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    • 1. 发明专利
    • Method of cutting or grinding brittle material and chip-sticking preventive agent
    • 切割或研磨脆性材料和芯片预防剂的方法
    • JP2007152858A
    • 2007-06-21
    • JP2005354069
    • 2005-12-07
    • Disco Abrasive Syst LtdYushiro Chem Ind Co Ltdユシロ化学工業株式会社株式会社ディスコ
    • ISHIKAWA TAKATOSHITAKAO MASANORITAKEMURA TOMOYOSHISANDO HIDEYUKIYOSHIDA MIKIRYUU ROISENHARADA SEISHI
    • B28D7/02B24B55/00C09K3/14
    • PROBLEM TO BE SOLVED: To provide a method of cutting or grinding brittle materials and a chip-sticking preventive agent by which the sticking of chips or a ground powder generated in machining a brittle material to a workpiece is controlled, the cleaning after machining is made easier and the lowering of a yield due to poor cleaning is avoided.
      SOLUTION: The method of cutting or grinding brittle materials is characterized in that cutting or grinding brittle materials is conducted by using a brittle material-machining auxiliary agent which is obtained by mixing water and a large molecular weight water-soluble cationic polymer with an average weight-average molecular weight of 70-70,000 (e.g. a polyethylene imine, a dicyandiamide, a quaternary ammonium salt and the like), contains the large molecular weight water-soluble cationic polymer in an amount of 5-10,000 ppm and has a pH of 6-9. The method of cutting or grinding brittle materials is favorably applied for cutting or grinding brittle, particularly cutting, precision-polishing and dicing materials including glass, ceramics or silicon.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供一种切削或研磨脆性材料的方法以及防止在对加工脆性材料时产生的切屑或研磨粉末粘附到工件上的防止碎屑的处理, 使加工变得更容易,并且避免了由于清洁不良导致的产量的降低。 解决方案:切削或研磨脆性材料的方法的特征在于,通过使用脆性材料加工辅助剂来进行切削或研磨脆性材料,所述脆性材料加工助剂通过将水和大分子量水溶性阳离子聚合物与 平均重均分子量为70-70,000(例如聚乙烯亚胺,双氰胺,季铵盐等)含有5-10,000ppm的大分子量水溶性阳离子聚合物,并具有 pH为6-9。 切削或研磨脆性材料的方法有利地用于切削或研磨脆性,特别是切割,精密抛光和切割材料,包括玻璃,陶瓷或硅。 版权所有(C)2007,JPO&INPIT
    • 5. 发明专利
    • Stripper for color resist
    • 剥色器用于颜色抵抗
    • JP2009115929A
    • 2009-05-28
    • JP2007286782
    • 2007-11-02
    • Nagase Chemtex CorpYushiro Chem Ind Co Ltdナガセケムテックス株式会社ユシロ化学工業株式会社
    • YASUE HIDEKUNISAKATE KOJIISHIKAWA TAKATOSHI
    • G03F7/42G02B5/20G02F1/1335H01L21/027
    • PROBLEM TO BE SOLVED: To provide a stripper for color resist, containing no metal ions while suppressing corrosion of metal (especially aluminum), and having excellent color resist strippability. SOLUTION: This stripper for color resist contains water, quaternary ammonium hydroxide [B], alkanolamine [C], trivalent to octavalent polyhydric alcohol [D] and a silane-based compound [A] represented by the following general formula (1), wherein it does not contain a water soluble organic solvent [E] except the polyhydric alcohol or contains it under 30 wt.%, and the upper limit of content of the [B] component is 10 wt.%. [(X 2 N-(CH 2 ) 1 -) m NH 2 -m-(CH 2 ) k -] n Si(OR) 4-n (1), wherein 1 is an integer of l-4, m is an integer of 0-2, and n is an integer of 1-3. R is hydrogen or 1-4C alkyl group, and X is hydrogen or 1-4C alkyl group. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种防止金属离子同时抑制金属(特别是铝)的腐蚀并且具有优异的耐色性剥离性的着色抗蚀剂剥离剂。 该溶胶剂含有水,季铵氢氧化物[B],链烷醇胺[C],三价至八价多元醇[D]和由以下通式(1)表示的硅烷类化合物[A] ),其中除了多元醇之外不含水溶性有机溶剂[E]或含有30重量%以下,[B]成分的上限为10重量%。 [(X 2 N - (CH 2 ( - ) - ( - ) - ( - ) - ( - ) - (SBB) 其中1为1-4的整数,m为0-2的整数,n为1-3的整数。 R为氢或1-4C烷基,X为氢或1-4C烷基。 版权所有(C)2009,JPO&INPIT