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1. 发明授权

US06853446B1 Variable angle illumination wafer inspection system 有权
标题翻译：可变角度照明晶圆检查系统
公开(公告)号：US06853446B1
公开(公告)日：2005-02-08
申请号：US09641137
申请日：2000-08-16
申请人： Gilad Almogy , Hadar Mazaki , Zvi Howard Phillip , Silviu Reinhorn , Boris Goldberg , Daniel I. Some
发明人： Gilad Almogy , Hadar Mazaki , Zvi Howard Phillip , Silviu Reinhorn , Boris Goldberg , Daniel I. Some
IPC分类号： G01N21/21 , G01N21/95 , G02B21/08 , G02B26/10 , G01N21/00
CPC分类号： G02B26/10 , G01N21/21 , G01N21/9501 , G02B21/082
摘要： A variable illumination angle inspection system is provided, including a light source providing a light beam and a scanner imparting scanning deflection to the light beam to provide a scanning beam approaching a substrate at a first angle. A deflection element is selectively insertable into an optical path of the scanning beam to deflect the scanning beam so as to cause the scanning beam to approach the substrate at a second angle.
摘要翻译：提供了可变照明角度检查系统，包括提供光束的光源和向光束施加扫描偏转的扫描器，以提供以第一角度接近基板的扫描光束。偏转元件可选择性地插入到扫描光束的光路中以偏转扫描光束，以使扫描光束以第二角度接近基板。

2. 发明授权

US06788445B2 Multi-beam polygon scanning system 失效
标题翻译：多波束多边形扫描系统
公开(公告)号：US06788445B2
公开(公告)日：2004-09-07
申请号：US10043274
申请日：2002-01-14
申请人： Boris Goldberg , Silviu Reinhorn
发明人： Boris Goldberg , Silviu Reinhorn
IPC分类号： G02B2608
CPC分类号： B41J2/473 , G01R31/305 , G02B26/123
摘要： A polygon scanning system and method is provided wherein two or more light beams impinge at different incident angles on a polygon facet and are sequentially used for scanning the surface of a substrate as the polygon is rotated. Embodiments include a system comprising a polygon having a reflective facet, a rotation mechanism for rotating the polygon, and a light source for directing a plurality of light beams to impinge on the facet such that each light beam impinges on the facet at a different incident angle. Each light beam is reflected by the facet to scan a particular portion of a surface of a substrate during a respective time interval when the rotation mechanism is rotating the polygon. Each of the plurality of light beams is reflected onto the substrate surface using a respective portion of the facet surface, such that the sum of the respective portions of the facet surface used to reflect the light beams is a very large percentage of the total surface area. Thus, the system has a duty cycle of close to 100 percent as well as a high data rate.
摘要翻译：提供了一种多边形扫描系统和方法，其中两个或更多个光束以不同的入射角度照射在多边形面上，并且随着多边形的旋转而顺序地用于扫描基板的表面。实施例包括包括具有反射小面的多边形，用于旋转多边形的旋转机构的系统和用于引导多个光束撞击小面的光源的系统，使得每个光束以不同的入射角度撞击小面。当旋转机构旋转多边形时，在相应的时间间隔期间，每个光束被小面反射以扫描基板表面的特定部分。多个光束中的每一个使用小面表面的相应部分反射到基板表面上，使得用于反射光束的小面的相应部分的总和是总表面积的非常大的百分比。因此，该系统具有接近100％的占空比以及高数据速率。

3. 发明授权

US06657714B2 Defect detection with enhanced dynamic range 有权
标题翻译：缺陷检测具有增强的动态范围
公开(公告)号：US06657714B2
公开(公告)日：2003-12-02
申请号：US10050889
申请日：2002-01-15
申请人： Gilad Almogy , Boris Goldberg , Ron Naftali
发明人： Gilad Almogy , Boris Goldberg , Ron Naftali
IPC分类号： G01N2100
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.
摘要翻译：用于光学检查的装置包括光辐射源，其适于扫描样品上的辐射点，由此辐射从该点散射。检测系统包括至少第一和第二检测器，其被光学耦合以接收散射的辐射并且响应于此产生相应的第一和第二输出，所述检测系统被配置为使得第一检测器以更高的灵敏度检测散射辐射的变化，第二检测器，而第二检测器以比第一检测器更高的散射辐射强度饱和。信号处理器被耦合以接收第一和第二输出并且响应于输出来确定样本上缺陷的位置。

4. 发明授权

US06914670B1 Defect detection with enhanced dynamic range 失效
标题翻译：缺陷检测具有增强的动态范围
公开(公告)号：US06914670B1
公开(公告)日：2005-07-05
申请号：US10666711
申请日：2003-09-18
申请人： Gilad Almogy , Boris Goldberg , Ron Naftali
发明人： Gilad Almogy , Boris Goldberg , Ron Naftali
IPC分类号： G01N21/956 , G01N21/95 , H01L21/66 , G01J1/04
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.
摘要翻译：用于光学检查的装置包括光辐射源，其适于扫描样品上的辐射点，由此辐射从该点散射。检测系统包括至少第一和第二检测器，其被光学耦合以接收散射的辐射并且响应于此产生相应的第一和第二输出，所述检测系统被配置为使得第一检测器以更高的灵敏度检测散射辐射的变化，第二检测器，而第二检测器以比第一检测器更高的散射辐射强度饱和。信号处理器被耦合以接收第一和第二输出并且响应于输出来确定样本上缺陷的位置。

5. 发明授权

US06366352B1 Optical inspection method and apparatus utilizing a variable angle design 有权
标题翻译：利用可变角度设计的光学检测方法和装置
公开(公告)号：US06366352B1
公开(公告)日：2002-04-02
申请号：US09330249
申请日：1999-06-10
申请人： Boris Goldberg , Amir Komem , Ron Naftali , Gilad Almogy
发明人： Boris Goldberg , Amir Komem , Ron Naftali , Gilad Almogy
IPC分类号： G01N2100
CPC分类号： G01N21/94
摘要： Method and apparatus for optical inspection of an article are presented. The apparatus comprises an illumination unit and at least one detection unit. The illumination unit generates an incident beam and directs it onto a predetermined region of the article. The detection unit includes a light collection system and a detector. The light collection system collects light scattered from the illuminated region with a predetermined constant maximum collection angle, and utilizes a variable angle design for selectively selecting from collected light at least one light component propagating with a solid angle segment of the maximum collection angle, and directing it to the detector.
摘要翻译：介绍了用于光学检查制品的方法和装置。该装置包括照明单元和至少一个检测单元。照明单元产生入射光束并将其引导到物品的预定区域上。检测单元包括光收集系统和检测器。光采集系统以预定的恒定最大收集角度收集从照明区域散射的光，并且利用可变角度设计来选择性地从收集的光中选择以最大收集角度的立体角段传播的至少一个光分量，并且引导它到检测器。

6. 发明授权

US07053999B2 Method and system for detecting defects 有权
公开(公告)号：US07053999B2
公开(公告)日：2006-05-30
申请号：US10105740
申请日：2002-03-21
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501
摘要： System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.

7. 发明授权

US06943898B2 Apparatus and method for dual spot inspection of repetitive patterns 有权
标题翻译：重复模式双点检测的装置和方法
公开(公告)号：US06943898B2
公开(公告)日：2005-09-13
申请号：US10353754
申请日：2003-01-28
申请人： Alexander Libinson , Haim Feldman , Daniel Some , Boris Goldberg
发明人： Alexander Libinson , Haim Feldman , Daniel Some , Boris Goldberg
IPC分类号： G01N15/14 , G01N21/956 , G02B21/14 , G01B9/02
CPC分类号： G02B21/14 , G01N21/95607
摘要： Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.
摘要翻译：用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点一起在表面。第一和第二点之间的距离响应于样品的重复图案的间距。收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。检测器检测干涉图案的变化。

8. 发明申请

US20210203803A1 METHODS AND SYSTEMS FOR TAGGED-SIGNAL VERIFICATION 有权
公开(公告)号：US20210203803A1
公开(公告)日：2021-07-01
申请号：US16731221
申请日：2019-12-31
申请人： Boris Goldberg , Vittaly Tavor
发明人： Boris Goldberg , Vittaly Tavor
IPC分类号： H04N1/32 , H04L9/32 , H04L9/08
摘要： The present invention discloses methods and systems for tagged-signal verification. Methods include: upon obtaining original content, generating identity and semantic signatures; superposing the identity signature on the content as an in-band digital watermark; utilizing the semantic signature by: superposing on the content or storing; transmitting a tagged signal combining watermark and content; upon receiving the tagged signal with a verification request, extracting transmitted content; extracting the watermark to retrieve a transmitted identity signature; determining the transmitted identity signature is valid by comparing to the original; obtaining the original semantic signature either by: extracting from the watermark, or retrieving a stored version; generating a transmitted semantic signature; verifying the transmitted semantic signature is identical to the original; determining the transmitted content is tamper-free and identical to the original, or has been manipulated; and transmitting a confirmation notification vouching for the authenticity as a genuine version, or designating as a tampered version.

9. 发明申请

US20080074659A1 METHOD AND SYSTEM FOR DEFECT DETECTION 有权
标题翻译：缺陷检测方法与系统
公开(公告)号：US20080074659A1
公开(公告)日：2008-03-27
申请号：US11831100
申请日：2007-07-31
申请人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv
发明人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/21 , G01N2021/95676 , G03F7/7065 , G03F7/70666
摘要： A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.
摘要翻译：一种用于掩模版评估的系统，方法和计算机可读介质，所述方法包括：（i）在成像过程期间获得在不同极化和任选干涉条件下的掩模版的多个图像; 以及（ii）响应于（i）所述多个图像和（ii）所述成像处理和曝光处理之间的差异而产生输出空间图像; 其中在曝光过程中，将掩模版的图像投影到晶片上。

10. 发明申请

US20050200839A1 Method and system for detecting defects 有权
公开(公告)号：US20050200839A1
公开(公告)日：2005-09-15
申请号：US11066879
申请日：2005-02-25
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/95 , G01N21/956 , G02B21/00 , G02B27/58 , G03F7/20 , H01L21/00 , G01N21/00 , G01B11/00
CPC分类号： G03F7/7065 , G01N21/9501 , G01N21/95623 , G02B21/0016 , G02B21/002 , G02B27/58 , H01L21/67288
摘要： System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.

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