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1. 发明授权

US08213024B2 Method and system for aerial imaging of a reticle 有权
标题翻译：光罩的空中成像方法和系统
公开(公告)号：US08213024B2
公开(公告)日：2012-07-03
申请号：US11831100
申请日：2007-07-31
申请人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv , Chaim Braude
发明人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv , Chaim Braude
IPC分类号： G01B11/14 , G01N21/21
CPC分类号： G01N21/956 , G01N21/21 , G01N2021/95676 , G03F7/7065 , G03F7/70666
摘要： A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.
摘要翻译：一种用于掩模版评估的系统，方法和计算机可读介质，所述方法包括：（i）在成像过程期间获得在不同极化和任选干涉条件下的掩模版的多个图像; 以及（ii）响应于（i）所述多个图像和（ii）所述成像处理和曝光处理之间的差异而产生输出空间图像; 其中在曝光过程中，将掩模版的图像投影到晶片上。

2. 发明申请

US20080074659A1 METHOD AND SYSTEM FOR DEFECT DETECTION 有权
标题翻译：缺陷检测方法与系统
公开(公告)号：US20080074659A1
公开(公告)日：2008-03-27
申请号：US11831100
申请日：2007-07-31
申请人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv
发明人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/21 , G01N2021/95676 , G03F7/7065 , G03F7/70666
摘要： A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.
摘要翻译：一种用于掩模版评估的系统，方法和计算机可读介质，所述方法包括：（i）在成像过程期间获得在不同极化和任选干涉条件下的掩模版的多个图像; 以及（ii）响应于（i）所述多个图像和（ii）所述成像处理和曝光处理之间的差异而产生输出空间图像; 其中在曝光过程中，将掩模版的图像投影到晶片上。

3. 发明授权

US09244290B2 Method and system for coherence reduction 有权
标题翻译：一致性降低的方法和系统
公开(公告)号：US09244290B2
公开(公告)日：2016-01-26
申请号：US13978102
申请日：2011-01-06
申请人： Roman Vander , Shmuel Mangan , Boris Goldberg , Amir Moshe Sagiv
发明人： Roman Vander , Shmuel Mangan , Boris Goldberg , Amir Moshe Sagiv
IPC分类号： G02B26/00 , G02B27/48 , G03F7/20 , G03F1/84
CPC分类号： G02B27/48 , G03F1/84 , G03F7/20
摘要： An optical system having coherence reduction capabilities includes a light source for generating a first light pulse; an asymmetrical pulse stretcher arranged to receive the first light pulse and to generate multiple light pulses, during a pulse sequence generation period, wherein the asymmetrical pulse stretcher includes multiple optical components which define a loop and a condenser lens is located between the asymmetrical pulse stretcher and an object, for directing the multiple pulses toward an area on the object At least two optical components of the multiple optical components are positioned in an almost symmetrical manner in relation to each other and introduce a coherence-related difference between at least two pulses of the multiple pulses. The pulse sequence generation period does not exceed a response period of a detector.
摘要翻译：具有相干降低功能的光学系统包括用于产生第一光脉冲的光源; 布置成在脉冲序列生成周期期间接收第一光脉冲并产生多个光脉冲的不对称脉冲展开器，其中非对称脉冲展宽器包括限定环的多个光学部件，聚光透镜位于非对称脉冲展宽器和用于将多个脉冲引导到物体上的区域的物体。多个光学部件的至少两个光学部件相对于彼此以几乎对称的方式定位，并且在至少两个脉冲之间引入相干相关的差异多个脉冲。脉冲序列生成周期不超过检测器的响应周期。

4. 发明申请

US20140036942A1 METHOD AND SYSTEM FOR COHERENCE REDUCTION 有权
标题翻译：减少相关性的方法和系统
公开(公告)号：US20140036942A1
公开(公告)日：2014-02-06
申请号：US13978102
申请日：2011-01-06
申请人： Roman Vander , Shmuel Mangan , Boris Goldberg , Amir Moshe Sagiv
发明人： Roman Vander , Shmuel Mangan , Boris Goldberg , Amir Moshe Sagiv
IPC分类号： G02B27/48
CPC分类号： G02B27/48 , G03F1/84 , G03F7/20
摘要： An optical system having coherence reduction capabilities includes a light source for generating a first light pulse; an asymmetrical pulse stretcher arranged to receive the first light pulse and to generate multiple light pulses, during a pulse sequence generation period, wherein the asymmetrical pulse stretcher includes multiple optical components which define a loop and a condenser lens is located between the asymmetrical pulse stretcher and an object, for directing the multiple pulses toward an area on the object At least two optical components of the multiple optical components are positioned in an almost symmetrical manner in relation to each other and introduce a coherence-related difference between at least two pulses of the multiple pulses. The pulse sequence generation period does not exceed a response period of a detector.
摘要翻译：具有相干降低功能的光学系统包括用于产生第一光脉冲的光源; 布置成在脉冲序列生成周期期间接收第一光脉冲并产生多个光脉冲的不对称脉冲展开器，其中非对称脉冲展宽器包括限定环的多个光学部件，聚光透镜位于非对称脉冲展宽器和用于将多个脉冲引导到物体上的区域的物体。多个光学部件的至少两个光学部件相对于彼此以几乎对称的方式定位，并且在至少两个脉冲之间引入相干相关的差异多个脉冲。脉冲序列生成周期不超过检测器的响应周期。

5. 发明授权

US07053999B2 Method and system for detecting defects 有权
公开(公告)号：US07053999B2
公开(公告)日：2006-05-30
申请号：US10105740
申请日：2002-03-21
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501
摘要： System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.

6. 发明授权

US06943898B2 Apparatus and method for dual spot inspection of repetitive patterns 有权
标题翻译：重复模式双点检测的装置和方法
公开(公告)号：US06943898B2
公开(公告)日：2005-09-13
申请号：US10353754
申请日：2003-01-28
申请人： Alexander Libinson , Haim Feldman , Daniel Some , Boris Goldberg
发明人： Alexander Libinson , Haim Feldman , Daniel Some , Boris Goldberg
IPC分类号： G01N15/14 , G01N21/956 , G02B21/14 , G01B9/02
CPC分类号： G02B21/14 , G01N21/95607
摘要： Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.
摘要翻译：用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点一起在表面。第一和第二点之间的距离响应于样品的重复图案的间距。收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。检测器检测干涉图案的变化。

7. 发明授权

US06853446B1 Variable angle illumination wafer inspection system 有权
标题翻译：可变角度照明晶圆检查系统
公开(公告)号：US06853446B1
公开(公告)日：2005-02-08
申请号：US09641137
申请日：2000-08-16
申请人： Gilad Almogy , Hadar Mazaki , Zvi Howard Phillip , Silviu Reinhorn , Boris Goldberg , Daniel I. Some
发明人： Gilad Almogy , Hadar Mazaki , Zvi Howard Phillip , Silviu Reinhorn , Boris Goldberg , Daniel I. Some
IPC分类号： G01N21/21 , G01N21/95 , G02B21/08 , G02B26/10 , G01N21/00
CPC分类号： G02B26/10 , G01N21/21 , G01N21/9501 , G02B21/082
摘要： A variable illumination angle inspection system is provided, including a light source providing a light beam and a scanner imparting scanning deflection to the light beam to provide a scanning beam approaching a substrate at a first angle. A deflection element is selectively insertable into an optical path of the scanning beam to deflect the scanning beam so as to cause the scanning beam to approach the substrate at a second angle.
摘要翻译：提供了可变照明角度检查系统，包括提供光束的光源和向光束施加扫描偏转的扫描器，以提供以第一角度接近基板的扫描光束。偏转元件可选择性地插入到扫描光束的光路中以偏转扫描光束，以使扫描光束以第二角度接近基板。

8. 发明申请

US20210203803A1 METHODS AND SYSTEMS FOR TAGGED-SIGNAL VERIFICATION 有权
公开(公告)号：US20210203803A1
公开(公告)日：2021-07-01
申请号：US16731221
申请日：2019-12-31
申请人： Boris Goldberg , Vittaly Tavor
发明人： Boris Goldberg , Vittaly Tavor
IPC分类号： H04N1/32 , H04L9/32 , H04L9/08
摘要： The present invention discloses methods and systems for tagged-signal verification. Methods include: upon obtaining original content, generating identity and semantic signatures; superposing the identity signature on the content as an in-band digital watermark; utilizing the semantic signature by: superposing on the content or storing; transmitting a tagged signal combining watermark and content; upon receiving the tagged signal with a verification request, extracting transmitted content; extracting the watermark to retrieve a transmitted identity signature; determining the transmitted identity signature is valid by comparing to the original; obtaining the original semantic signature either by: extracting from the watermark, or retrieving a stored version; generating a transmitted semantic signature; verifying the transmitted semantic signature is identical to the original; determining the transmitted content is tamper-free and identical to the original, or has been manipulated; and transmitting a confirmation notification vouching for the authenticity as a genuine version, or designating as a tampered version.

9. 发明申请

US20050200839A1 Method and system for detecting defects 有权
公开(公告)号：US20050200839A1
公开(公告)日：2005-09-15
申请号：US11066879
申请日：2005-02-25
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/95 , G01N21/956 , G02B21/00 , G02B27/58 , G03F7/20 , H01L21/00 , G01N21/00 , G01B11/00
CPC分类号： G03F7/7065 , G01N21/9501 , G01N21/95623 , G02B21/0016 , G02B21/002 , G02B27/58 , H01L21/67288
摘要： System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.

10. 发明授权

US06882417B2 Method and system for detecting defects 有权
标题翻译：检测缺陷的方法和系统
公开(公告)号：US06882417B2
公开(公告)日：2005-04-19
申请号：US10105530
申请日：2002-03-21
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/95 , G01N21/956 , G02B21/00 , G02B27/58 , G03F7/20 , H01L21/00 , G01N21/88
CPC分类号： G03F7/7065 , G01N21/9501 , G01N21/95623 , G02B21/0016 , G02B21/002 , G02B27/58 , H01L21/67288
摘要： System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.
摘要翻译：用于扫描表面的系统，包括产生照明光束的光源; 位于光源和表面之间的物镜组件; 至少一个光检测器; 位于光源和物镜组件之间的遮光器; 以及位于所述脱模器和所述物镜组件之间的中继透镜组件，其中所述光源在所述脱模器上产生所述照明光束的图像，所述遮蔽器阻挡所述照明光束的至少一部分，所述中继透镜组件将所述中继透镜组件在所述物镜组件的入射光瞳处阻挡照明光束，并且其中所述至少一个光检测器中的至少一个检测从所述表面反射的光。

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