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1. 发明授权

US08213024B2 Method and system for aerial imaging of a reticle 有权
标题翻译：光罩的空中成像方法和系统
公开(公告)号：US08213024B2
公开(公告)日：2012-07-03
申请号：US11831100
申请日：2007-07-31
申请人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv , Chaim Braude
发明人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv , Chaim Braude
IPC分类号： G01B11/14 , G01N21/21
CPC分类号： G01N21/956 , G01N21/21 , G01N2021/95676 , G03F7/7065 , G03F7/70666
摘要： A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.
摘要翻译：一种用于掩模版评估的系统，方法和计算机可读介质，所述方法包括：（i）在成像过程期间获得在不同极化和任选干涉条件下的掩模版的多个图像; 以及（ii）响应于（i）所述多个图像和（ii）所述成像处理和曝光处理之间的差异而产生输出空间图像; 其中在曝光过程中，将掩模版的图像投影到晶片上。

2. 发明申请

US20080074659A1 METHOD AND SYSTEM FOR DEFECT DETECTION 有权
标题翻译：缺陷检测方法与系统
公开(公告)号：US20080074659A1
公开(公告)日：2008-03-27
申请号：US11831100
申请日：2007-07-31
申请人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv
发明人： Shmuel Mangan , Boris Goldberg , Ishai Schwarzband , On Haran , Michael Ben-Yishay , Amir Sagiv
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/21 , G01N2021/95676 , G03F7/7065 , G03F7/70666
摘要： A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.
摘要翻译：一种用于掩模版评估的系统，方法和计算机可读介质，所述方法包括：（i）在成像过程期间获得在不同极化和任选干涉条件下的掩模版的多个图像; 以及（ii）响应于（i）所述多个图像和（ii）所述成像处理和曝光处理之间的差异而产生输出空间图像; 其中在曝光过程中，将掩模版的图像投影到晶片上。

3. 发明申请

US20080075355A1 Method and system for defect detection 有权
标题翻译：缺陷检测方法和系统
公开(公告)号：US20080075355A1
公开(公告)日：2008-03-27
申请号：US11831675
申请日：2007-07-31
申请人： Michael Ben-Yishay , Ophir Gvirtzer
发明人： Michael Ben-Yishay , Ophir Gvirtzer
IPC分类号： G06K9/00
CPC分类号： G06K9/6211
摘要： A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.
摘要翻译：一种用于缺陷检测的系统，方法和计算机程序产品，所述方法包括：（i）检索对应于所述对象的第一图像的测试像素的第二图像的第二像素; 其中使用不同的采集方法获得第一和第二图像; （ii）搜索所述第二图像的第三像素，使得所述第二像素的邻域类似于所述第三像素的邻域; （iii）检索对应于第三像素的第一图像的第四像素; 和（iv）比较测试像素和第四像素。

4. 发明申请

US20110255774A1 METHOD AND SYSTEM FOR DEFECT DETECTION 有权
标题翻译：缺陷检测方法与系统
公开(公告)号：US20110255774A1
公开(公告)日：2011-10-20
申请号：US13170037
申请日：2011-06-27
申请人： Michael Ben-Yishay , Ophir Gvirtzer
发明人： Michael Ben-Yishay , Ophir Gvirtzer
IPC分类号： G06K9/00
CPC分类号： G06K9/6211
摘要： A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.
摘要翻译：一种用于缺陷检测的系统，方法和计算机程序产品，所述方法包括：（i）检索对应于所述对象的第一图像的测试像素的第二图像的第二像素; 其中使用不同的采集方法获得第一和第二图像; （ii）搜索所述第二图像的第三像素，使得所述第二像素的邻域类似于所述第三像素的邻域; （iii）检索对应于第三像素的第一图像的第四像素; 和（iv）比较测试像素和第四像素。

5. 发明授权

US08238647B2 Method and system for defect detection 有权
标题翻译：缺陷检测方法和系统
公开(公告)号：US08238647B2
公开(公告)日：2012-08-07
申请号：US13170037
申请日：2011-06-27
申请人： Michael Ben-Yishay , Ophir Gvirtzer
发明人： Michael Ben-Yishay , Ophir Gvirtzer
IPC分类号： G06K9/56 , G06K9/40
CPC分类号： G06K9/6211
摘要： A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.
摘要翻译：一种用于缺陷检测的系统，方法和计算机程序产品，所述方法包括：（i）检索对应于所述对象的第一图像的测试像素的第二图像的第二像素; 其中使用不同的采集方法获得第一和第二图像; （ii）搜索所述第二图像的第三像素，使得所述第二像素的邻域类似于所述第三像素的邻域; （iii）检索与所述第三像素相对应的所述第一图像的第四像素; 和（iv）比较测试像素和第四像素。

6. 发明授权

US07970201B2 Method and system for defect detection 有权
标题翻译：缺陷检测方法和系统
公开(公告)号：US07970201B2
公开(公告)日：2011-06-28
申请号：US11831675
申请日：2007-07-31
申请人： Michael Ben-Yishay , Ophir Gvirtzer
发明人： Michael Ben-Yishay , Ophir Gvirtzer
IPC分类号： G06K9/56 , G06K9/40
CPC分类号： G06K9/6211
摘要： A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.
摘要翻译：一种用于缺陷检测的系统，方法和计算机程序产品，所述方法包括：（i）检索对应于所述对象的第一图像的测试像素的第二图像的第二像素; 其中使用不同的采集方法获得第一和第二图像; （ii）搜索所述第二图像的第三像素，使得所述第二像素的邻域类似于所述第三像素的邻域; （iii）检索对应于第三像素的第一图像的第四像素; 和（iv）比较测试像素和第四像素。

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