会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Methods of forming trench isolation regions having stress-reducing nitride layers therein
    • 在其中形成具有应力减小氮化物层的沟槽隔离区的方法
    • US06251746B1
    • 2001-06-26
    • US09415475
    • 1999-10-08
    • Soo-Jin HongYung-Seob YuBon-Young KooByung-Ki KimSeung-Mok Shin
    • Soo-Jin HongYung-Seob YuBon-Young KooByung-Ki KimSeung-Mok Shin
    • H01L2176
    • H01L21/76224
    • Methods of forming trench isolation regions include the steps of forming a trench masking layer comprising a first material (e.g., polysilicon) on a semiconductor substrate and then etching a trench in the semiconductor substrate, using the trench masking layer as etching mask. A trench nitride layer comprising a second material different from the first material is then formed on a sidewall of the trench and on a sidewall of the trench masking layer. The trench is then filled with a trench insulating material (e.g., USG). The trench masking layer is then removed by selectively etching the trench masking layer with an etchant that selectively etches the first material at a higher rate than the second material. This step of removing the trench masking layer results in exposure of a protruding portion of the trench nitride layer but does not cause the trench nitride layer to become recessed. The trench insulating material and the trench nitride layer are then etched back to define the trench isolation region.
    • 形成沟槽隔离区的方法包括以下步骤:使用沟槽掩模层作为蚀刻掩模,在半导体衬底上形成包含第一材料(例如多晶硅)的沟槽屏蔽层,然后蚀刻半导体衬底中的沟槽。 然后在沟槽的侧壁和沟槽掩模层的侧壁上形成包括不同于第一材料的第二材料的沟槽氮化物层。 然后用沟槽绝缘材料(例如USG)填充沟槽。 然后通过用比第二材料更高的速率选择性地蚀刻第一材料的蚀刻剂选择性蚀刻沟槽掩模层来去除沟槽掩模层。 去除沟槽屏蔽层的这个步骤导致了沟槽氮化物层的突出部分的曝光,但是不会使沟槽氮化物层变凹陷。 然后将沟槽绝缘材料和沟槽氮化物层回蚀刻以限定沟槽隔离区域。