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1. 发明授权

US07701236B2 Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer 失效
标题翻译：探针装置的每个检查单元设置有摄像单元以拍摄晶片的图像
公开(公告)号：US07701236B2
公开(公告)日：2010-04-20
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073 , G01R31/28
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

2. 发明申请

US20080290886A1 PROBE APPARATUS 失效
标题翻译：探测器
公开(公告)号：US20080290886A1
公开(公告)日：2008-11-27
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

3. 发明授权

US6060892A Probe card attaching mechanism 失效
标题翻译：探针卡连接机构
公开(公告)号：US6060892A
公开(公告)日：2000-05-09
申请号：US996036
申请日：1997-12-22
申请人： Kazumi Yamagata
发明人： Kazumi Yamagata
IPC分类号： G01R1/06 , G01R1/073 , G01R31/28 , H01L21/66 , G01R31/02
CPC分类号： G01R31/2887 , G01R1/07342
摘要： A probe card attaching mechanism fits a probe card to a prober that checks electric characteristics of an object to be tested (e.g., an integrated circuit formed on a semiconductor wafer). The probe card has measurement contactors which are to be brought into contact with the electrodes of the object. The probe card attaching mechanism is provided with a fixing ring, a ring-like card holder, and a lock ring. The fixing ring is secured at an opening section that is on top of the casing of the prober. The fixing ring has a reference surface on the lower side thereof. The card holder is adapted to hold the probe card. The card holder has a reference surface on the upper side and a number of driven portions of cam mechanisms on the outer circumference. The lock ring is provided on the lower side of the fixing ring and is rotatable in both a normal direction and a reverse direction. The lock ring has driving portions of the cam mechanisms, and the driving portions cooperate with the driven portions of the card holder. In accordance with the rotation of the lock ring, its driving portions raise the driven portions of the card holder. Accordingly, the reference surface of the card holder is pressed tightly against the reference surface of the fixing ring, and the card holder is made immovable thereby.
摘要翻译：探针卡附接机构将探针卡配合到检查待测物体的电特性（例如，形成在半导体晶片上的集成电路）的探测器。探针卡具有与物体的电极接触的测量接触器。探针卡安装机构设有固定环，环状卡夹和锁环。固定环固定在探测器外壳顶部的开口部分。固定环的下侧具有基准面。卡座用于固定探针卡。卡夹在上侧具有参考面，在外周具有若干个凸轮机构的从动部。锁定环设置在固定环的下侧，并且能够沿法向和反方向旋转。锁定环具有凸轮机构的驱动部分，并且驱动部分与卡夹的从动部分配合。根据锁定环的旋转，其驱动部分升高卡保持器的从动部分。因此，卡保持器的基准表面被紧紧地压靠在固定环的基准表面上，并且卡保持器被制成不可移动。

4. 外观设计

USD383683S Wafer prober 失效
公开(公告)号：USD383683S
公开(公告)日：1997-09-16
申请号：US53608
申请日：1996-04-25
申请人： Osamu Kamata , Masahiko Sugiyama , Munetoshi Nagasaka , Haruhiko Yoshioka , Kazumi Yamagata
设计人： Osamu Kamata , Masahiko Sugiyama , Munetoshi Nagasaka , Haruhiko Yoshioka , Kazumi Yamagata

5. 发明授权

US6118290A Prober and method for cleaning probes provided therein 失效
标题翻译：用于清洁其中提供的探头的探针和方法
公开(公告)号：US6118290A
公开(公告)日：2000-09-12
申请号：US66937
申请日：1998-04-28
申请人： Masahiko Sugiyama , Yoshihiko Nakamura , Kazumi Yamagata
发明人： Masahiko Sugiyama , Yoshihiko Nakamura , Kazumi Yamagata
IPC分类号： G01R31/28 , G01R31/02
CPC分类号： G01R31/2886
摘要： A prober including a probe card, a main chuck, a spacer, a conveying mechanism, and a supporting portion. The probe card is provided on an upper surface of a main body of the prober. The main chuck is provided in the main body of the prober, underneath the probe card, to be movable in X, Y, Z and .theta. directions. The spacer has an upper portion on which a cleaner tool for the probe card is held. The conveying mechanism for conveying the spacer between outside of the main body of the prober and a position on the main chuck. The supporting portion is provided on an outer side surface of the main chuck, for supporting the spacer. The main chuck is moved up and down directly underneath the probe card such that probes of the probe card is cleaned with the cleaner tool on the spacer held on the main chuck.
摘要翻译：包括探针卡，主卡盘，间隔件，输送机构和支撑部分的探测器。探针卡设置在探测器的主体的上表面上。主卡盘设置在探针主体的探针卡下面，可在X，Y，Z和θ方向上移动。间隔件具有上部，用于探针卡的清洁器工具保持在该上部上。传送机构，用于在探测器主体的外部和主卡盘上的位置之间传送间隔物。支撑部设置在主卡盘的外侧面上，用于支撑间隔件。主卡盘直接在探针卡下方上下移动，使用清洁工具清洁探头卡的探头，保持在主卡盘上的垫片上。

6. 发明授权

US07944200B2 Probe apparatus 有权
标题翻译：探头设备
公开(公告)号：US07944200B2
公开(公告)日：2011-05-17
申请号：US12564381
申请日：2009-09-22
申请人： Tomoya Endo , Hiroshi Yamada , Kazumi Yamagata
发明人： Tomoya Endo , Hiroshi Yamada , Kazumi Yamagata
IPC分类号： G01R31/28 , G01R31/02
CPC分类号： G01R31/2887
摘要： A probe apparatus includes a holding frame holding a test head through a biasing unit biasing the test head. An annular member is rotatably mounted in an opening of a ceiling plate of a main body. Cam followers are rotatably provided circumferentially on the annular member. An intermediate connecting member is provided in a lower surface of the test head, for bringing the test head into electrical contact with an upper surface of the probe card. Protrusions for guiding the cam followers are provided corresponding thereto at an outer periphery of the intermediate connecting member, upper surfaces of the protrusions being inclined. The cam followers are moved relatively upward along the respective inclined surfaces of the protrusions by rotating the annular member so that the intermediate connecting member is pushed downward against a biasing force of the biasing unit to bring the test head into press-contact with the probe card.
摘要翻译：探针装置包括通过偏置测试头的偏置单元保持测试头的保持框架。环形构件可旋转地安装在主体的顶板的开口中。凸轮从动件可周向设置在环形构件上。中间连接构件设置在测试头的下表面中，用于使测试头与探针卡的上表面电接触。在中间连接构件的外周配置有用于引导凸轮从动件的突起，突起的上表面倾斜。凸轮从动件通过旋转环形构件而沿着突起的相应倾斜表面相对向上移动，使得中间连接构件抵抗偏压单元的偏压力被向下推动以使测试头与探针卡压接触。

7. 发明申请

US20100079161A1 PROBE APPARATUS 有权
标题翻译：探测器
公开(公告)号：US20100079161A1
公开(公告)日：2010-04-01
申请号：US12564381
申请日：2009-09-22
申请人： Tomoya Endo , Hiroshi Yamada , Kazumi Yamagata
发明人： Tomoya Endo , Hiroshi Yamada , Kazumi Yamagata
IPC分类号： G01R31/02 , G01R1/06
CPC分类号： G01R31/2887
摘要： A probe apparatus includes a holding frame holding a test head through a biasing unit biasing the test head. An annular member is rotatably mounted in an opening of a ceiling plate of a main body. Cam followers are rotatably provided circumferentially on the annular member. An intermediate connecting member is provided in a lower surface of the test head, for bringing the test head into electrical contact with an upper surface of the probe card. Protrusions for guiding the cam followers are provided corresponding thereto at an outer periphery of the intermediate connecting member, upper surfaces of the protrusions being inclined. The cam followers are moved relatively upward along the respective inclined surfaces of the protrusions by rotating the annular member so that the intermediate connecting member is pushed downward against a biasing force of the biasing unit to bring the test head into press-contact with the probe card.
摘要翻译：探针装置包括通过偏置测试头的偏置单元保持测试头的保持框架。环形构件可旋转地安装在主体的顶板的开口中。凸轮从动件可周向设置在环形构件上。中间连接构件设置在测试头的下表面中，用于使测试头与探针卡的上表面电接触。在中间连接构件的外周配置有用于引导凸轮从动件的突起，突起的上表面倾斜。凸轮从动件通过旋转环形构件而沿着突起的相应倾斜表面相对向上移动，使得中间连接构件抵抗偏压单元的偏压力被向下推动以使测试头与探针卡压接触。

8. 发明授权

US5640100A Probe apparatus having probe card exchanging mechanism 失效
标题翻译：探头装置具有探针卡交换机构
公开(公告)号：US5640100A
公开(公告)日：1997-06-17
申请号：US546164
申请日：1995-10-20
申请人： Kazumi Yamagata , Minoru Uchida
发明人： Kazumi Yamagata , Minoru Uchida
IPC分类号： G01R1/067 , G01R31/02
CPC分类号： G01R1/06705
摘要： A probe apparatus for examining an electrical characteristic of IC chips formed on a semiconductor wafer has a work table provided in a casing and a probe card provided above the work table. The probe card is detachably attached to an insert ring supported by the casing. A card exchanging mechanism for automatically attaching and detaching the probe card to and from the insert ring is provided. The card exchanging mechanism has a tray for mounting the probe card and transferring the-probe card. The tray is changeable at an initial position outside the casing between a usable state where the tray is horizontally expanded and an unusable state where the tray is vertically folded. An opening/closing cover is provided to cover the tray in the unusable state.
摘要翻译：用于检查形成在半导体晶片上的IC芯片的电特性的探针装置具有设置在设置在工作台上方的壳体和探针卡中的工作台。探针卡可拆卸地连接到由壳体支撑的插入环上。提供一种用于将探针卡自动地附接到插入环上和从插入环中分离的卡片更换机构。卡更换机构具有用于安装探针卡并传送探针卡的托盘。在托盘水平膨胀的可用状态和托盘垂直折叠的不可用状态之间，托盘可在壳体外的初始位置改变。提供打开/关闭盖以在不可用状态下覆盖托盘。

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