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1. 发明授权

US06193212B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06193212B1
公开(公告)日：2001-02-27
申请号：US09308922
申请日：1999-07-23
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

2. 发明授权

US06394415B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06394415B1
公开(公告)日：2002-05-28
申请号：US09627784
申请日：2000-07-27
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

3. 发明授权

US06158679A Orifice for pressure type flow rate control unit and process for manufacturing orifice 有权
标题翻译：用于压力式流量控制单元的孔口和用于制造孔口的工艺
公开(公告)号：US06158679A
公开(公告)日：2000-12-12
申请号：US284372
申请日：1999-06-16
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Osamu Fukada , Susumu Ozawa , Yoshihiro Satou , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Osamu Fukada , Susumu Ozawa , Yoshihiro Satou , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
IPC分类号： G01F1/40 , G05D7/01 , A62C31/02
CPC分类号： G01F1/40 , G05D7/0186
摘要： An orifice for a pressure-type flow rate controller, which can be produced by a simple method at a low cost, that provides a linearity--between the pressure P1 on the upstream side of the orifice and the flow rate--over a wide range of the pressure ratio P2/P1 of the pressure P2 on the downstream side of the orifice to the upstream pressure P1 and that permits adjustment with ease of flow characteristics among a plurality of orifices. The orifice comprises an inlet taper 1 in the shape of a bugle and a short narrowed straight section 2 adjoining the inlet taper 1, both formed by cutting one opening end of a preliminary hole 6 made in an orifice plate D, and further comprises a short inner taper 3 and an enlarged straight section 4 connecting with the taper 3 which are formed by enlarging the preliminary hole 6 at the other opening end, the short inner taper 3 adjoining the narrowed straight section 2 on one side and neighboring the enlarged straight section 4 on the other side.
摘要翻译： PCT No.PCT / JP98 / 03621 Sec。 371日期1999年6月16日第 102（e）1999年6月16日PCT PCT 1998年8月13日PCT公布。出版物WO99 / 09324 日期1999年2月25日，一种用于压力式流量控制器的孔口，其可以通过简单的方法以低成本生产，其在孔口上游侧的压力P1和流量 - 在孔的下游侧的压力P2的压力比P2 / P1的宽范围到上游压力P1，并且允许在多个孔中容易地调节流动特性。孔口包括一个具有插针形状的入口锥形1和邻近入口锥形1的短缩窄直线部分2，两者都是通过切割在孔板D中制成的预备孔6的一个开口端而形成的，还包括一个短内圆锥体3和与锥体3连接的扩大的直线部分4，其通过在另一个开口端扩大预备孔6而形成，短内锥形件3在一侧邻接变窄的直线部分2并且与扩大的直线部分4相邻另一方面。

4. 发明授权

US06152168A Pressure-type flow rate control apparatus 有权
标题翻译：压力式流量控制装置
公开(公告)号：US06152168A
公开(公告)日：2000-11-28
申请号：US284352
申请日：1999-05-24
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Tomio Uno , Kouji Nishino , Hiroyuki Fukuda , Nobukazu Ikeda , Michio Yamaji
IPC分类号： F16K17/22 , G05D7/06
CPC分类号： G05D7/0647 , Y10T137/7759 , Y10T137/7761
摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q=KP1 (K=constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves a variable orifice wherein the gap is adjusted by the orifice drive.
摘要翻译： PCT No.PCT / JP98 / 03620 Sec。 371日期1999年5月24日 102（e）日期1999年5月24日PCT提交1998年8月13日PCT公布。公开号WO99 / 09463 日期1999年2月25日一种特别用于半导体制造设备中的气体供给系统的压力式流量控制装置。流量控制装置设置有可变孔口，其允许容易地切换流体流量控制范围以及压力型流量控制装置的尺寸减小，并且提供其它优点，包括改进的气体替换性，防止灰尘形成和降低流量控制系统的制造成本。该装置包括孔口，设置在孔口的上游侧的控制阀，设置在控制阀和孔口之间的压力检测器，以及控制单元，用于根据检测到的压力P1计算流体流量Q 压力检测器具有等式Q = KP1（K =常数），并且在控制阀的驱动器中输出设定流量信号Qs和计算流量信号Q之间的差作为控制信号Qy，其中压力P1 on 孔口的上游侧通过致动用于控制孔口下游流体的流速的控制阀来调节，孔口上游侧的压力P1与保持在不同的孔口的下游压力P2之间的比率P2 / P1 高于受控流体的临界压力的比例，其特征在于，直接触摸式金属隔膜阀单元用作孔口，并且阀海之间的环形间隙并且隔膜用于可变孔口，其中间隙由孔口驱动器调节。

5. 发明授权

US6018136A System for supervising piping work 失效
标题翻译：管道工程监理系统
公开(公告)号：US6018136A
公开(公告)日：2000-01-25
申请号：US315338
申请日：1999-05-20
申请人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16L13/02 , B23K9/095 , B23K31/12 , F16L1/00
CPC分类号： B23K9/0953 , B23K31/12 , B23K2201/06
摘要： A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.
摘要翻译：用于监督管道工作的本发明的系统包括用于在预定条件下执行管道焊接或管接头的管道工作的机器，用于根据管道工作条件的预定值检查管道工作是否已被正确执行的检查装置实际管道工作数据，用于累积管道工作条件的预定值的主计算机，实际管道工作数据和检查结果，以及用于发送管道工作条件的预定值的通信装置，实际管道工作数据和检查结果。

6. 发明授权

US5816285A Pressure type flow rate control apparatus 失效
标题翻译：压力式流量控制装置
公开(公告)号：US5816285A
公开(公告)日：1998-10-06
申请号：US907951
申请日：1997-08-11
申请人： Tadahiro Ohmi , Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
发明人： Tadahiro Ohmi , Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
IPC分类号： G05D7/06 , G05D16/20 , F16K31/12
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc=KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.
摘要翻译：压力式流量控制装置（1）控制在孔口上游侧的绝对压力P1和孔口下游侧的绝对压力P2之间的P2 / P1的比例的环境中的流体流量保持在小于约0.7的值。该装置包括：用于形成孔口（5）的板; 位于孔口上游的控制阀（2）; 位于孔口（5）下游的孔对应阀（9）; 位于控制阀（2）和孔（5）之间的主要压力检测器（3）; 位于孔口（5）下游的二次压力检测器（11）; 计算控制装置（6），用于通过公式Qc = KP1（K为常数）计算基于所测量的主压力检测器（3）的压力P1的流量Qc，并且作为控制信号Qy输出差在流量指令信号Qs和计算出的流量信号Qc之间，与控制阀2的驱动单元（14）之间; 以及压力比较计算装置（10），用于计算一次压力检测器（3）的检测压力P1与二次压力检测器（11）的检测压力P2之间的P2 / P1的比。通过控制信号Qy打开和关闭控制阀来调节孔口上游的压力P1，从而控制孔口下游的流速。

7. 发明授权

US5981905A System for supervising piping work 失效
公开(公告)号：US5981905A
公开(公告)日：1999-11-09
申请号：US865767
申请日：1997-05-30
申请人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16L13/02 , B23K9/095 , B23K31/12 , F16L1/00
CPC分类号： B23K9/0953 , B23K31/12 , B23K2201/06
摘要： A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.

8. 发明授权

US5837907A Method of tightening threaded members 失效
标题翻译：拧紧螺纹构件的方法
公开(公告)号：US5837907A
公开(公告)日：1998-11-17
申请号：US862292
申请日：1997-05-22
申请人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
发明人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
IPC分类号： B23P19/06 , B25B23/14 , G01L3/06
CPC分类号： B23P19/069 , B23P19/066 , B25B23/14
摘要： A method is provided for tightening up threaded members with proper tightening torque free of unequivalent tightening. In tightening a plurality of threaded members by drive means, the amount of tightening and tightening torque of each threaded member are detected as the members are progressively tightened, and when the tightening amount of each member has reached a value within a specified range, the difference in tightening torque between the threaded members is checked as to whether it is within a predetermined range.
摘要翻译：提供了一种方法，用于以不受等效收紧的适当紧固扭矩拧紧螺纹部件。在通过驱动装置拧紧多个螺纹构件时，随着构件逐渐紧固，检测每个螺纹构件的拧紧和紧固扭矩的量，并且当每个构件的紧固量达到特定范围内的值时，检查螺纹构件之间的紧固扭矩是否在预定范围内。

9. 发明授权

US6105475A Tightening device 失效
标题翻译：紧固装置
公开(公告)号：US6105475A
公开(公告)日：2000-08-22
申请号：US861790
申请日：1997-05-22
申请人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
发明人： Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
IPC分类号： B23P19/06 , B25B15/00 , B25B21/00 , B25B23/10 , B25B23/14 , B25B23/151
CPC分类号： B25B23/108 , B23P19/066 , B23P19/069 , B25B15/008 , B25B21/00 , B25B23/101 , B25B23/14
摘要： A device for tightening a plurality of threaded members at the same time with proper torque without necessitating a cumbersome procedure of rotating the members one by one through a specified small angle at a time and without unequivalent tightening of the members, the tightening device (1) comprises two rotary shafts (6) each provided at a forward end thereof with a wrench portion (8) fittable to the threaded member (44), motors (3) for individually driving the rotary shafts (6) and a control unit (9) for detecting the tightening torque of each threaded member (44) and controlling the motor (3) based on the detected value to ensure proper tightening, the control unit (9) checking the tightening torque of each threaded member (44) as to whether the torque is within a predetermined range and whether the difference in tightening torque between the threaded members (44) is within a predetermined range.
摘要翻译：紧固装置（1）是用于以适当的扭矩同时紧固多个螺纹构件的装置，而不需要一次一个地将构件一个一个地旋转规定的小角度的麻烦的过程，并且没有不同的紧固构件，包括两个旋转轴（6），每个旋转轴在其前端处设有可配合到螺纹构件（44）的扳手部分（8），用于单独驱动旋转轴（6）和控制单元（9）的马达（3）为了检测每个螺纹构件（44）的紧固扭矩并基于检测值来控制马达（3）以确保适当的紧固，控制单元（9）检查每个螺纹构件（44）的紧固扭矩，以确定是否扭矩在预定范围内，并且螺纹构件（44）之间的紧固扭矩的差是否在预定范围内。

10. 发明授权

US5791369A Pressure type flow rate control apparatus 失效
标题翻译：压力式流量控制装置
公开(公告)号：US5791369A
公开(公告)日：1998-08-11
申请号：US812330
申请日：1997-03-05
申请人： Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
发明人： Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
IPC分类号： F16K17/22 , F16K31/02 , G05D7/06 , G05D16/20 , H01L21/3065 , E03B11/00
CPC分类号： G05D7/0635 , Y10T137/5109 , Y10T137/7737 , Y10T137/7759 , Y10T137/7761 , Y10T137/777 , Y10T137/87917
摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.
摘要翻译：用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出，控制阀的驱动单元。通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

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