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    • 8. 发明授权
    • Enhanced performance bipolar transistor process
    • 增强性能双极晶体管工艺
    • US5369042A
    • 1994-11-29
    • US26886
    • 1993-03-05
    • Francis J. MorrisJau-Yuann YangDonald L. PlumtonHan-Tzong Yuan
    • Francis J. MorrisJau-Yuann YangDonald L. PlumtonHan-Tzong Yuan
    • H01L21/331H01L27/06H01L29/737H01L21/265
    • H01L29/66318H01L27/0605H01L29/7371Y10S148/01Y10S148/072
    • This is a method of forming a bipolar transistor comprising: forming a subcollector layer, having a doping type and a doping level, on a substrate; forming a first layer, of the same doping type and a lower doping level than the subcollector layer, over the subcollector layer; increasing the doping level of first and second regions of the first layer; forming a second layer, of the same doping type and a lower doping level than the subcollector layer, over the first layer; increasing the doping level of a first region of the second layer which is over the first region of the first layer, whereby the subcollector layer, the first region of the first layer and the first region of the second layer are the collector of the transistor; forming a base layer over the second layer of an opposite doping type than the subcollector layer; and forming an emitter layer of the same doping type as the subcollector layer over the base layer. Other devices and methods are also disclosed.
    • 这是一种形成双极晶体管的方法,包括:在衬底上形成具有掺杂类型和掺杂水平的子集电极层; 在子集电极层上形成与子集电极层相同的掺杂类型和较低掺杂水平的第一层; 增加第一层的第一和第二区域的掺杂水平; 在第一层上形成与子集电极层相同的掺杂类型和较低掺杂水平的第二层; 增加在第一层的第一区域之上的第二层的第一区域的掺杂水平,由此子集电极层,第一层的第一区域和第二层的第一区域是晶体管的集电极; 在与所述子集电极层相反的掺杂类型的第二层上形成基底层; 并且在基底层上形成与子集电极层相同的掺杂类型的发射极层。 还公开了其它装置和方法。
    • 9. 发明授权
    • Method to integrate HBTs and FETs
    • 集成HBT和FET的方法
    • US5077231A
    • 1991-12-31
    • US670094
    • 1991-03-15
    • Donald L. PlumtonFrancis J. MorrisJau-Yuann Yang
    • Donald L. PlumtonFrancis J. MorrisJau-Yuann Yang
    • H01L27/06H01L21/331H01L21/338H01L21/76H01L21/8232H01L21/8252H01L27/095H01L29/205H01L29/73H01L29/737H01L29/778H01L29/812
    • H01L27/0623H01L21/7605H01L21/8252Y10S148/009Y10S148/072
    • This is a method for fabricating integrated heterojunction bipolar transistors (HBTs) and heterojunction field effect transistors (HFETs) on a substrate. The method comprises: forming a subcollector layer 12 over the substrate 10; forming a collector layer 14 over the subcollector layer; forming a base layer 16 over the collector layer; etching the base layer to form one or more base pedestals 16 over a portion of the collector layer; forming a buffer region 18 in a portion of the collector layer over which one or more HFETs are fabricated; forming one or more channel regions 20,22 over the buffer region; forming a wide bandgap material emitter/gate layer 26 over the base pedestal and the channel region; forming isolation regions 30,32, whereby there is one or more separate HBTs and one or more separate HFETs over the substrate utilizing an epitaxially grown emitter/gate layer to form both an HBT emitter and an HFET gate. Other devices and methods are also disclosed.
    • 这是在衬底上制造集成异质结双极晶体管(HBT)和异质结场效应晶体管(HFET)的方法。 该方法包括:在衬底10上形成子集电极层12; 在子集电极层上形成集电极层14; 在集电极层上形成基层16; 蚀刻基底层以在集电极层的一部分上形成一个或多个基座16; 在所述集电极层的一部分上形成缓冲区18,在所述集电极层中制造一个或多个HFET; 在所述缓冲区上形成一个或多个沟道区20,22; 在基座和通道区域上形成宽带隙材料发射极/栅极层26; 形成隔离区30,32,由此在衬底上存在一个或多个单独的HBT和一个或多个单独的HFET,利用外延生长的发射极/栅极层以形成HBT发射极和HFET栅极。 还公开了其它装置和方法。