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    • 1. 发明授权
    • Gas supply method using a gas supply system
    • 供气方式采用供气系统
    • US07854962B2
    • 2010-12-21
    • US12320197
    • 2009-01-21
    • Shigeru KasaiSum TanakaTetsuya SaitoNorihiko YamamotoKenichi Yanagitani
    • Shigeru KasaiSum TanakaTetsuya SaitoNorihiko YamamotoKenichi Yanagitani
    • C23C16/448
    • H01L21/67017C23C16/4481Y10T137/0324
    • Disclosed herein is a processing system that can supply a material gas produced inside a material reservoir tank into a processing apparatus while generating almost no pressure loss. The processing system has a processing apparatus including a gas injection injector for injecting a specific material gas into a processing vessel in order to provide specific processing to an object to be processed W, the material gas being produced from a metallic compound material M with low vapor pressure; and a gas supply system for supplying the specific material gas to the gas injector, the gas injector is a shower head portion and the gas supply system provides: a gas passage extending upwardly from the showerhead portion; a material reservoir tank attached to the upper-end portion of the gas passage for containing the metallic compound material therein; and an open/close valve for opening/closing the gas passage.
    • 这里公开了一种处理系统,其能够在几乎不产生压力损失的同时将材料储存罐内产生的材料气体提供到处理装置中。 处理系统具有处理装置,该处理装置包括用于将特定材料气体注入到处理容器中的气体注入喷射器,以便对被加工物W进行特定处理,所述原料气体由低蒸气的金属化合物M 压力; 以及用于将特定材料气体供给到气体喷射器的气体供给系统,气体喷射器是淋浴头部分,气体供应系统提供:从喷头部分向上延伸的气体通道; 附着在气体通道的上端部分的材料储存罐,用于在其中容纳金属化合物材料; 以及用于打开/关闭气体通道的打开/关闭阀。
    • 2. 发明申请
    • Gas supply system and proessing system
    • 供气系统和进气系统
    • US20090133755A1
    • 2009-05-28
    • US12320197
    • 2009-01-21
    • Shigeru KasaiSum TanakaTetsuya SaitoNorihiko YamamotoKenichi Yanagitani
    • Shigeru KasaiSum TanakaTetsuya SaitoNorihiko YamamotoKenichi Yanagitani
    • C23C16/448G05D7/06
    • H01L21/67017C23C16/4481Y10T137/0324
    • A processing system that can supply a material gas produced inside a material reservoir tank into a processing apparatus while generating almost no pressure loss is provided.In a processing system comprising: a processing apparatus including a gas injection means 42 for injecting a specific material gas into a processing vessel 26 in order to provide specific processing to an object to be processed W, said material gas being produced from a metallic compound material M with low vapor pressure; and a gas supply system 24 for supplying said specific material gas to said gas injection means, said gas injection means is a shower head portion and said gas supply system provides: a gas passage 56 extending upwardly from said showerhead portion; a material reservoir tank 58 attached to the upper-end portion of said gas passage for containing said metallic compound material therein; and an open/close valve 60 for opening/closing said gas passage.
    • 提供了一种处理系统,其能够在几乎不产生压力损失的同时将材料储存罐内产生的原料气体提供到处理设备中。 一种处理系统,包括:处理装置,包括用于将特定材料气体注入处理容器26中的气体注入装置42,以便对被处理物体W进行特定处理,所述原料气体由金属化合物材料 M蒸汽压低; 以及用于向所述气体注入装置供应所述特定材料气体的气体供应系统24,所述气体注入装置是淋浴喷头部分,所述气体供应系统提供:从所述喷头部分向上延伸的气体通道56; 附着在所述气体通道的上端部分的材料储存罐58,用于在其中容纳所述金属化合物材料; 以及用于打开/关闭所述气体通道的打开/关闭阀60。
    • 3. 发明申请
    • Gas supply system and processing system
    • 供气系统及处理系统
    • US20070163713A1
    • 2007-07-19
    • US10525207
    • 2003-08-25
    • Shigeru KasaiSumi TanakaTetsuya SaitoNorihiko YamamotoKenichi Yanagitani
    • Shigeru KasaiSumi TanakaTetsuya SaitoNorihiko YamamotoKenichi Yanagitani
    • C23F1/00
    • H01L21/67017C23C16/4481Y10T137/0324
    • A processing system that can supply a material gas produced inside a material reservoir tank into a processing apparatus while generating almost no pressure loss is provided. In a processing system comprising: a processing apparatus including a gas injection means 42 for injecting a specific material gas into a processing vessel 26 in order to provide specific processing to an object to be processed W, said material gas being produced from a metallic compound material M with low vapor pressure; and a gas supply system 24 for supplying said specific material gas to said gas injection means, said gas injection means is a shower head portion and said gas supply system provides: a gas passage 56 extending upwardly from said showerhead portion; a material reservoir tank 58 attached to the upper-end portion of said gas passage for containing said metallic compound material therein; and an open/close valve 60 for opening/closing said gas passage.
    • 提供了一种处理系统,其能够在几乎不产生压力损失的同时将材料储存罐内产生的原料气体提供到处理设备中。 一种处理系统,包括:处理装置,包括用于将特定材料气体注入处理容器26中的气体注入装置42,以便对被处理物体W进行特定处理,所述原料气体由金属化合物材料 M蒸汽压低; 以及用于向所述气体注入装置供应所述特定材料气体的气体供应系统24,所述气体注入装置是淋浴喷头部分,所述气体供应系统提供:从所述喷头部分向上延伸的气体通道56; 附着在所述气体通道的上端部分的材料储存罐58,用于在其中容纳所述金属化合物材料; 以及用于打开/关闭所述气体通道的打开/关闭阀60。
    • 5. 发明申请
    • Vacuum processing apparatus
    • 真空加工设备
    • US20060160359A1
    • 2006-07-20
    • US10546803
    • 2004-02-12
    • Shigeru KasaiSusumu KatohTomohito KomatsuTetsuya SaitoSumi Tanaka
    • Shigeru KasaiSusumu KatohTomohito KomatsuTetsuya SaitoSumi Tanaka
    • H01L21/44C23C16/00
    • C23C16/45521C23C16/455
    • A vacuum processing apparatus is constituted of the following portions: a processing container with the bottom, capable of drawing vacuum; a placement platform installed in the container; a heating portion for heating a substrate on the platform; a processing gas-feeding portion for feeding a processing gas into the container; a partitioning portion surrounding a space between the platform and the bottom of the container and partitioning off the space from a processing space in the container; a purge gas-feeding portion for feeding a purge gas into the space surrounded by the partitioning portion; a purge gas-discharging portion for discharging the purge gas from the space surrounded by the partitioning portion; a control portion for controlling the purge gas-feeding portion and/or the purge gas-discharging portion so as to regulate the pressure in the space surrounded by the partitioning portion; and a temperature-detecting portion penetrating the bottom of the container, inserted in the space surrounded by the partitioning portion, and having the top end in contact with the platform. The partitioning portion has the lower end in surface-contact with the bottom of the container. The control portion regulates the pressure in the space surrounded by the partitioning portion to a pressure higher than that in the processing space in the container.
    • 真空处理装置由以下部分构成:具有底部的能够抽真空的处理容器; 安装在容器中的放置平台; 用于加热所述平台上的基板的加热部分; 处理气体供给部,用于将处理气体供给到所述容器中; 围绕所述平台和所述容器的底部之间的空间并将所述空间与所述容器中的处理空间分隔开的分隔部分; 净化气体供给部分,用于将净化气体供给到由分隔部分包围的空间中; 净化气体排出部,用于从由分隔部包围的空间排出净化气体; 用于控制净化气体供给部分和/或净化气体排出部分以便调节由分隔部分包围的空间中的压力的​​控制部分; 以及穿过容器底部的温度检测部分,插入由分隔部分包围的空间中,并且顶端与平台接触。 分隔部分的下端与容器的底部表面接触。 控制部将由分隔部包围的空间内的压力调整为高于容器内的处理空间的压力。
    • 8. 发明授权
    • Image reading and recording apparatus
    • 图像读取和记录装置
    • US07681984B2
    • 2010-03-23
    • US11831206
    • 2007-07-31
    • Tetsuya SaitoAtsushi Yokomizo
    • Tetsuya SaitoAtsushi Yokomizo
    • B41J23/00
    • H04N1/00543H04N1/00554H04N1/00562
    • A scanner unit is revolvable disposed to a recording unit. The recording unit and the scanner unit are coupled with each other with a damper unit including a holder, a rod, and a spring. The damper unit is disposed so that the operating direction of the spring switches in process of the opening and the closing of the scanner unit. A guiding surface capable of abutting on the projection disposed on the rod is provided in the recording unit. The projection abuts on the guiding surface before the operating direction of the spring switches in process of the movement of the scanner unit from its opened position to its closed position.
    • 扫描器单元可旋转地设置在记录单元上。 记录单元和扫描仪单元通过包括保持器,杆和弹簧的阻尼单元彼此联接。 阻尼器单元设置成使得在扫描器单元的打开和关闭的过程中弹簧的操作方向转换。 在记录单元中设置有能够抵靠设置在杆上的突起上的引导表面。 在扫描器单元从其打开位置移动到其关闭位置的过程中,在弹簧的操作方向切换之前,突起抵靠在引导表面上。
    • 9. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US07566124B2
    • 2009-07-28
    • US11127187
    • 2005-05-12
    • Shoichi KanTetsuya SaitoNoboru Shimoyama
    • Shoichi KanTetsuya SaitoNoboru Shimoyama
    • B41J2/01
    • B41J13/103B41J13/0045B41J13/106B65H3/06B65H5/06B65H5/38B65H2403/942B65H2801/12
    • An ink jet recording apparatus includes a sheet feeding tray, a sheet discharge tray, an image recording portion including an ink jet recording head and a platen, a first roller portion, disposed between the sheet feeding tray and the image recording portion, and a second roller portion, disposed at a position across the image recording portion from the first roller portion, for feeding the recording material, and a guide, positioned between the sheet feeding roller and the first roller portion, for separating the recording material fed from the sheet feeding tray and that to be fed to the sheet discharge tray. After the recording material fed from the sheet feeding tray passes between the ink jet recording head and the platen and is nipped by the second roller portion, recording is carried out when the recording material is fed in an opposite direction between the ink jet recording head and the platen.
    • 一种喷墨记录装置,包括供纸托盘,出纸托盘,包括喷墨记录头和台板的图像记录部分,设置在送纸盘和图像记录部分之间的第一辊部分, 辊部分,设置在从第一辊部分穿过图像记录部分的位置,用于馈送记录材料;以及引导件,位于片材进给辊和第一辊部分之间,用于分离从片材进给供给的记录材料 托盘,并被馈送到出纸托盘。 在从供纸托盘供给的记录材料通过喷墨记录头和压板之间并被第二辊部分夹持之后,当记录材料沿喷墨记录头和 压板。
    • 10. 发明授权
    • Liquid crystal driving circuit and load driving circuit
    • 液晶驱动电路和负载驱动电路
    • US07358951B2
    • 2008-04-15
    • US10895320
    • 2004-07-21
    • Tetsuya SaitoHironori MinamizakiTetsuro Itakura
    • Tetsuya SaitoHironori MinamizakiTetsuro Itakura
    • G09G3/36
    • G09G3/3696G09G3/2011G09G3/3688G09G2310/027G09G2330/021G09G2360/16
    • There is disclosed a liquid crystal driving circuit configured to supply an analog voltage in accordance with digital grayscale data to each of a plurality of signal lines, said circuit comprising: a reference voltage generation circuit configured to output analog reference voltages corresponding to each of said digital grayscale data; a plurality of buffer amplifiers configured to individually perform buffering of said respective analog reference voltages; a grayscale mode circuit configured to determine a grayscale number of said digital grayscale data based on a grayscale mode signal supplied from the outside; and an amplifier enable circuit configured to set each of said plurality of buffer amplifiers to an enable state or a disable state based on an output signal of said grayscale mode circuit.
    • 公开了一种液晶驱动电路,其被配置为将数字灰度数据的模拟电压提供给多条信号线中的每条信号线,所述电路包括:参考电压产生电路,被配置为输出对应于每个所述数字 灰度数据; 多个缓冲放大器,被配置为单独地执行所述各个模拟参考电压的缓冲; 灰度模式电路,被配置为基于从外部提供的灰度模式信号来确定所述数字灰度数据的灰度数; 以及放大器使能电路,被配置为基于所述灰度级模式电路的输出信号将所述多个缓冲放大器中的每一个设置为使能状态或禁用状态。