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    • 4. 发明专利
    • Abrasive grain for polishing, manufacturing method therefor, and abrasive
    • 用于抛光的磨料颗粒,其制造方法和磨料
    • JP2004155913A
    • 2004-06-03
    • JP2002322935
    • 2002-11-06
    • Yushiro Chem Ind Co Ltdユシロ化学工業株式会社
    • NAKADA HIDETOHAMAMOTO SHINJIYOKOYAMA KENZO
    • B24B37/00B82Y10/00B82Y99/00C09K3/14H01L21/304
    • PROBLEM TO BE SOLVED: To provide abrasive grains for high-performance polishing, having small particle diameters with a narrow particle diameter distribution, capable of giving a high rate of polishing with little occurrence of a damage, such as a scratch, on the surface of a processed material, a method for simply and easily manufacturing the abrasive grains, and an abrasive containing the abrasive grains. SOLUTION: The abrasive grains for polishing comprise a composite oxide obtained by mixing an aqueous solution containing celium(III) nitrate and zirconium nitrate respectively in amounts in terms of celium oxide of 10-95 mass% and zirconium oxide of 5-90 mass% based on 100 mass% total of those in terms of oxides with a precipitant comprising an aqueous ammonia, raising the temperature of the mixture to 100°C in 7 min and aging it for 1 hr, and having a mean particle diameter of 0.1 nm to below 10 nm. The abrasive grains are obtained without baking at a high temperature and have an excellent polishing performance. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了提供具有窄粒径分布的小粒径的用于高性能抛光的磨料颗粒,能够以几乎不发生诸如刮擦的损伤发生高抛光率 加工材料的表面,用于简单且容易地制造磨粒的方法,以及含有磨粒的磨料。 < P>解决方案:用于抛光的磨料颗粒包含通过将含有硝酸铈(III)和硝酸锆的水溶液分别以10-95质量%的氧化铈和5-90重量%的氧化锆的量混合而获得的复合氧化物 基于100质量%的含有氨水的沉淀剂的氧化物的总质量%,将混合物的温度在7分钟内升温至100℃,并使其老化1小时,平均粒径为0.1 nm至10nm以下。 在高温下不磨损地获得磨粒,并且具有优异的抛光性能。 版权所有(C)2004,JPO