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1. 发明专利

JPH09190651A OPTICAL ORIGINAL DISK EXPOSING DEVICE AND ASYNCHRONOUS DEFLECTION AMOUNT CORRECTING DEVICE 失效
公开(公告)号：JPH09190651A
公开(公告)日：1997-07-22
申请号：JP5113896
申请日：1996-03-08
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA , TACHIKAWA YUICHI , NISHIDA JUN
IPC分类号： B82B1/00 , G05B19/042 , G11B7/095 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To make the track pith of an optical original disk minute by enabling high precision positioning and preventing accuracy of the track pitch from deterioration due to asynchronous deflection generated at random in the radial direction of a turntable. SOLUTION: Deflection amt. of the turntable 1 at each rotational angular position is previously measured, and an average value obtained by averaging such deflecting amts. at every rotational angular position is stored in a memory 9. At the time of exposure, the average value corresponding to each rotational angular position is subtracted from the measured deflection amt. to output an asynchronous deflection amt. only. By this output value, a position to be irradiated with exposing light is corrected by an adjusting means 13. In this optical original disk exposing constituted in such a manner, the asynchronous deflection irrespective of any rotational angular position of the turntable 1 can be outputted in real time, so that the asynchronous deflection to affect an serious adverse effect upon the accuracy of a track pitch can immediately be grasped during work even in the midst of the exposure, and hence the exposing work can be stopped. Then, by correcting the position to be irradiated with the exposing light, the high precision optical original disk exposing device without being influenced by the asynchronous deflection of the turntable 1 is realized.

2. 发明专利

JP2004214415A Pattern plotting method and device 有权
公开(公告)号：JP2004214415A
公开(公告)日：2004-07-29
申请号：JP2002382390
申请日：2002-12-27
申请人： Toshiba Corp , 株式会社東芝
发明人： HIRANO RYOICHI , TACHIKAWA YUICHI , MITSUI SOICHIRO , OGASAWARA MUNEHIRO , TOJO TORU
IPC分类号： G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To improve pattern transferring precision using a stepper by performing plotting added with the position deviation of a pattern formation face when the back face of a substrate is adhered to a predetermined standard face.
SOLUTION: This pattern plotting method for plotting a desired pattern on a substrate to be plotted held by a substrate holding part by an energy beam is provided to measure the distribution of the height position of a back face opposite to the face where the pattern of a substrate 11 is formed in a status that the substrate 11 is held by a substrate holding part 12, to calculate the position deviation value of the face where the pattern is formed generated in a status that the back face of the substrate 11 is corrected to a flat face based on the measured distribution of the height position, and to correct the pattern plotting position at the time of plotting the pattern based on the calculated position deviation value.
COPYRIGHT: (C)2004,JPO&NCIPI

3. 发明专利

JPS6381012A MOLDING OF FIBER REINFORCED PLASTIC 失效
公开(公告)号：JPS6381012A
公开(公告)日：1988-04-11
申请号：JP22690486
申请日：1986-09-25
申请人： TOSHIBA CORP
发明人： YOKOYAMA TAKEYOSHI , TACHIKAWA YUICHI , SHIMIZU FUKUZO
IPC分类号： B29C43/36 , B29K105/06
摘要： PURPOSE:To mold a complicated structural body with a specified thickness, by holding a plastic resin added to a reinforcing fiber between an inner mold and an outer mold having different linear expansion coefficient each other, and pressing it under heating. CONSTITUTION:A prepreg material 12 wherein a plastic resin is added to a tape base material and it is semi-cured is wound in a plurality of layers with a specified thickness on the outer circumferencial surface of an inner mold 10. An outer mold 13 is placed outside them and the prepreg material 12 is thereby held between both molds. When the prepreg material 12 is heated in an over, since the inner mold 10 has larger linear expansion coefficient than that of the outer mold 13, the inner mold 10 makes larger expansion to expand outside. In this case, on both ends of the inner mold 10 in its axial direction, fixing devices 14 having the same linear expansion coefficient as that of the outer mold 13 are set. The inner mold 10 thereby expands toward the outer mold 13 while the expansion of the inner mold 10 in the axial direction is being restricted. The plastic resin thereby receives a uniform compressing pressure from the inside to the outside like this, and at the same time is heated, treated and cured to make it possible to carry out a uniform press-molding on a complicated structural body.

4. 发明专利

JPH11151462A ROTARY COATING METHOD AND ROTARY COATING DEVICE 失效
公开(公告)号：JPH11151462A
公开(公告)日：1999-06-08
申请号：JP26018598
申请日：1998-09-14
申请人： TOSHIBA CORP
发明人： TACHIKAWA YUICHI , NAKAMURA YOSHIAKI
IPC分类号： G03F7/16 , B05C11/08 , B05D1/40 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To sufficiently cope with a large sized body to be coated or a body to be coated, which is required to make a film thin, by remarkably increasing the number of rotations (speed), at which the unevenness of coating film thickness due to the turbulence of air stream is generated. SOLUTION: In a rotary coating device for forming a coating film on the surface of the body 1 to be coated by spreading a coating liquid 5 on the body 1 to be coated with a centrifugal force by rotating the body 1 to be coated, on which the coating liquid is dropped, gas supply and ventilating means 21, 22, 23, 24 for supplying a gas to the body 1 to be coated, on which the coating liquid 5 is stuck, and for forcibly forming a gas stream flowing along the surface of the body 1 to be coated with the coating liquid 5 by the rotation of the body 1 to be coated and ventilating are provided.

5. 发明专利

JPS6381035A FIBER REINFORCED PLASTIC 失效
公开(公告)号：JPS6381035A
公开(公告)日：1988-04-11
申请号：JP22690586
申请日：1986-09-25
申请人： TOSHIBA CORP
发明人： AKIBA KEIZO , SHIMIZU FUKUZO , OKUYA TSUGUYUKI , TACHIKAWA YUICHI
IPC分类号： B29C70/10 , B29B11/16 , B29L9/00 , B32B5/00 , B32B5/12 , B32B5/28 , B32B27/04

6. 发明专利

JPS6268208A VERTICAL TYPE MOVING TABLE DEVICE 失效
公开(公告)号：JPS6268208A
公开(公告)日：1987-03-28
申请号：JP20530485
申请日：1985-09-19
申请人： TOSHIBA CORP
发明人： TACHIKAWA YUICHI , ISHIBASHI YORIYUKI
IPC分类号： B23B47/26 , B23Q5/40 , B23Q11/00
摘要： PURPOSE:To enable positioning of a moving table to be performed high accurately further in a short time, by connecting the moving table with a counterweight through a pair of feed screw threads and a power transmission mechanism. CONSTITUTION:A device, mounting a moving table 11 and a counterweight 12 respectively to feed screw threads 13, 14 threaded in the same direction, connects the screw threads 13, 14 by a pair of gears 15, 16. If the table 11 is vertically moved by turning the feed screw thread 13 through a motor 17, the feed screw thread 14 is simultaneously turned through the gears 15, 16, and the weight 12 is vertically moved in a reverse direction to the table 11. In this way, the device, compensating gravity of the table 11, high accurately performs its positioning.

7. 发明专利

JPS61277339A VERTICAL TYPE ROTARY MACHINE AGGREGATE 失效
公开(公告)号：JPS61277339A
公开(公告)日：1986-12-08
申请号：JP11525585
申请日：1985-05-30
申请人： TOSHIBA CORP
发明人： OTOMI KOICHI , TACHIKAWA YUICHI
IPC分类号： H02K5/00
摘要： PURPOSE:To improve precision on the installation of a vertical type rotary machine, and to inhibit the dispersion of performance by forming an outer side wall and an inner side wall, end sections thereof are fixed to the installation surface of the vertical type rotary machine for a chamber and the surface oppositely facing the installation surface, while disposing a piping for cooling. CONSTITUTION:A hermetically formed chamber 13 has an outer side wall 14, inner side walls 15, an upper plate 16 and a baseplate 17, and pipings 18 for cooling are arranged to the outer side wall 14 and the inner side walls 15. The state of the distribution of the pipings 18 for cooling is set properly in response to the status of the generation of heat in a vertical type rotary machine 5, and a coolant is flowed through the pipings 18 from a coolant supply source. A through-path 21 is formed inside the inner side walls 15 by openings 19, 20 each shaped to the upper plate 16 and the baseplate 17. A plurality of the vertical type rotary machines 5 are installed onto the baseplate 17 with predetermined precision in the chamber 13.

8. 发明专利

JPH08329476A OPTICAL MASTER DISK EXPOSURE DEVICE AND ITS CONTROL METHOD 失效
公开(公告)号：JPH08329476A
公开(公告)日：1996-12-13
申请号：JP13247095
申请日：1995-05-31
申请人： TOSHIBA CORP
发明人： NISHIDA JUN , KIKUIRI NOBUTAKA , TACHIKAWA YUICHI , UCHIDA NORIO
IPC分类号： G11B7/085 , G11B7/26
摘要： PURPOSE: To suppress the vibration of a slider of an exposure device exposing an optical master disk and to accurately move an objective lens on the slider at a constant speed. CONSTITUTION: An exposing beam 5 is converged by an objective lens 8 by means of an exposing optical system 6 provided on a slider 1. A piezoelectric element 11 finely adjusting the position of a first fine adjustable table 10 mounting the objective lens 8 is provided on a second adjustable table 9. An optical master disk 4 is arranged on a position opposed to the objective lens 8. A turntable 2 for rotating the optical master disk 4 is arranged. By moving the first fine adjustable table 10 by the same distance as the amplitude of vibration of the slider 1 in the reverse direction to the vibration direction, the vibration of the slider 1 is canceled and the objective lens 8 on the first fine adjustable table 10 is accurately moved at a constant speed at which the slider 1 aims. Then, the accuracy of a track pitch is not deteriorated.

9. 发明专利

JPS6384930A FIBER REINFORCED PLASTIC 失效
公开(公告)号：JPS6384930A
公开(公告)日：1988-04-15
申请号：JP23084686
申请日：1986-09-29
申请人： TOSHIBA CORP
发明人： TACHIKAWA YUICHI , OKUYA TSUGUYUKI , ISEYA TOSHIFUMI , AKIBA KEIZO
IPC分类号： B29C70/16 , B29D23/00 , B32B5/00
摘要： PURPOSE:To prevent the generation of a part locally low in strength, by regularly and densely winding a fiber or a fiber bundle around a mandrel at an arbitrary angle with respect to the axis of said mandrel to form upper and lower adjacent layers and mutually displacing the positions of cloth fells generated in both layers. CONSTITUTION:A fiber 1 is spirally wound around a mandrel at an arbitrary winding angle and folded back at the end part of the mandrel to be spirally wound around the mandrel in the direction opposite to the axial direction. This work is repeated to form a lower layer 3. Thereafter, the fiber 1 is further wound around the lower layer 3 to similarly form an upper layer 4 so that the cloth fell 5 of the lower layer 3 does not overlap with the cloth fell 6 of the upper layer 4 at the same position to prevent the generation of a part locally low in strength. Even in a case composed of many layers, the either one of the positions of the cloth fells of layers at least adjacent to each other up and down is successively displaced so as to prevent the overlapping of said cloth fells to develop the same effect.

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