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1. 发明授权

US07701236B2 Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer 失效
标题翻译：探针装置的每个检查单元设置有摄像单元以拍摄晶片的图像
公开(公告)号：US07701236B2
公开(公告)日：2010-04-20
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073 , G01R31/28
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

2. 发明申请

US20080290886A1 PROBE APPARATUS 失效
标题翻译：探测器
公开(公告)号：US20080290886A1
公开(公告)日：2008-11-27
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

3. 发明申请

US20110107858A1 PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD 有权
标题翻译：探针装置和底板传送方法
公开(公告)号：US20110107858A1
公开(公告)日：2011-05-12
申请号：US12939323
申请日：2010-11-04
申请人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
发明人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01D21/00
CPC分类号： G01R31/2893
摘要： A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
摘要翻译：探针装置包括以直线布置的多个探针室; 以及具有从设置在探测室的上部区域的容器取出测试对象基板的基板传送机构的装载器室，将检测对象基板降低到与探测室的装载/卸载端口对应的高度，移动在一排平行于探测室的探测室前面，将测试目标衬底传送到探测室。用于读取记录在保持在基板转印机构上的测试目标基板上的信息的读取机构安装在水平移动机构上，该水平移动机构使得在一系列探测室中行进的探针室的前方的基板传送机构移动。

4. 发明授权

US08726748B2 Probe apparatus and substrate transfer method 有权
标题翻译：探针装置和底物转移方法
公开(公告)号：US08726748B2
公开(公告)日：2014-05-20
申请号：US12939323
申请日：2010-11-04
申请人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
发明人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01D21/00
CPC分类号： G01R31/2893
摘要： A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
摘要翻译：探针装置包括以直线布置的多个探针室; 以及具有从设置在探测室的上部区域的容器取出测试对象基板的基板传送机构的装载器室，将检测对象基板降低到与探测室的装载/卸载端口对应的高度，移动在一排平行于探测室的探测室前面，将测试目标衬底传送到探测室。用于读取记录在保持在基板转印机构上的测试目标基板上的信息的读取机构安装在水平移动机构上，该水平移动机构使得在一系列探测室中行进的探针室的前面的基板传送机构移动。

5. 发明授权

US07940065B2 Probe apparatus and method for measuring electrical characteristics of chips 有权
标题翻译：用于测量芯片电气特性的探头装置和方法
公开(公告)号：US07940065B2
公开(公告)日：2011-05-10
申请号：US12363110
申请日：2009-01-30
申请人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
发明人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
IPC分类号： G01R31/00 , G01R31/02
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.
摘要翻译：探针装置包括第一级，第二级，第三级和图像拾取器。 Z位置测量单元测量安装台的Z方向位置，并且具有在Z方向上延伸的Z刻度和用于读取Z刻度的读取单元。计算单元根据摄像机拾取的图像相对于包括Z方向位置的驱动系统的坐标坐标位置和X方向位置获得计算出的被检查基板的探针与电极焊盘之间的接触位置和Y方向位置由用于测量安装台的X和Y方向位置的测量单元测量。校正单元根据下一次接触操作的变化量校正接触位置的Z方向位置。

6. 发明申请

US20080187420A1 MOUNTING DEVICE 有权
标题翻译：安装设备
公开(公告)号：US20080187420A1
公开(公告)日：2008-08-07
申请号：US12024556
申请日：2008-02-01
申请人： Hiroshi SHIMOYAMA , Kazuya Yano , Masaru Suzuki
发明人： Hiroshi SHIMOYAMA , Kazuya Yano , Masaru Suzuki
IPC分类号： H01L21/687 , G01R1/04
CPC分类号： G01R31/2887 , H01L21/682 , Y10S269/90
摘要： A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.
摘要翻译：一种设置在水平移动平台机构上的安装装置，包括用于安装目标物体的安装台，具有小于安装台直径的直径的圆柱形升降体，用于支撑安装台，多个升降导轨轨道设置在立面体的外周面上，以在圆周方向上以大致规则的间隔彼此隔开;多个支撑构件，每个支撑构件具有与升降导轨接合的接合体的垂直板，固定。此外，多个加强部分在垂直体的外周面垂直地设置，以便在圆周方向上以大致规则的间隔彼此间隔开。

7. 发明申请

US20080184916A1 MOUNTING DEVICE 有权
标题翻译：安装设备
公开(公告)号：US20080184916A1
公开(公告)日：2008-08-07
申请号：US12020655
申请日：2008-01-28
申请人： Kazuya YANO , Hiroshi Shimoyama , Masaru Suzuki
发明人： Kazuya YANO , Hiroshi Shimoyama , Masaru Suzuki
IPC分类号： A47B9/00
CPC分类号： G12B5/00 , Y10T74/20348
摘要： A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.
摘要翻译：安装装置包括用于安装目标物体的可垂直移动的安装台和用于使安装台旋转预定角度的旋转驱动机构。安装台由旋转驱动机构垂直升高并旋转。旋转驱动机构包括沿着安装台的切线方向延伸的驱动轴和经由驱动轴沿切线方向移动的移动体。第一凸轮从动件垂直于移动体附接，第二凸轮从动件从安装台的外周面水平延伸，以与第一凸轮从动件接触。此外，连接安装台和移动体的弹性构件使第一凸轮从动件和第二凸轮从动件彼此弹性接触。

8. 发明授权

US07963513B2 Mounting device 有权
标题翻译：安装装置
公开(公告)号：US07963513B2
公开(公告)日：2011-06-21
申请号：US12024556
申请日：2008-02-01
申请人： Hiroshi Shimoyama , Kazuya Yano , Masaru Suzuki
发明人： Hiroshi Shimoyama , Kazuya Yano , Masaru Suzuki
IPC分类号： B23Q1/64
CPC分类号： G01R31/2887 , H01L21/682 , Y10S269/90
摘要： A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.
摘要翻译：一种设置在水平移动平台机构上的安装装置，包括用于安装目标物体的安装台，具有小于安装台直径的直径的圆柱形升降体，用于支撑安装台，多个升降导轨轨道设置在立面体的外周面上，以在圆周方向上以大致规则的间隔彼此隔开;多个支撑构件，每个支撑构件具有与升降导轨接合的接合体的垂直板，固定。此外，多个加强部分在垂直体的外周面垂直地设置，以便在圆周方向上以大致规则的间隔彼此间隔开。

9. 发明申请

US20090195263A1 PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM 有权
标题翻译：探测设备，探测方法和存储介质
公开(公告)号：US20090195263A1
公开(公告)日：2009-08-06
申请号：US12363110
申请日：2009-01-30
申请人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
发明人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
IPC分类号： G01R31/02 , G01R31/28 , G01P21/00
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.
摘要翻译：探针装置包括第一级，第二级，第三级和图像拾取器。 Z位置测量单元测量安装台的Z方向位置，并且具有在Z方向上延伸的Z刻度和用于读取Z刻度的读取单元。计算单元根据摄像机拾取的图像相对于包括Z方向位置的驱动系统的坐标坐标位置和X方向位置获得计算出的被检查基板的探针与电极焊盘之间的接触位置和Y方向位置由用于测量安装台的X和Y方向位置的测量单元测量。校正单元根据下一次接触操作的变化量校正接触位置的Z方向位置。

10. 发明申请

US20080231301A1 INSPECTION APPARATUS 有权
标题翻译：检查装置
公开(公告)号：US20080231301A1
公开(公告)日：2008-09-25
申请号：US12053354
申请日：2008-03-21
申请人： Masaru Suzuki , Yasuhito Yamamoto
发明人： Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01R31/02
CPC分类号： G01R31/2887
摘要： An inspection apparatus includes a mounting table movable in X and Y directions and an alignment mechanism which performs an alignment of a target object placed on the mounting table. Further, the alignment mechanism includes an image pickup device which is movable in either one of the X and Y directions and is capable of being stopped at a desired position and a controller for performing a preliminary alignment of the target object by moving the image pickup device and the mounting table in respectively movable directions.
摘要翻译：检查装置包括可沿X和Y方向移动的安装台和执行放置在安装台上的目标物体的对准的对准机构。此外，对准机构包括能够在X方向和Y方向中的任一方向移动并且能够停止在期望位置的图像拾取装置，以及用于通过移动图像拾取装置来执行对象物体的预备对准的控制器和安装台分别移动方向。

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