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    • 10. 发明授权
    • Dynamic random access memory device with the combined open/folded
bit-line pair arrangement
    • 具有组合打开/折叠位线对布置的动态随机存取存储器件
    • US5838038A
    • 1998-11-17
    • US478620
    • 1995-06-07
    • Daisaburo TakashimaShigeyoshi WatanabeTohru OzakiTakeshi HamamotoYukihito Oowaki
    • Daisaburo TakashimaShigeyoshi WatanabeTohru OzakiTakeshi HamamotoYukihito Oowaki
    • G11C7/18H01L27/108
    • G11C7/18G11C2211/4013
    • A semiconductor memory device includes active regions arranged on a semiconductor substrate such that those of the active regions which are adjacent in the word line direction deviate in the bit line direction, MOS transistors respectively formed in the active regions and each having a source and a drain one of which is connected to the bit line, a plurality of trenches each arranged to another set of source an drain regions and arranged to deviate in the word line direction in the respective active regions, those of the trenches which are adjacent with a through word line disposed therebetween being arranged to deviate in the bit line direction so as to be set closer to each other, a plurality of storage electrodes respectively formed in the trenches with capacitor insulative films disposed therebetween, and connection electrodes arranged between the word lines and each connecting the other of the source and drain to the storage electrode.
    • 半导体存储器件包括布置在半导体衬底上的有源区域,使得在字线方向上相邻的有源区域在位线方向偏离的有源区域分别形成在有源区域中并且各自具有源极和漏极 其中一个连接到位线,多个沟槽,每个沟槽被布置成另一组源极漏极区域,并且被布置成在相应的有源区域中的字线方向偏离,与通过字相邻的沟槽的那些沟槽 配置在它们之间的线被布置为在位线方向上偏离以使得彼此更靠近,分别形成在沟槽中的多个存储电极,其中设置有电容器绝缘膜,以及布置在字线和每个连接之间的连接电极 另一个源极和漏极到存储电极。