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    • 1. 发明授权
    • Color television receiver
    • 彩色电视接收机
    • US3975766A
    • 1976-08-17
    • US572645
    • 1975-04-29
    • Shunichi SanoKohichi Kasahara
    • Shunichi SanoKohichi Kasahara
    • H04N9/18H04N9/28H01J29/50H01J31/00
    • H04N9/28
    • A color television receiver comprising a color television receiving tube which is provided with three horizontally arranged electron guns so designed as to emit three electron beams and cause said beams to be converged at a point outside of the fluorescent screen of the color television receiving tube; a deflection yoke fitted to the color television receiving tube and so constructed as to cause a horizontal deflection magnetic field created by said yoke to display a pincushion-shaped intensity distribution and a vertical deflection magnetic field produced thereby to present a barrel-shaped intensity distribution; and a delay circuit for causing at least two of the three primary color signals of color television which modulate the three electron beams to be successively delayed from the foremost one at the rate of a prescribed length of time corresponding to the intervening spacing of the three electron beams impinging on the fluorescent screen of the color television receiving tube.
    • 一种彩色电视接收机,包括彩色电视接收管,该彩色电视接收管设置有三个水平布置的电子枪,设计成发射三束电子束,并使所述光束在彩色电视接收管的荧光屏外侧点聚焦; 安装在彩色电视接收管上的偏转线圈构造成使得由所述磁轭产生的水平偏转磁场显示出由此产生的枕形强度分布和垂直偏转磁场,以呈现桶形强度分布; 以及延迟电路,用于使彩色电视的三个原色信号中的至少两个调制三个电子束,以与三个电子的中间间隔相对应的规定时间长度的速率从最前面的一个连续延迟 撞击在彩色电视接收管的荧光屏上的光束。
    • 3. 发明授权
    • Method of forming by projection an integrated circuit pattern on a
semiconductor wafer
    • 通过在半导体晶片上投影集成电路图案来形成方法
    • US4621371A
    • 1986-11-04
    • US594731
    • 1984-03-29
    • Mineo GotouShunichi Sano
    • Mineo GotouShunichi Sano
    • G03F7/20H01J37/304H01J37/317G21K5/04
    • B82Y10/00B82Y40/00G03F7/70433G03F7/7045G03F7/706H01J37/3045H01J37/3174H01J2237/30433
    • A method of forming by projection an integrated circuit pattern on a first semiconductor wafer, wherein a plurality of reference marks are projected onto a second semiconductor wafer by the irradiation of radiant rays from a projector apparatus used to form the integrated circuit pattern onto the first semiconductor wafer. The positions of the reference marks projected onto the second semiconductor wafer are measured, thereby measuring the projection distortion peculiar to the projector apparatus. As the next step, a projection mask used to form the integrated circuit pattern is produced with the use of the measured projection distortions which has a distortion opposite that of the projector so as to offset its projection distortion. The mark is mounted in the projector apparatus, and the radiant rays are irradiated onto the mask thus projecting the integrated circuit pattern onto the first semiconductor wafer.
    • 一种通过将集成电路图案投影在第一半导体晶片上而形成的方法,其中多个参考标记通过从用于形成集成电路图案的投影仪设备的辐射线照射到第一半导体晶片上而投影到第二半导体晶片上 晶圆。 测量投射到第二半导体晶片上的参考标记的位置,从而测量投影仪设备特有的投影失真。 作为下一步骤,通过使用具有与投影仪相反的失真的测量的投影失真来产生用于形成集成电路图案的投影掩模,以抵消其投影失真。 标记安装在投影仪设备中,并且将辐射线照射到掩模上,从而将集成电路图案投影到第一半导体晶片上。
    • 4. 发明授权
    • Deflection device for use in color television receiver
    • 用于彩色电视接收机的偏转装置
    • US4034324A
    • 1977-07-05
    • US613957
    • 1975-09-16
    • Shunichi SanoYouji Ogawa
    • Shunichi SanoYouji Ogawa
    • H01J29/76H01J29/70H01F1/00
    • H01J29/705H01J2229/5637
    • A deflection device for use in a color television receiver comprises a deflection yoke fitted to a neck portion of the color television receiver having three horizontally arranged electron guns so designed as to emit three electron beams, for deflecting horizontally and vertically said three electron beams emitted onto a fluorescent screen from the electron guns of the color television receiver, and soft magnetic material pieces fitted to an end portion of the deflection yoke nearer to the screen, for locally varying the distribution of a deflection field generated by the yoke so as to correct mis-convergence of said three electron beams occurring at the peripheral portion of the screen.
    • 用于彩色电视接收机的偏转装置包括安装在彩色电视接收机的颈部的偏转线圈,其具有三个水平布置的电子枪,被设计成发射三个电子束,用于水平和垂直偏转所发射的三个电子束 来自彩色电视接收机的电子枪的荧光屏和安装在更接近屏幕的偏转线圈的端部的软磁性材料片,用于局部地改变由磁轭产生的偏转磁场的分布,从而校正误差 在屏幕的周边部分发生的所述三个电子束的会聚。
    • 9. 发明授权
    • Electron beam type pattern transfer apparatus
    • 电子束式图案转印装置
    • US4366383A
    • 1982-12-28
    • US165618
    • 1980-07-03
    • Shunichi SanoToshiaki ShinozakiIchiro Mori
    • Shunichi SanoToshiaki ShinozakiIchiro Mori
    • H01L21/027H01J37/317H01L21/30A61K27/02G01N21/64
    • H01J37/3175B82Y10/00B82Y40/00H01L21/30H01J2237/04735H01J2237/04922H01J2237/142H01J2237/31779Y10S505/879
    • An electron beam type pattern transfer apparatus has a photoelectric mask and a sample in a vacuum container made of non-magnetic material. The photoelectric mask is adapted to receive an ultraviolet ray from a light source and emit photoelectrons corresponding to a predetermined transfer pattern and the sample is disposed in parallel with the photoelectric mask with a predetermined distance left therebetween and illuminated with the photoelectrons to form a resist image thereon which corresponds to the transfer pattern. A power source for applying a voltage for accelerating the photoelectrons emitted is connected between the photoelectric mask and the sample. A pair of focusing magnets are disposed around the axis of the vacuum container such that they are located one at one outer side and one in an opposite outer side of the vacuum container to permit a vertical magnetic field to be created between the photoelectric mask and the sample. The focusing magnets have superconductive coils and are driven in a persistent mode.
    • 电子束型图案转印装置在由非磁性材料制成的真空容器中具有光电掩模和样品。 光电掩模适于从光源接收紫外线并发射对应于预定转印图案的光电子,并且将样品与光电掩模平行放置并保持在预定距离处并用光电子照射以形成抗蚀剂图像 对应于转印图案。 用于施加用于加速发射的光电子的电压的电源连接在光电掩模和样品之间。 一对聚焦磁铁设置在真空容器的轴线周围,使得它们位于真空容器的一个外侧和一个在相对的外侧中,从而允许在光电面罩和 样品。 聚焦磁体具有超导线圈并以持续模式驱动。