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    • 10. 发明授权
    • Enhanced performance bipolar transistor process
    • 增强性能双极晶体管工艺
    • US5369042A
    • 1994-11-29
    • US26886
    • 1993-03-05
    • Francis J. MorrisJau-Yuann YangDonald L. PlumtonHan-Tzong Yuan
    • Francis J. MorrisJau-Yuann YangDonald L. PlumtonHan-Tzong Yuan
    • H01L21/331H01L27/06H01L29/737H01L21/265
    • H01L29/66318H01L27/0605H01L29/7371Y10S148/01Y10S148/072
    • This is a method of forming a bipolar transistor comprising: forming a subcollector layer, having a doping type and a doping level, on a substrate; forming a first layer, of the same doping type and a lower doping level than the subcollector layer, over the subcollector layer; increasing the doping level of first and second regions of the first layer; forming a second layer, of the same doping type and a lower doping level than the subcollector layer, over the first layer; increasing the doping level of a first region of the second layer which is over the first region of the first layer, whereby the subcollector layer, the first region of the first layer and the first region of the second layer are the collector of the transistor; forming a base layer over the second layer of an opposite doping type than the subcollector layer; and forming an emitter layer of the same doping type as the subcollector layer over the base layer. Other devices and methods are also disclosed.
    • 这是一种形成双极晶体管的方法,包括:在衬底上形成具有掺杂类型和掺杂水平的子集电极层; 在子集电极层上形成与子集电极层相同的掺杂类型和较低掺杂水平的第一层; 增加第一层的第一和第二区域的掺杂水平; 在第一层上形成与子集电极层相同的掺杂类型和较低掺杂水平的第二层; 增加在第一层的第一区域之上的第二层的第一区域的掺杂水平,由此子集电极层,第一层的第一区域和第二层的第一区域是晶体管的集电极; 在与所述子集电极层相反的掺杂类型的第二层上形成基底层; 并且在基底层上形成与子集电极层相同的掺杂类型的发射极层。 还公开了其它装置和方法。