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1. 发明授权

US07701236B2 Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer 失效
标题翻译：探针装置的每个检查单元设置有摄像单元以拍摄晶片的图像
公开(公告)号：US07701236B2
公开(公告)日：2010-04-20
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073 , G01R31/28
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

2. 发明授权

US07583096B2 Probing apparatus and probing method 失效
标题翻译：探测仪器和探测方法
公开(公告)号：US07583096B2
公开(公告)日：2009-09-01
申请号：US11747559
申请日：2007-05-11
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

3. 发明申请

US20090097109A1 CONFOCAL MICROSCOPE 有权
公开(公告)号：US20090097109A1
公开(公告)日：2009-04-16
申请号：US12208536
申请日：2008-09-11
申请人： Shuji Akiyama , Akihiro Kitahara
发明人： Shuji Akiyama , Akihiro Kitahara
IPC分类号： G02B21/06
CPC分类号： G02B21/008 , G02B21/006 , G06T5/50 , G06T2207/10056
摘要： To provide a confocal microscope for obtaining an extended image by easily determining the capturing range of an observation image without being aware of the shape of a sample to be observed, the confocal microscope comprises confocal image generating unit for generating a confocal image, first counting unit for counting a first number of pixels having a predetermined brightness level or lower among the brightness levels of the pixels of the confocal image, second counting unit for counting a second number of pixels obtained by extracting only a pixel that matches a predetermined condition for the confocal image, and boundary determining unit for detecting a boundary by determining whether or not the observation surface is within the image capturing range based on the first and the second numbers of pixels.
摘要翻译：为了提供共焦显微镜，通过容易地确定观察图像的捕获范围而不知道要观察的样品的形状来获得扩展图像，共聚焦显微镜包括用于产生共聚焦图像的共焦图像产生单元，第一计数单元用于计数在共焦图像的像素的亮度级中具有预定亮度级别或更低的第一数量的像素;第二计数单元，用于对仅通过提取与共焦焦点的预定条件匹配的像素而获得的第二数量的像素进行计数; 图像和边界确定单元，用于通过基于第一和第二像素数量确定观察表面是否在图像捕获范围内来检测边界。

4. 发明申请

US20080290886A1 PROBE APPARATUS 失效
标题翻译：探测器
公开(公告)号：US20080290886A1
公开(公告)日：2008-11-27
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

5. 发明申请

US20070262783A1 PROBING APPARATUS AND PROBING METHOD 失效
标题翻译：探测装置和探测方法
公开(公告)号：US20070262783A1
公开(公告)日：2007-11-15
申请号：US11747559
申请日：2007-05-11
申请人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

6. 发明申请

US20070258799A1 Turning device for heavy object 有权
标题翻译：用于重物的车削装置
公开(公告)号：US20070258799A1
公开(公告)日：2007-11-08
申请号：US10590176
申请日：2005-03-23
申请人： Shuji Akiyama , Toshihiro Yudate , Hiroshi Yamada , Nobuhiro Kameda
发明人： Shuji Akiyama , Toshihiro Yudate , Hiroshi Yamada , Nobuhiro Kameda
IPC分类号： H01L21/67
CPC分类号： F16H1/46 , F16H1/32 , G01R31/2887 , H02K7/116
摘要： A compact turning device for a heavy object, comprising a turning arm joined to the heavy object and a drive device drivingly turning the turning arm. The drive device further comprises a motor incorporating a rotor shaft connected to the rotating input part of a planetary gear type speed reducer on a same axis (A). Also, the turning arm is installed by joining its first plane to the plane of the planetary gear type speed reducer forming the rotating output part and its second plane orthogonal to the first plane to the heavy object. The turning arm and the drive device are disposed within the width (D) of the heavy object in the axis (A) direction of the turning pivot of the turning arm. The planetary gear type speed reducer of the drive device may be disposed in two front and rear stages.
摘要翻译：一种用于重物的紧凑型转动装置，包括连接到重物的转动臂和驱动转动转动臂的驱动装置。驱动装置还包括电动机，该马达包括与同轴线（A）上的行星齿轮式减速器的旋转输入部分连接的转子轴。此外，通过将其第一平面连接到行星齿轮减速器的平面而将转动臂安装成形成与第一平面垂直的旋转输出部分及其第二平面到重物体。旋转臂和驱动装置设置在转动臂的转动枢轴的轴线（A）方向上的重物体的宽度（D）内。驱动装置的行星齿轮式减速器可以设置在两个前级和后级。

7. 发明授权

US07153087B2 Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method 失效
公开(公告)号：US07153087B2
公开(公告)日：2006-12-26
申请号：US10351088
申请日：2003-01-27
申请人： Ki Sang Kang , Shuji Akiyama , Hiroki Hosaka
发明人： Ki Sang Kang , Shuji Akiyama , Hiroki Hosaka
IPC分类号： B65G47/24
CPC分类号： H01L21/68 , H01L21/67259 , H01L21/68735 , Y10S414/136 , Y10S414/141 , Y10T279/26
摘要： A centering unit comprises a plate, centering mechanism, link mechanism, and cylinder mechanism. The plate vertically divides the interior of a frame. The support table is located substantially on the center of the plate. The centering mechanism can center each wafer on the support table. Centering plates of the centering mechanism are located on either side of the support table and have engaging surfaces and that extend along the outer peripheral surface of the wafer. The link mechanism and the cylinder mechanism serve to extend and contract the space between the centering plates.

8. 发明申请

US20050209725A1 Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for wafer 审中-公开
标题翻译：传送系统，输送方法和待处理物体的真空保持装置以及晶圆的定心方法
公开(公告)号：US20050209725A1
公开(公告)日：2005-09-22
申请号：US11129313
申请日：2005-05-16
申请人： Shuji Akiyama , Toshihiko Iijima , Hiroki Hosaka
发明人： Shuji Akiyama , Toshihiko Iijima , Hiroki Hosaka
IPC分类号： G05B19/00 , G05B19/418 , H01L21/00 , H01L21/68 , G06F19/00
CPC分类号： H01L21/6835 , G05B19/00 , G05B19/41815 , G05B2219/31002 , G05B2219/45031 , H01L21/67276 , Y02P90/08 , Y02P90/285 , Y02P90/60
摘要： A conveyance system E for wafers W includes a host computer 1 for carrying out the management of the production of semiconductor devices, a plurality of probers 2 for inspecting the electric characteristics of the wafers W under the administration of the host computer 1, an AGV 3 for automatically transporting the wafers W in block of a carrier in order to deliver the wafers W one by one to these probers 2 according to respective demands and an AGV controller 4 for controlling the operation of the AGV 3 under the administration of the host computer 1.
摘要翻译：用于晶片W的输送系统E包括用于执行半导体器件的生产的管理的主计算机1，用于在主计算机1的管理下检查晶片W的电特性的多个探测器2，AGV 3 用于在载体的块中自动输送晶片W，以便根据各自的要求将晶片W一个一个地传送到这些探测器2;以及AGV控制器4，用于在主计算机1的管理下控制AGV 3的操作。

9. 发明授权

US06721626B2 Wafer transfer system, wafer transfer method and automatic guided vehicle system 失效
标题翻译：晶圆转印系统，晶片转印方式和自动导向系统
公开(公告)号：US06721626B2
公开(公告)日：2004-04-13
申请号：US10184980
申请日：2002-07-01
申请人： Masaru Tomita , Shuji Akiyama
发明人： Masaru Tomita , Shuji Akiyama
IPC分类号： G06F700
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67294 , Y10S414/137 , Y10S414/141
摘要： A central position of a wafer 10 set on a place table 41 is calculated, a turn angle of the place table 41 when the wafer 10 is in the predetermined orientation is calculated based on the calculation result of the central position and positional information of an ID mark 11 received in advance and the quantity of expanding and contracting a transfer arm 30 and the turn angle of a turntable 39 are calculated for setting the wafer 10 such that the ID mark 11 is in the predetermined position and orientation to an OCR 43, and the turn angle of the place table 41 calculated based on the turn angle of the turntable 39 is corrected, the place table 41 is turned only by the corrected turn angle and the wafer 10 is turned and transferred to the OCR 43 by the transfer unit 3.
摘要翻译：计算设置在位置台41上的晶片10的中心位置，基于中心位置的计算结果和ID的位置信息来计算晶片10处于预定取向时的位置台41的转角计算出接收到的标记11，并且计算转印臂30的伸展和收缩量以及转盘39的转动角度，以设置晶片10，使得ID标记11位于OCR43的预定位置和方向上，以及基于转台39的转角计算的位置台41的转角被校正，位置台41仅通过修正的转角转动，并且晶片10转动并由转印单元3传送到OCR 43 。

10. 发明授权

US5798651A Probe system 失效
标题翻译：探测系统
公开(公告)号：US5798651A
公开(公告)日：1998-08-25
申请号：US661405
申请日：1996-06-07
申请人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
发明人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
IPC分类号： G01R31/01 , G01R31/28 , G01R31/02
CPC分类号： G01R31/01 , G01R31/2887
摘要： A probe system according to the present invention has a plurality of exploration portions disposed in a line, spaced apart from one another for predetermined distances and each having a test head, for establishing electrical connection between the test head and electrodes of a subject of exploration so as to explore electrical characteristics of the subject of exploration, a conveyance passage running parallel to the line of the exploration portions, a retainer portion on which a plurality of the subjects of exploration are placed, which is facing to the conveyance passage and which is capable of elevating vertical with respect to the conveyance passage at a position above the conveyance passage, and delivery and acceptance unit arranged capable of moving along the conveyance passage and arranged to deliver and accept the subjects of exploration between the retainer portion and each of the exploration portions.
摘要翻译：根据本发明的探针系统具有多个探测部分，其设置成一条线，彼此间隔开预定距离，并且每个具有测试头，用于建立测试头与探测对象的电极之间的电连接。为了探索探测对象的电气特性，平行于探测部分的线路延伸的输送通道，放置有多个探测对象的保持器部分，其面向输送通道并且能够在输送通道上方的位置相对于输送通道垂直升降;以及输送接收单元，其布置成能够沿着输送通道移动并且布置成输送和接受保持器部分和每个勘探部分之间的探测对象。

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