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    • 5. 发明授权
    • Laser induced thermal imaging apparatus and laser induced thermal imaging method
    • 激光诱导热成像设备和激光诱导热成像方法
    • US07704666B2
    • 2010-04-27
    • US11509463
    • 2006-08-23
    • Sok Won NohTae Min KangJin Soo KimNoh Min KwakJae Ho Lee
    • Sok Won NohTae Min KangJin Soo KimNoh Min KwakJae Ho Lee
    • G03C8/00G03C1/00
    • B41J2/325H01L51/0013H01L51/56
    • A laser induced thermal imaging apparatus and a laser induced thermal imaging method. A laser induced thermal imaging apparatus has electromagnets in an adhesion frame and a substrate stage to closely adhere a donor film to a substrate. The laser induced thermal imaging apparatus includes a process chamber including a donor film and a substrate, and adapted to carry out a process for depositing the donor film on the substrate; a substrate stage having a first electromagnet, and positioned in the process chamber to support the substrate; an adhesion frame having a second electromagnet, and positioned over the substrate stage, wherein the donor film and the substrate are disposed between the substrate stage and the adhesion frame in the process chamber; and a laser oscillator adapted to apply a laser output to the donor film.
    • 激光诱导热成像装置和激光诱导热成像方法。 激光感应热成像装置在粘合框架和基底台中具有电磁体,以将施主膜紧密地附着于基底。 所述激光诱导热成像装置包括:处理室,其包括施主膜和基板,并且适于执行将所述施主膜沉积在所述基板上的工艺; 具有第一电磁体的基板台,并且位于所述处理室中以支撑所述基板; 具有第二电磁体并且位于所述衬底台上的粘合框架,其中所述施主膜和所述衬底设置在所述处理室中的所述衬底台和所述粘合框架之间; 以及适于将激光输出施加到供体膜的激光振荡器。
    • 6. 发明授权
    • Method for forming semiconductor device
    • 半导体器件形成方法
    • US08216938B2
    • 2012-07-10
    • US12982814
    • 2010-12-30
    • Ki Lyoung LeeJin Soo Kim
    • Ki Lyoung LeeJin Soo Kim
    • H01L21/44
    • H01L21/3086H01L27/11521
    • A method for forming a semiconductor device includes forming a partition line pattern and a partition pad pattern connected to an end part of the partition line pattern over the semiconductor substrate. Spacer insulation layers are formed at sidewalls of the partition line pattern and the partition pad pattern. A gap-filling layer is formed between the spacer insulation layers. A first cutting mask pattern is formed to expose a connecting part between the partition line pattern and the partition pad pattern. The partition line pattern and the gap-filling layer adjacent to the spacer insulation layer are removed using the first cutting mask pattern as a mask. A second cutting mask pattern including a first pattern and a second pattern are formed. The spacer insulation layer is removed using the second cutting mask pattern as a mask to form a gate trench in the substrate.
    • 一种形成半导体器件的方法包括在半导体衬底上形成分隔线图案和与分隔线图案的端部连接的分隔垫图案。 间隔绝缘层形成在分隔线图案和分隔垫图案的侧壁处。 在间隔绝缘层之间形成间隙填充层。 形成第一切割掩模图案以暴露分隔线图案和分隔垫图案之间的连接部分。 使用第一切割掩模图案作为掩模去除与间隔绝缘层相邻的分隔线图案和间隙填充层。 形成包括第一图案和第二图案的第二切割掩模图案。 使用第二切割掩模图案作为掩模去除间隔绝缘层,以在基板中形成栅极沟槽。
    • 8. 发明授权
    • Semiconductor laser structure including quantum dot
    • 半导体激光器结构包括量子点
    • US07606284B2
    • 2009-10-20
    • US11595470
    • 2006-11-09
    • Dae Kon OhJin Hong LeeJin Soo KimSung Ui HongHo Sang Kwack
    • Dae Kon OhJin Hong LeeJin Soo KimSung Ui HongHo Sang Kwack
    • H01S3/08
    • H01S5/12H01S5/1231H01S5/1243H01S5/22
    • Provided is a distributed feedback semiconductor laser structure including: a first clad layer; a first ridge waveguide formed on the first clad layer; an active layer formed on the first ridge waveguide; a second ridge waveguide formed on the active layer; a second clad layer formed on the second ridge waveguide; an ohmic contact layer formed on the second clad layer; and a plurality of gratings formed in at least one of the first and second clad layers, making a predetermined angle with the first ridge waveguide or the second ridge waveguide, and periodically arranged in a longitudinal direction of the first or second ridge waveguide. As a result, a general hologram lithography process capable of mass production is applied to the present invention so that process time can be reduced. Also, a distributed feedback semiconductor laser structure using a quantum-dot active layer that does not require an additional process for obtaining a pure single-wavelength is provided.
    • 提供一种分布式反馈半导体激光器结构,包括:第一覆层; 形成在第一覆盖层上的第一脊状波导; 形成在第一脊波导上的有源层; 形成在有源层上的第二脊状波导; 形成在第二脊波导上的第二覆层; 形成在所述第二覆盖层上的欧姆接触层; 以及形成在所述第一和第二包层中的至少一个中的多个光栅,与所述第一脊波导或所述第二脊波导成预定的角度,并且沿所述第一或第二脊波导的纵向方向周期性地布置。 结果,能够大量生产的一般的全息图光刻工艺被应用于本发明,从而可以减少处理时间。 此外,提供了使用量子点有源层的分布式反馈半导体激光器结构,其不需要用于获得纯单波长的附加工艺。
    • 9. 发明授权
    • Method of simulating semiconductor integrated circuit
    • 模拟半导体集成电路的方法
    • US07546231B2
    • 2009-06-09
    • US11324045
    • 2005-12-29
    • Jin Soo Kim
    • Jin Soo Kim
    • G06F17/50
    • G06F17/5036
    • A method and computer program for simulating a semiconductor integrated circuit is disclosed, in which a voltage coefficient of resistance according to a variation of width or length of a resistor device of the integrated circuit may be accurately applied to a model in a manner of including the length and width in variables for measuring the resistance of the resistor device and by which efficiency of a circuit design is considerably enhanced. The method generally includes the steps of measuring a plurality of resistances of a plurality resistors having different length (L) and width (W) from each other while varying a voltage applied to the resistors respectively, calculating a voltage coefficient resist (VCR) of the resistors using the measured resistances, the VCR expressed as a linear function of voltage, and calculating resistance of a certain resistor device having a specific length and width using the VCR. The computer program is generally configured to calculate a voltage coefficient of resistance (VCR) of the resistor as a function of voltage (dV), length (L) and width (W).
    • 公开了一种用于模拟半导体集成电路的方法和计算机程序,其中根据集成电路的电阻器件的宽度或长度的变化的电阻的电压系数可以以包括 用于测量电阻器件电阻的变量的长度和宽度以及电路设计的效率大大提高。 该方法通常包括以下步骤:分别改变施加到电阻器的电压,测量分别具有不同长度(L)和宽度(W)的多个电阻器的多个电阻,计算电压系数抗蚀剂(VCR) 使用测量的电阻的电阻器,VCR表示为电压的线性函数,以及使用VCR计算具有特定长度和宽度的特定电阻器件的电阻。 计算机程序通常被配置为根据电压(dV),长度(L)和宽度(W)来计算电阻器的电阻电压系数(VCR)。