metallic grid, to form a panel surface, and on which light-emitting diodes are arranged at a high density to afford a high-luminance display surface. The illuminating display device prevents the display surface and the interior of the display device from increasing in temperature to high due to heat generated by a large number of light-emitting diodes. The whole illuminating display device is composed of a base frame (4) mountable to and removable from the grid, and a circuit board (5) and a reflector (6) to be mounted on the base frame. The base frame (4) is composed of a leg (4b), which is in face-to-face contact with a partitioning wall (2a) of the grid and which is engaged with the grid by its engaging claw (4c), and a base seat (4a) on which a circuit board and others are mounted, wherein the base seat (4a) and the leg ( 4b) are made of metal and integrally provided. By this arrangement, heat generated by illumination of the light-emitting diodes is conducted via the base frame to the metallic grid, thus effectively radiated as a whole.
    • 公开了一种与马赛克面板一起使用的照明显示装置,其中必要的显示装置,测量仪器等安装在横向形状的金属格栅上,以形成面板表面,并且其上布置有发光二极管 以高密度提供高亮度显示表面。 照明显示装置防止由于大量发光二极管产生的热量而使显示装置的显示面和内部的温度升高。 整个照明显示装置由可安装到栅格的可拆卸的基架(4)和安装在基架上的电路板(5)和反射板(6)构成。 基座框架(4)由与栅格的分隔壁(2a)面对面接触并通过其接合爪(4c)与栅格接合的腿部(4b)构成,以及 其上安装有电路板等的基座(4a),其中所述基座(4a)和所述支脚(4b)由金属制成并且一体地设置。 通过这种布置,通过发光二极管的照明产生的热通过基架传导到金属栅格,因此整体上被有效地辐射。