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    • 6. 发明授权
    • Apparatus for injecting constant quantitative chemicals and a method
thereof
    • 用于注射恒定定量化学品的装置及其方法
    • US06129098A
    • 2000-10-10
    • US139500
    • 1998-08-25
    • Nobuhiro MikiTakahisa NittaTadahiro OhmiNobukazu IkedaNaofumi Yasumoto
    • Nobuhiro MikiTakahisa NittaTadahiro OhmiNobukazu IkedaNaofumi Yasumoto
    • B01J4/02B01F3/08C02F1/68F04B13/00F04B53/14H01L21/00H01L21/304B08B3/02
    • H01L21/67051B01F15/00357B01F3/0865B01F3/088C02F1/686F04B13/00F04B53/141C02F2103/04
    • An apparatus for injecting constant quantitative chemicals which is capable of injecting a chemical solution into ultra pure water without generating particulate contamination, and furthermore, the injection interval of the chemical solution to the cleaning nozzle is controlled in units of seconds within a range of a few seconds to 10 or more seconds, and the switching of the type of chemical solution and the changeover to ultra pure water cleaning can be conducted in a short period of time of approximately 1 second.The apparatus includes a chemical solution injection system having a chemical solution retaining part for retaining the chemical solution, a control system for pressurization and depressurization for controlling the pressure of the chemical solution in the chemical solution retaining part at regular intervals, an injection control system which operates in concert with the control of the pressure of the chemical solution, and is structured so as to conduct the intermittent injection and instantaneous mixing function of the chemical solution from the chemical solution injection system to the ultra pure water flow path, and the injection stoppage function, and a chemical solution replenishment system which is structured so as to operate in concert with the control of the chemical solution and to be capable of replenishing the chemical solution in the chemical solution retaining part from a chemical solution source.
    • 一种用于注入恒定的定量化学品的装置,其能够将化学溶液注入超纯水中而不产生颗粒污染,此外,化学溶液到清洁喷嘴的注射间隔以几秒为单位进行控制 秒至10秒以上,化学溶液的种类和切换为超纯水清洗的时间可以在1秒钟的短时间内进行。 该装置包括具有用于保持化学溶液的化学溶液保留部分的化学溶液注入系统,用于加压和减压的控制系统,用于以规则的间隔控制化学溶液保留部分中的化学溶液的压力;注射控制系统, 与控制化学溶液的压力一致地进行操作,并且构成为将化学溶液从化学溶液注入系统到超纯水流路的间歇注入和瞬时混合功能进行,并且注射停止 功能和化学溶液补充系统,其结构化以便与化学溶液的控制协同工作,并且能够从化学溶液源补充化学溶液保留部分中的化学溶液。
    • 8. 发明申请
    • Pipe joint
    • 管接头
    • US20050179259A1
    • 2005-08-18
    • US10506671
    • 2003-03-19
    • Kazuhiko SugiyamaKeiko HadaEiji IdetaNobukazu IkedaNaofumi YasumotoMichio Yamaji
    • Kazuhiko SugiyamaKeiko HadaEiji IdetaNobukazu IkedaNaofumi YasumotoMichio Yamaji
    • F16L19/08F16L19/02F16L19/025F16L19/03F16L23/036F16L47/14F16L17/00
    • F16L19/0218F16L19/0225F16L19/025
    • A pipe joint 1 comprises a first joint member 2 of synthetic resin having an annular recessed portion 7 in an end face thereof, and a second joint member 3 of synthetic resin having an annular ridge 8 on an end face thereof. The ridge 8 is fitted in the opening of the recessed portion 7, with a synthetic resin gasket 4 fitted in the recessed portion 7. When the pipe joint 1 is properly tightened up, the outer surface of the ridge 8 of the second joint member 3 is pressed against the inner surface of the recessed portion 7 of the first joint member 2 with the gasket 4 interposed therebetween in intimate contact the surfaces approximately over the entire areas thereof, a portion 2d of the end face of the first joint member 2 positioned radially inwardly of the recessed portion is then in intimate contact with a portion 3d of the end face of the second joint member 3 positioned radially inwardly of the ridge approximately over the entire surface areas thereof, a portion 2e of the end face of the first joint member 2 positioned radially outwardly of the recessed portion is then in intimate contact with a portion 3e of the end face of the second joint member 3 positioned radially outwardly of the ridge approximately over the entire surface areas thereof.
    • 管接头1包括合成树脂的第一接头构件2,其端面具有环形凹部7,在其端面上具有合成树脂的第二接头构件3,其具有环形脊8。 脊8装配在凹部7的开口中,合成树脂垫圈4装配在凹部7中。 当管接头1被适当地紧固时,第二接头构件3的脊8的外表面被密封接触地压靠在第一接头构件2的凹部7的内表面上,垫圈4插入其中 表面大致在其整个区域上,位于凹部的径向内侧的第一接合构件2的端面的部分2d然后与位于第二接头构件3的端面的部分3d紧密接触 大致在其整个表面区域的脊部的径向内侧,位于凹部的径向外侧的第一接合部件2的端面的部分2e紧密接触于凹部的端面部分3e 第二接头构件3大致在其整个表面区域上径向向外设置。