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1. 发明申请

US20110107858A1 PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD 有权
标题翻译：探针装置和底板传送方法
公开(公告)号：US20110107858A1
公开(公告)日：2011-05-12
申请号：US12939323
申请日：2010-11-04
申请人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
发明人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01D21/00
CPC分类号： G01R31/2893
摘要： A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
摘要翻译：探针装置包括以直线布置的多个探针室; 以及具有从设置在探测室的上部区域的容器取出测试对象基板的基板传送机构的装载器室，将检测对象基板降低到与探测室的装载/卸载端口对应的高度，移动在一排平行于探测室的探测室前面，将测试目标衬底传送到探测室。用于读取记录在保持在基板转印机构上的测试目标基板上的信息的读取机构安装在水平移动机构上，该水平移动机构使得在一系列探测室中行进的探针室的前方的基板传送机构移动。

2. 发明授权

US08726748B2 Probe apparatus and substrate transfer method 有权
标题翻译：探针装置和底物转移方法
公开(公告)号：US08726748B2
公开(公告)日：2014-05-20
申请号：US12939323
申请日：2010-11-04
申请人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
发明人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01D21/00
CPC分类号： G01R31/2893
摘要： A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
摘要翻译：探针装置包括以直线布置的多个探针室; 以及具有从设置在探测室的上部区域的容器取出测试对象基板的基板传送机构的装载器室，将检测对象基板降低到与探测室的装载/卸载端口对应的高度，移动在一排平行于探测室的探测室前面，将测试目标衬底传送到探测室。用于读取记录在保持在基板转印机构上的测试目标基板上的信息的读取机构安装在水平移动机构上，该水平移动机构使得在一系列探测室中行进的探针室的前面的基板传送机构移动。

3. 发明授权

US07701236B2 Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer 失效
标题翻译：探针装置的每个检查单元设置有摄像单元以拍摄晶片的图像
公开(公告)号：US07701236B2
公开(公告)日：2010-04-20
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073 , G01R31/28
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

4. 发明申请

US20080290886A1 PROBE APPARATUS 失效
标题翻译：探测器
公开(公告)号：US20080290886A1
公开(公告)日：2008-11-27
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

5. 发明授权

US07859283B2 Probe apparatus, probing method, and storage medium 有权
标题翻译：探头装置，探测方法和存储介质
公开(公告)号：US07859283B2
公开(公告)日：2010-12-28
申请号：US12389913
申请日：2009-02-20
申请人： Yasuhito Yamamoto , Masaru Suzuki , Junichi Hagihara
发明人： Yasuhito Yamamoto , Masaru Suzuki , Junichi Hagihara
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： A probe apparatus is capable of being scaled-down and reducing a manufacturing cost thereof in a probe apparatus having a plurality of probe apparatus main bodies. A loader unit for transferring a wafer between carriers accommodating therein wafers and the probe apparatus main bodies includes: an upper camera for imaging the arrangement of chips to be inspected of the wafer; a lower camera for imaging probe needles; an X-Y-Θ stage for moving the position of the wafer W in a horizontal direction and a second loader mechanism for moving the wafer in a vertical direction. Accordingly, a fine alignment of the wafer is performed by the loader unit to adjust the position of the wafer.
摘要翻译：探针装置能够在具有多个探针装置主体的探针装置中进行比例缩小并降低其制造成本。用于在容纳晶片的载体和所述探针装置主体之间传送晶片的装载单元包括：用于对要被检查的晶片的芯片的布置进行成像的上摄像机; 用于成像探针的下部相机; 用于沿水平方向移动晶片W的位置的X-Y-θ级和用于沿垂直方向移动晶片的第二加载机构。因此，通过装载单元执行晶片的精细对准以调整晶片的位置。

6. 发明申请

US20080231301A1 INSPECTION APPARATUS 有权
标题翻译：检查装置
公开(公告)号：US20080231301A1
公开(公告)日：2008-09-25
申请号：US12053354
申请日：2008-03-21
申请人： Masaru Suzuki , Yasuhito Yamamoto
发明人： Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01R31/02
CPC分类号： G01R31/2887
摘要： An inspection apparatus includes a mounting table movable in X and Y directions and an alignment mechanism which performs an alignment of a target object placed on the mounting table. Further, the alignment mechanism includes an image pickup device which is movable in either one of the X and Y directions and is capable of being stopped at a desired position and a controller for performing a preliminary alignment of the target object by moving the image pickup device and the mounting table in respectively movable directions.
摘要翻译：检查装置包括可沿X和Y方向移动的安装台和执行放置在安装台上的目标物体的对准的对准机构。此外，对准机构包括能够在X方向和Y方向中的任一方向移动并且能够停止在期望位置的图像拾取装置，以及用于通过移动图像拾取装置来执行对象物体的预备对准的控制器和安装台分别移动方向。

7. 发明授权

US08294480B2 Inspection apparatus having alignment mechanism 有权
标题翻译：具有对准机构的检查装置
公开(公告)号：US08294480B2
公开(公告)日：2012-10-23
申请号：US12053354
申请日：2008-03-21
申请人： Masaru Suzuki , Yasuhito Yamamoto
发明人： Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01R31/28
CPC分类号： G01R31/2887
摘要： An inspection apparatus includes a mounting table movable in X and Y directions and an alignment mechanism which performs an alignment of a target object placed on the mounting table. Further, the alignment mechanism includes an image pickup device which is movable in either one of the X and Y directions and is capable of being stopped at a desired position and a controller for performing a preliminary alignment of the target object by moving the image pickup device and the mounting table in respectively movable directions.
摘要翻译：检查装置包括可沿X和Y方向移动的安装台和执行放置在安装台上的目标物体的对准的对准机构。此外，对准机构包括能够在X方向和Y方向中的任一方向移动并且能够停止在期望位置的图像拾取装置，以及用于通过移动图像拾取装置来执行对象物体的预备对准的控制器和安装台分别移动方向。

8. 发明申请

US20090212803A1 PROBE APPARATUS, PROBING METHOD, AND STORAGE MEDIUM 有权
标题翻译：探测设备，探测方法和存储介质
公开(公告)号：US20090212803A1
公开(公告)日：2009-08-27
申请号：US12389913
申请日：2009-02-20
申请人： Yasuhito Yamamoto , Masaru Suzuki , Junichi Hagihara
发明人： Yasuhito Yamamoto , Masaru Suzuki , Junichi Hagihara
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： A probe apparatus is capable of being scaled-down and reducing a manufacturing cost thereof in a probe apparatus having a plurality of probe apparatus main bodies. A loader unit for transferring a wafer between carriers accommodating therein wafers and the probe apparatus main bodies includes: an upper camera for imaging the arrangement of chips to be inspected of the wafer; a lower camera for imaging probe needles; an X-Y-Θ stage for moving the position of the wafer W in a horizontal direction and a second loader mechanism for moving the wafer in a vertical direction. Accordingly, a fine alignment of the wafer is performed by the loader unit to adjust the position of the wafer.
摘要翻译：探针装置能够在具有多个探针装置主体的探针装置中进行比例缩小并降低其制造成本。用于在容纳晶片的载体和所述探针装置主体之间传送晶片的装载单元包括：用于对要被检查的晶片的芯片的布置进行成像的上摄像机; 用于成像探针的下部相机; 用于在水平方向上移动晶片W的位置的X-Y-θ级和用于沿垂直方向移动晶片的第二加载机构。因此，通过装载单元执行晶片的精细对准以调整晶片的位置。

9. 发明授权

US09839924B2 Foamer dispenser 有权
公开(公告)号：US09839924B2
公开(公告)日：2017-12-12
申请号：US14898305
申请日：2014-07-16
申请人： Hiroshi Mizushima , Tsuyoshi Sasaki , Yasuhito Yamamoto , Hiroyuki Kato , Toshihiro Tashiro
发明人： Hiroshi Mizushima , Tsuyoshi Sasaki , Yasuhito Yamamoto , Hiroyuki Kato , Toshihiro Tashiro
IPC分类号： B05B7/00 , B05B11/00 , A47K5/14 , B05B7/04 , B05B11/02
CPC分类号： B05B7/0018 , A47K5/14 , B05B7/0037 , B05B7/0416 , B05B11/0064 , B05B11/0075 , B05B11/02 , B05B11/3059 , B05B11/3087
摘要： In a foamer dispenser, a depressing head includes: a head main unit with a top wall portion arranged above the stem and with an attachment cylindrical portion that extends downwardly from the top wall portion and is attached to the stem; and an exterior cylindrical portion that is provided beneath the top wall portion and surrounds the attachment cylindrical portion and the guide cylindrical portion from an outer side in a radial direction. An inside of the exterior cylindrical portion is communicable with an inside of the cylinder for air through an inside of the guide cylindrical portion. The head main unit and the exterior cylindrical portion are formed as separate entities and are fitted to each other. In an upper end portion of the exterior cylindrical portion, intake holes are formed that penetrate through the exterior cylindrical portion in a radial direction and open toward an upward direction.

10. 发明授权

US07915019B2 Processes for preparing optically active (S or R)-β-amino acid and optically active (R or S)-β-amino acid ester, and β-amino acid 2-alkoxyethyl ester and optically active (S or R)-β amino acid 2-alkoxyethyl ester 有权
标题翻译：用于制备光学活性（S或R） - 氨基酸和光学活性（R或S） - 氨基酸酯和和 - 氨基酸2-烷氧基乙酯和光学活性（S或R） - ＆bgr 氨基酸2-烷氧基乙酯
公开(公告)号：US07915019B2
公开(公告)日：2011-03-29
申请号：US11664878
申请日：2005-10-11
申请人： Tadayoshi Konegawa , Hiroyuki Miyata , Yasuhito Yamamoto
发明人： Tadayoshi Konegawa , Hiroyuki Miyata , Yasuhito Yamamoto
IPC分类号： C12P13/00 , C07B55/00
CPC分类号： C12P41/005 , C07C227/18 , C07C229/34 , C12P13/04 , C12P13/222
摘要： A process for preparing an optically active (S or R)-β-amino acid represented by formula (II): wherein R represents an alkyl group, alkenyl group, alkynyl group, cycloalkyl group, aralkyl group, aryl group or heteroaryl group each of which may have a substituent(s), and * represents an asymmetric carbon atom, and an optically active (R or S)-β-amino acid ester represented by formula (III): wherein R has the same meaning as defined above, R1 represents an alkyl group which may have a substituent(s), and * represents an asymmetric carbon atom, provided that it has a reverse absolute configuration to that of the compound of the formula (II), which comprises selectively hydrolyzing water and one of enantiomers of a β-amino acid ester represented by formula (I): wherein R and R1 have the same meanings as defined above, which is a racemic mixture, in the presence of a hydrolase in an organic solvent.
摘要翻译：一种制备由式（II）表示的光学活性（S或R） - 氨基酸的方法：其中R表示烷基，烯基，炔基，环烷基，芳烷基，芳基或杂芳基其可以具有取代基，*表示不对称碳原子，以及由式（III）表示的光学活性（R或S） - （ - ） - 氨基酸酯：其中R具有与上述相同的含义 R 1表示可以具有取代基的烷基，*表示不对称碳原子，条件是其具有与式（II）化合物相反的绝对构型，其包括选择性水解水和一种由式（I）表示的α-氨基酸酯的对映异构体：其中R和R 1具有与上述定义相同的含义，其是在有机溶剂中的水解酶存在下的外消旋混合物。

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