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    • 10. 发明授权
    • Three way switching controller
    • 三路开关控制器
    • US5606994A
    • 1997-03-04
    • US515001
    • 1995-08-14
    • Tsuyoshi TanikawaKenji Yamamoto
    • Tsuyoshi TanikawaKenji Yamamoto
    • F16K31/126F16K11/048F16K11/10F16K11/16F16K11/20F16K31/163F16K7/17
    • F16K11/161Y10T137/86919
    • A three way switching controller (1) for handling high purity gas, and the like, used for a semiconductor manufacturing plant, and the like, prevents lines on switching sides thereof from communicating with each other at time of switching. The three way switching controller includes a body (2), first and second valves (3 and 4), a cylinder (5), and a linking mechanism (6), with the linking mechanism including a disengagement device (7). The cylinder, operating through the linking mechanism, alternately opens and closes normally-closed valves. The disengagement device prevents a driving force of the cylinder from being applied at once to the valves upon initiation of operation of the cylinder, thereby allowing both of the valves to be in a free state (closed state).
    • 用于处理用于半导体制造厂等的高纯度气体等的三通切换控制器(1)等在切换时防止切换侧的线路相互通信。 三通切换控制器包括主体(2),第一和第二阀(3和4),气缸(5)和连接机构(6),连接机构包括分离装置(7)。 通过连接机构操作的气缸交替打开和关闭常闭阀。 脱开装置防止在气缸开始操作时气缸的驱动力立即施加到阀上,从而允许两个阀处于自由状态(关闭状态)。