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1. 发明授权

US08228601B2 Scanning microscopy using inhomogeneous polarization 有权
标题翻译：扫描显微镜使用不均匀的极化
公开(公告)号：US08228601B2
公开(公告)日：2012-07-24
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

2. 发明授权

US07714999B2 High resolution wafer inspection system 有权
标题翻译：高分辨率晶圆检测系统
公开(公告)号：US07714999B2
公开(公告)日：2010-05-11
申请号：US11952010
申请日：2007-12-06
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/00
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料。

3. 发明授权

US07576348B2 One-dimensional phase contrast microscopy with a traveling lens generated by a step function change 有权
标题翻译：一维相位显微镜与通过阶跃函数变化产生的行走镜
公开(公告)号：US07576348B2
公开(公告)日：2009-08-18
申请号：US11853329
申请日：2007-09-11
申请人： Haim Feldman , Doron Meshulach , Eyal Angel
发明人： Haim Feldman , Doron Meshulach , Eyal Angel
IPC分类号： G01N21/88
CPC分类号： G01D5/38
摘要： A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.
摘要翻译：一种用于对表面进行成像的方法包括在声光材料中生成行进透镜并将行进掩模结合到移动透镜的一部分中以产生复合行进透镜。该方法还包括照射复合移动透镜，以便产生具有横跨复合聚焦光束的空间变化的复合聚焦光束。复合聚焦光束被引导到表面的一个区域上，以便从该区域产生该区域的辐射特性。辐射被成像到检测器上，以响应于空间变化产生该区域的信号特征。

4. 发明授权

US07002695B2 Dual-spot phase-sensitive detection 有权
公开(公告)号：US07002695B2
公开(公告)日：2006-02-21
申请号：US10141632
申请日：2002-05-07
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G01B9/02
CPC分类号： G01N21/95607 , G02B21/14 , H01L22/00
摘要： Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate a pattern of interference fringes. A detector detects a change in the pattern of the interference fringes as the spots are scanned over the surface.

5. 发明授权

US06930770B2 High throughput inspection system and method for generating transmitted and/or reflected images 有权
标题翻译：高通量检测系统和用于产生透射和/或反射图像的方法
公开(公告)号：US06930770B2
公开(公告)日：2005-08-16
申请号：US10215972
申请日：2002-08-08
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88 , G01N21/956
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

6. 发明授权

US06794625B2 Dynamic automatic focusing method and apparatus using interference patterns 失效
标题翻译：动态自动聚焦方法和装置采用干涉图案
公开(公告)号：US06794625B2
公开(公告)日：2004-09-21
申请号：US09855253
申请日：2001-05-15
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G02B2740
CPC分类号： G03F7/70616 , G02B21/241 , G03F9/7026 , G11B7/0908 , G11B7/0917
摘要： Method and apparatus to enable detection of a position of an article, and thereby enable maintenance of a desired position thereof. The apparatus includes an illumination unit, focusing optics and a focus detection unit, the focusing optics serving to direct incident light toward the article and directing light returned from an illuminated elongated region on the article toward the focus detection unit. The focus detection unit includes an optical system that collects the returned light passed through the focusing optics and creates at least two images in the form of at least two interference patterns, respectively, on the sensing surface of a detector. The first interference pattern is created by interference of light components of the collected light that propagated within a first periphery region of an optical axis of the focusing optics and light components of the collected light that propagated within a paraxial region of the optical axis. The second interference pattern is created by interference between light components of the collected light that propagated with a second periphery region of the optical axis, symmetrical to the first periphery region with respect to the optical axis. and light components of the collected light that propagated within the paraxial region. Data indicative of a relation between intensity profiles in the two interference patterns is utilized to determine the location of the article relative to the focal plane.
摘要翻译：能够检测制品位置的方法和装置，从而能够维持其所需的位置。该装置包括照明单元，聚焦光学元件和焦点检测单元，聚焦光学器件用于将入射光引向物品并将从物体上的照明细长区域返回的光导向焦点检测单元。焦点检测单元包括光学系统，其收集通过聚焦光学器件的返回光，并且分别在检测器的感测表面上产生至少两个干涉图案形式的至少两个图像。第一干涉图案是通过在聚焦光学器件的光轴的第一周边区域内传播的收集的光的光分量的干涉和在光轴的近轴区域内传播的所收集的光的光分量的干涉而产生的。第二干涉图案是通过与光轴的第二周边区域相对于光轴对称的与第一周边区域对称的收集的光的光分量之间的干涉而产生的。以及在近轴区域内传播的收集的光的光分量。利用表示两个干涉图案中的强度分布之间的关系的数据来确定物品相对于焦平面的位置。

7. 发明申请

US20120086937A1 INSPECTION SYSTEM AND METHOD FOR FAST CHANGES OF FOCUS 有权
标题翻译：检验系统和方法快速变化
公开(公告)号：US20120086937A1
公开(公告)日：2012-04-12
申请号：US13224096
申请日：2011-09-01
申请人： Haim Feldman , Boris Morgenstein , Roman Naidis , Adam Baer
发明人： Haim Feldman , Boris Morgenstein , Roman Naidis , Adam Baer
IPC分类号： G01N21/88 , G02F1/33 , G02F1/29
CPC分类号： G02F1/29 , G01N21/8806 , G01N21/9501 , G02F1/11 , G02F2001/294
摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
摘要翻译：检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

8. 发明授权

US07924419B2 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US07924419B2
公开(公告)日：2011-04-12
申请号：US12626592
申请日：2009-11-25
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

9. 发明授权

US07518718B2 High throughput inspection system and a method for generating transmitted and/or reflected images 有权
标题翻译：高通量检测系统和用于产生透射和/或反射图像的方法
公开(公告)号：US07518718B2
公开(公告)日：2009-04-14
申请号：US11425101
申请日：2006-06-19
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

10. 发明申请

US20080231845A1 HIGH RESOLUTION WAFER INSPECTION SYSTEM 有权
标题翻译：高分辨率波浪检测系统
公开(公告)号：US20080231845A1
公开(公告)日：2008-09-25
申请号：US11952010
申请日：2007-12-06
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/95
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料

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