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1. 发明授权

US5923693A Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper 失效
标题翻译：放电电极，其形状修复，准分子激光振荡器和步进机
公开(公告)号：US5923693A
公开(公告)日：1999-07-13
申请号：US807784
申请日：1997-02-28
申请人： Tadahiro Ohmi , Naoto Sano , Yasuyuki Shirai
发明人： Tadahiro Ohmi , Naoto Sano , Yasuyuki Shirai
IPC分类号： H01L21/027 , H01S3/038 , H01S3/0979 , H01S3/134 , H01S3/225 , H01S3/22
CPC分类号： H01S3/0388
摘要： A discharge electrode for an excimer laser oscillator according to the present invention contains oxygen at a content of not more than 10 ppm, and a method of restoring the shape of a discharge electrode according to the present invention comprises introducing an inert gas into a laser chamber, and conducting discharge for several seconds.
摘要翻译：根据本发明的准分子激光振荡器用放电电极含有不大于10ppm的氧，并且根据本发明的恢复放电电极的形状的方法包括将惰性气体引入激光室并进行放电几秒钟。

2. 发明授权

US06215806B1 Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface 失效
标题翻译：准分子激光发生器具有激光室，具有氟化物钝化的内表面
公开(公告)号：US06215806B1
公开(公告)日：2001-04-10
申请号：US08812288
申请日：1997-03-06
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
IPC分类号： H01S322
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/225
摘要： An excimer laser generating system includes a laser chamber whose inner surface is covered with a fluorine-passivated surface. Preferably, the surfaces of a blower and heat exchanger disposed in the laser chamber are also covered with a fluorine-passivated surface. The fluorine-passivated surface may be formed of a wide variety of materials including an aluminum oxide film, a fluoride film containing aluminum fluoride and magnesium fluoride, iron fluoride, and nickel fluoride. Preferably, the excimer laser generation system includes a gas supply system having an inert gas purging system so that gas sources can be replaced without exposing the inside of gas supply pipes to atmosphere. With the above arrangement, the excimer laser generating system can generate a laser beam pulse whose energy and shape are maintained constant for a long period of operation time without encountering serious degradation. The invention also provides a high-reliability step-and-repeat exposure apparatus using the above excimer laser generating system, capable of exposing a very fine pattern.
摘要翻译：准分子激光发生系统包括其内表面被氟钝化表面覆盖的激光室。优选地，设置在激光室中的鼓风机和热交换器的表面也被氟钝化表面覆盖。氟钝化表面可以由各种各样的材料形成，包括氧化铝膜，含氟化铝和氟化镁的氟化物膜，氟化铁和氟化镍。优选地，准分子激光发生系统包括具有惰性气体吹扫系统的气体供应系统，使得可以更换气体源而不将气体供应管的内部暴露于大气。通过上述布置，准分子激光发生系统可以产生激光束脉冲，其能量和形状在长时间的操作时间内保持恒定，而不会严重恶化。本发明还提供了使用上述准分子激光发生系统的能够曝光非常精细图案的高可靠性分步重复曝光装置。

3. 发明申请

US20130084059A1 VAPORIZER 有权
标题翻译：蒸气器
公开(公告)号：US20130084059A1
公开(公告)日：2013-04-04
申请号：US13563983
申请日：2012-08-01
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
IPC分类号： C23C14/00 , F22B1/28
CPC分类号： C23C16/4483 , F22B1/284
摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.
摘要翻译：能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括网状，蜂窝状，网状或管状隔壁。

4. 发明授权

US08299403B2 Heat resisting vacuum insulating material and heating device 有权
标题翻译：耐热真空绝热材料及加热装置
公开(公告)号：US08299403B2
公开(公告)日：2012-10-30
申请号：US12298192
申请日：2007-04-20
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Sadao Kobayashi , Yoshihide Wakayama , Kazutaka Uekado
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Sadao Kobayashi , Yoshihide Wakayama , Kazutaka Uekado
IPC分类号： F23Q7/22
CPC分类号： H01L21/67103 , C23C14/22 , C23C14/56 , C23C16/4412 , F01N13/08 , F01N13/146 , F16L53/38 , F16L58/00 , F16L59/065 , Y10T428/2933
摘要： A heating device includes a heat resisting vacuum insulator (4) wound around the outer periphery of an electric heater (3) disposed along the outer wall of an exhaust pipe (1), wherein the electric heater (3) has a resistance heating element and a heat resisting electric insulator covering this resistance heating element, and the heat resisting vacuum insulator (4) includes a hollow platy covering material air-tightly sealed thereinside by a metal seat (5) having a heat resisting temperature of at least 100° C., and a fibrous or granular filling material (6) filled in the hollow portion of this covering material and having a heat resisting temperature of at least 100° C., the inside of the covering material being kept in a vacuum state.
摘要翻译：加热装置包括围绕沿着排气管（1）的外壁设置的电加热器（3）的外周缠绕的耐热真空绝缘体（4），其中电加热器（3）具有电阻加热元件，覆盖该电阻加热元件的耐热电绝缘体，并且耐热真空绝热体（4）包括由耐热温度为至少100℃的金属座（5）气密地密封在其中的中空板状覆盖材料。以及填充在该覆盖材料的中空部分中并具有至少100℃的耐热温度的纤维或颗粒填充材料（6），覆盖材料的内部保持在真空状态。

5. 发明申请

US20120247961A1 METAL OXIDE FILM, LAMINATE, METAL MEMBER AND PROCESS FOR PRODUCING THE SAME 有权
标题翻译：金属氧化物膜，层压板，金属构件及其制造方法
公开(公告)号：US20120247961A1
公开(公告)日：2012-10-04
申请号：US13463315
申请日：2012-05-03
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Hitoshi Morinaga , Yasuhiro Kawase , Masafumi Kitano , Fumikazu Mizutani , Makoto Ishikawa
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Hitoshi Morinaga , Yasuhiro Kawase , Masafumi Kitano , Fumikazu Mizutani , Makoto Ishikawa
IPC分类号： C25D11/04 , C25D3/00 , C25D19/00 , C25D5/50 , C25D11/10 , C25D7/00 , B82Y40/00 , B82Y99/00
CPC分类号： C25D11/06 , C25D11/18 , Y10T428/265
摘要： A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cm2 or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.
摘要翻译：适用于主要由铝组成的金属保护金属氧化物膜。金属氧化物膜包括厚度为10nm以上的主要由铝构成的金属的氧化物的膜，并且具有1E18mol / cm 2以下的膜的水分释放率。此外，提供了一种制造金属氧化物膜的方法，其中主要由铝组成的金属在pH值为4至10的化学溶液中进行阳极氧化，以获得金属氧化物膜。

6. 发明申请

US20120241023A1 CONTROL VALVE DEVICE 审中-公开
标题翻译：控制阀装置
公开(公告)号：US20120241023A1
公开(公告)日：2012-09-27
申请号：US13508448
申请日：2010-10-29
申请人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
发明人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
IPC分类号： F16K31/128 , F16K1/34
CPC分类号： F16K31/126 , F16K1/34 , F16K25/005 , Y10T137/776
摘要： A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.
摘要翻译：控制阀装置产生阀组件的开/关精度。阀头310a被构造成通过根据供应到第一空间Us的工作流体与第二空间的第二压力之间的压力比将从动力传递构件传递到阀组件310的动力来打开和关闭形成在阀壳体305中的传送路径空间Ls。阀头的维氏硬度大于与阀头接触的传送路径的阀座的维氏硬度，并且其间的硬度差设定为约200Hv至约300Hv。

7. 发明授权

US08146924B2 Low-compression force metal gaskets 有权
标题翻译：低压力金属垫片
公开(公告)号：US08146924B2
公开(公告)日：2012-04-03
申请号：US12137361
申请日：2008-06-11
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Yasushi Aburatani , Akira Muramatsu , Masayuki Noguchi , Kouji Sato , Satoshi Kumaki
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Yasushi Aburatani , Akira Muramatsu , Masayuki Noguchi , Kouji Sato , Satoshi Kumaki
IPC分类号： F16J15/12
CPC分类号： F16J15/0887
摘要： A low-compression force metal gasket includes a coating layer containing a polymer material on at least a sealing surface of the gasket, and the coating layer satisfies the following conditions (1) to (3): (1) the layer comprises a resin, a rubber or a mixture thereof having an oxygen gas permeability coefficient at 25° C. of 10×10−12 to 0.1×10−12 (m2/s); (2) when the layer is compression deformed, the storage elastic modulus (E′) at 200° C. is in the range of 1.0×107 to 1.0×102 Pa; and (3) the coating layer has a thickness of 1 to 40 μm. The gasket provides a high seal at a low clamping force.
摘要翻译：低压力金属垫片包括在垫片的至少密封面上含有聚合物材料的涂层，涂层满足以下条件（1）〜（3）：（1）该层包含树脂，在25℃下的氧气渗透系数为10×10-12〜0.1×10-12（m2 / s）的橡胶或其混合物; （2）当层压缩变形时，200℃下的储能弹性模量（E'）在1.0×10 7〜1.0×10 2 Pa的范围内; 和（3）涂层的厚度为1〜40μm。垫圈在低夹紧力下提供高密封。

8. 发明授权

US07935385B2 Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas 失效
标题翻译：在其上形成有氧化铬钝化膜的金属材料及其制造方法，以及与流体接触的部件和用于供应流体和排出气体的系统
公开(公告)号：US07935385B2
公开(公告)日：2011-05-03
申请号：US10646855
申请日：2003-08-21
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Nobukazu Ikeda , Eiji Ideta , Akihiro Morimoto , Tetsutaro Ogushi , Takehisa Konishi
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Nobukazu Ikeda , Eiji Ideta , Akihiro Morimoto , Tetsutaro Ogushi , Takehisa Konishi
IPC分类号： B05D3/02 , B05D3/04 , C25D5/50
CPC分类号： C23C8/02 , C23C26/00 , Y10T428/24322 , Y10T428/24355 , Y10T428/31678
摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm
摘要翻译：本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。本发明包括以下步骤：在涂覆表面的粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜

9. 发明授权

US07501764B2 Fluorescent lamp and method of manufacturing same 失效
标题翻译：荧光灯及其制造方法
公开(公告)号：US07501764B2
公开(公告)日：2009-03-10
申请号：US10546182
申请日：2004-02-18
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Akihiro Morimoto
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Akihiro Morimoto
IPC分类号： H01J61/04 , H01J61/06
CPC分类号： H01J61/0677 , H01J61/0672 , H01J61/16
摘要： A cold cathode fluorescent tube where an electron emitting electrode is sealed in shows much deterioration in the luminance with time, thereby being not adequate for a long time use. The electrode emitting electrode is formed in such a shape that an electric field is not locally concentrated. By mixing a material of high heat conductivity, such as tungsten, as the material for the electron emitting electrode or using helium of high heat conductivity as the sealing gas, a long life of the cold cathode fluorescent tube is achieved.
摘要翻译：其中电子发射电极被密封的冷阴极荧光管显示出随时间的亮度的很大的劣化，从而不能长时间使用。电极发射电极形成为电场不局部集中的形状。通过将诸如钨的高导热性材料作为电子发射电极的材料或使用具有高导热性的氦气作为密封气体，可以实现冷阴极荧光管的长寿命。

10. 发明申请

US20080003441A1 Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system 审中-公开
标题翻译：在其上形成有氧化铬钝化膜的金属材料及其制造方法，以及与流体和系统接触的部件
公开(公告)号：US20080003441A1
公开(公告)日：2008-01-03
申请号：US11878976
申请日：2007-07-30
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Nobukazu Ikeda , Eiji Ideta , Akihiro Morimoto , Tetsutaro Ogushi , Takehisa Konishi
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Nobukazu Ikeda , Eiji Ideta , Akihiro Morimoto , Tetsutaro Ogushi , Takehisa Konishi
IPC分类号： B32B15/04
CPC分类号： C23C8/02 , C23C26/00 , Y10T428/24322 , Y10T428/24355 , Y10T428/31678
摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm
摘要翻译：本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。本发明包括以下步骤：在涂覆表面的表面粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬之后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜

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