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    • 4. 发明授权
    • Apparatus for processing floating-point data having exponents of a
variable length
    • 用于处理具有可变长度指数的浮点数据的装置
    • US4758973A
    • 1988-07-19
    • US772696
    • 1985-09-05
    • Mitsuo OoyamaHozumi HamadaKimiaki Ando
    • Mitsuo OoyamaHozumi HamadaKimiaki Ando
    • G06F7/00G06F5/01G06F7/76H03M7/24G06F7/48G06F5/00
    • H03M7/24
    • A floating-point data processing apparatus operates to generate exponent data of fixed length from floating-point data composed of (a) a sign bit indicating a mantissa sign, (b) a first exponent part which has bit length determined in dependence upon a significant bit length necessary for binary expression of an exponent and which has all its bits determined at 1 or 0 in dependence upon the mantissa sign and the sign of said exponent, (c) a second exponent part which has its bit length determined in dependence upon the bit length of the first exponent part, which has a predetermined relationship determined in dependence upon the sign of the exponent and the mantissa sign with the significant bit part when the exponent is expressed in binary form, and the leading bit of which has a value different from the value of one bit of said first exponent part, and (d) a mantisa part which has a plurality of bits having a bit length determined in dependence upon the value of the exponent. The exponent data of fixed length is composed of a sign bit part having a plurality of bits having values indicating the sign of the exponent and a significant bit part having a plurality of bits indicating the values of the exponent.
    • 一种浮点数据处理装置,用于从由(a)表示尾数符号的符号位的浮点数据生成固定长度的指数数据,(b)第一指数部分,其具有根据显着性 指数的二进制表达所需的位长度,并且其所有位根据尾数符号和所述指数的符号确定为1或0,(c)第二指数部分,其位长度根据 第一指数部分的位长度,其具有根据指数的符号确定的预定关系,并且当指数以二进制形式表示时,具有有效位部分的尾数符号,并且其前导位具有不同的值 根据所述第一指数部分的一位的值,以及(d)具有根据指数的值确定的具有位长度的多个位的mantisa部分。 固定长度的指数数据由具有指示指数的符号的值的多个位的符号位部分和具有表示指数值的多个位的有效位部分组成。
    • 5. 发明授权
    • Electron beam lithography system
    • 电子束光刻系统
    • US4943729A
    • 1990-07-24
    • US284733
    • 1988-12-15
    • Kimiaki AndoMitsuo OoyamaNorio Saitou
    • Kimiaki AndoMitsuo OoyamaNorio Saitou
    • H01J37/302
    • H01J37/3026
    • An electron beam lithography system having a contour resolving circuit for resolving original pattern data which is transferred from a host computer into contour portion pattern data and inner portion pattern data in accordance with the designated dimension, for adding flag data to enable the contour portion pattern data and the inner portion pattern data to be discriminated to the resolved pattern data, and for outputting the resolved pattern data with the flag data. By adding the flag data, the contour portion pattern data and inner portion pattern data can be easily discriminated. The operation to change the electron beam irradiation dose in accordance with the contour portion pattern and inner portion pattern can be fairly easily executed. A pattern can be drawn at a high accuracy while preventing a deformation of the drawn figure due to the proximity effect. A data processing amount in the computer can be reduced. A data transfer amount from the host computer can be also reduced. Thus, an electron beam lithography system having a high throughput can be realized.
    • 一种具有轮廓分解电路的电子束光刻系统,用于根据所指定的尺寸,将从主计算机传送到轮廓部分图形数据和内部部分图形数据的原始图案数据解析,以便添加标志数据以使轮廓部分图形数据 以及要被区分为分辨图案数据的内部部分图案数据,并且用于使用标志数据输出分辨的图案数据。 通过添加标志数据,可以容易地区分轮廓部分图形数据和内部部分图案数据。 可以相当容易地执行根据轮廓部分图形和内部部分图案改变电子束照射剂量的操作。 可以以高精度绘制图案,同时防止由于邻近效应引起的绘制图形的变形。 可以减少计算机中的数据处理量。 也可以减少来自主机的数据传送量。 因此,可以实现具有高通量的电子束光刻系统。