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    • 4. 发明专利
    • VAPOR GROWTH APPARATUS
    • JPH01315130A
    • 1989-12-20
    • JP6932389
    • 1989-03-23
    • TOSHIBA CORP
    • NAKAMURA YOSHIAKI
    • H01L21/205
    • PURPOSE:To form a crystal thin film which is uniformly thick over the whole surface on a specimen face by arranging a stream-regulating means of a prescribed shape inside an expanded part. CONSTITUTION:Three stream-regulating sheets 8a, 8b, 8c are arranged, inside an expanded part 11b of a reaction tube 11, in a position of a distance L from a gas introduction port 11a. The stream-regulating sheet 8a is situated in the center of the expanded part 11b; the stream-regulating sheets 8b, 8c are arranged in such a way that they are symmetric with reference to the central axis of the expanded part 11b and that each angle theta1 formed by the individual stream- regulating sheets 8a, 8b with reference to the central axis of the reaction tube 11 is larger than an angle theta2 formed by a side face of the expanded part 11b with reference to the central axis of the reaction tube 11. A susceptor 12 made of carbon is arranged inside a reaction part 11c of the reaction tube 11; one sheet or two or more sheets of semiconductor wafers 13 are placed on the susceptor 12. By this setup, a thin film which is uniformly thin over the whole surface can be formed on a crystal substrate.
    • 5. 发明专利
    • Method for manufacturing particle substrate, and particle substrate
    • 制造颗粒基质和颗粒基质的方法
    • JP2007223015A
    • 2007-09-06
    • JP2006050403
    • 2006-02-27
    • Toshiba Corp株式会社東芝
    • TODORI KENJIFUJIMOTO AKIRAGOKOCHI TORUNAKANISHI TSUTOMUNAKAMURA YOSHIAKI
    • B82B3/00C23C28/00
    • PROBLEM TO BE SOLVED: To provide a particle substrate having nanoparticles or sub-nano particles of ≤1 nm regularly formed in a wide area, and to provide a method for manufacturing the particle substrate.
      SOLUTION: The method includes steps of: preparing a substrate 1 the surface of which has a deposit layer 2 containing a metal; forming a particle layer 4 comprising uniformly arranged metal particles at a certain distance from the surface of the substrate 1 via an insulating layer 3; and irradiating the particle layer 4 with light from the opposite side to the insulating layer 3 so as to generate plasmon in the metal particle end of the particle layer 4 of the insulating layer 3 side and to almost uniformly deposit particle groups comprising the metal of the deposit layer 2 or oxides of the metal corresponding to the plasmon.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供具有规模形成在大面积上的≤1nm的纳米颗粒或亚纳米颗粒的颗粒基板,并提供一种制造该颗粒基板的方法。 解决方案:该方法包括以下步骤:制备其表面具有含有金属的沉积层2的基底1; 通过绝缘层3形成包含与基板1的表面一定距离的均匀排列的金属颗粒的颗粒层4; 并且将来自与绝缘层3相反的一侧的光照射在粒子层4上,以便在绝缘层3侧的粒子层4的金属粒子端部产生等离子体激元,并且几乎均匀地沉积包含绝缘层3的金属的粒子群 沉积层2或对应于等离子体的金属的氧化物。 版权所有(C)2007,JPO&INPIT
    • 7. 发明专利
    • WAFER HANDLING DEVICE
    • JPS6486535A
    • 1989-03-31
    • JP24265987
    • 1987-09-29
    • TOSHIBA CORP
    • NAKAMURA YOSHIAKI
    • H01L21/683H01L21/68
    • PURPOSE:To enable handling operation by the contact of a wafer sucking jig only with the rear of a wafer, and to prevent the damage to the surface of the wafer by providing a wafer susceptor, the jig and a transfer means moving the wafer to a fixed position. CONSTITUTION:A susceptor 3 is overturned from a hinge section 8, and a vacuum sucking jig 10 as a handling jig is passed through a through-hole 7 bored to the susceptor 3. On the other hand, a wafer 5 is placed onto a fork 9 while the crystal growth face of the surface is directed upward, and being forwarded from a pretreatment process. The nose section of the vacuum suction 10 is made to collide with the rear of the wafer 5, and the rear of the wafer is sucked under a vacuum. The fork 9 is returned to an original position while the wafer 5 is housed into a wafer housing section 4 by downward moving the vacuum suction 10. Accordingly, a contact with the surface of the wafer of the handling jig when the wafer is mounted to or dismantled from the wafer susceptor is prevented.
    • 9. 发明专利
    • TERMINAL STRUCTURE OF WATT-HOUR METER
    • JPS62273460A
    • 1987-11-27
    • JP11612386
    • 1986-05-22
    • TOKYO ELECTRIC POWER COFUJI ELECTRIC CO LTDMITSUBISHI ELECTRIC CORPTOSHIBA CORP
    • KOIWAI NORIONAKAMURA YOSHIAKIHIRAYAMA YOSHIO
    • G01R11/04
    • PURPOSE:To prevent an increase in the contact resistance, by a method wherein blade terminals (projection) of a socket terminal for separating direct connection between a power source side wire and a load side wire are built up with an insulator at least on one side thereof to come off sliding against blade receiving terminals so that the corrosion and the entry of a foreign matter will be prevented by a cleaning action. CONSTITUTION:To mount the body 20 of a watt-hour meter, blade-like terminals 24a-24d are inserted into blade receiving terminals 31a-31d of a socket terminal box 30. Here, as the length of an insulator projection 25 is shorter than the jut length of the blade-like terminals 24a and 24c, first the blade-like terminals 24a-24d are inserted into the respective terminals 31a-31d to supply power to a voltage coil 21 and a current coil 22. Then, the projection 25 is inserted into the blade receiving terminal 33 to separate the direct connection between a power source side wire 2b and a load side wire 3b. Since the projection 25 and the blade-like terminals 24a-24d are sliden against the terminal 33 and those 31a-31d respectively when inserted thereinto, any foreign matters on the respective terminals 33 and 31a-31d are forced out and any corrosion is scraped off.