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    • 1. 发明授权
    • Method of manufacturing a CMOS transistor
    • 制造CMOS晶体管的方法
    • US06300184B1
    • 2001-10-09
    • US09609158
    • 2000-06-30
    • Jun Gi ChoiSeon Soon Kim
    • Jun Gi ChoiSeon Soon Kim
    • H01L218238
    • H01L21/823842
    • There is disclosed a method of manufacturing a CMOS transistor, by which ion implantation process is selectively performed to the gate formed region of a polysilicon film after a NMOS transistor region and a PMOS transistor region are defined in the process of manufacturing a CMOS transistor. Thus, it can obtain a reliable device by solving the problem occurring when polysilicon films doped with different impurities are simultaneously etched and the problem that a tungsten film is oxidized due to a selective oxidization process after forming a tungsten gate electrode.
    • 公开了一种制造CMOS晶体管的方法,在制造CMOS晶体管的过程中限定了NMOS晶体管区域和PMOS晶体管区域之后,通过其选择性地对多晶硅膜的栅极形成区域进行离子注入工艺。 因此,通过解决在同时蚀刻掺杂有不同杂质的多晶硅膜和在形成钨栅电极之后由于选择性氧化工艺而氧化钨膜的问题,可以获得可靠的器件。
    • 2. 发明授权
    • Method for fabricating a semiconductor device
    • US06333249B2
    • 2001-12-25
    • US09751941
    • 2001-01-02
    • Seon Soon KimJun Gi Choi
    • Seon Soon KimJun Gi Choi
    • H01L213205
    • H01L27/10894H01L21/823842H01L27/10873
    • A method for fabricating a semiconductor device is disclosed. In a process for fabricating a CMOS transistor of a high integrated semiconductor device and a cell of a DRAM, a process for forming a dual gate electrode having a layered structure of a tungsten layer and a polysilicon layer includes the steps of forming a gate electrode shape from an undoped polysilicon layer, forming an insulating film spacer at sidewalls of the polysilicon layer, forming an LDD region, removing a portion of the undoped polysilicon layer to leave a predetermined thickness and to form an opening in which the tungsten layer will be formed, and respectively implanting different impurity ions into the undoped polysilicon layer respectively formed in the PMOS region and the NMOS region before forming the tungsten layer. Thus, it is possible to prevent etching residue from occurring and also prevent the semiconductor substrate from being damaged. In addition, it is possible to prevent the tungsten layer from being oxidized due to a high temperature process such as an ion plantation process for forming the LDD region and the source/drain region, thereby improving operational characteristics of the device and process yield.
    • 5. 发明授权
    • Internal voltage generator for semiconductor device
    • 半导体器件内部电压发生器
    • US06867641B2
    • 2005-03-15
    • US10671382
    • 2003-09-25
    • Chang Seok KangJun Gi Choi
    • Chang Seok KangJun Gi Choi
    • G11C5/14G05F1/46G05F1/10G03G3/16
    • G05F1/465
    • Disclosed is an internal voltage generator which generates a stable internal voltage using two power up sensing means. Clamp means outputs a first voltage. First and second power up sensing means sense the external applied to the semiconductor device and output first and second control signals, respectively. A first switch receives the first voltage and a switch controller receives the first and second control signals from the first and second power up sensing means and controls turn on/off of the first switch. A second switch is turned on/off according to the second control signal from the second power up sensing means and receives a second voltage. An amplifier selectively receives the first and second voltages from the first and second switches and outputs the second voltage.
    • 公开了一种内部电压发生器,其使用两个上电感测装置产生稳定的内部电压。 钳位表示输出第一电压。 第一和第二上电感测装置检测施加到半导体器件的外部并分别输出第一和第二控制信号。 第一开关接收第一电压,开关控制器从第一和第二上电感测装置接收第一和第二控制信号,并控制第一开关的导通/截止。 根据来自第二上电检测装置的第二控制信号,第二开关被接通/断开,并接收第二电压。 放大器选择性地接收来自第一和第二开关的第一和第二电压并输出第二电压。
    • 9. 发明申请
    • APPARATUS FOR SUPPLYING VOLTAGE FREE NOISE AND METHOD OF OPERATION THE SAME
    • 用于提供无电压噪声的装置及其操作方法
    • US20110266877A1
    • 2011-11-03
    • US13180584
    • 2011-07-12
    • YOON JAE SHINJun Gi Choi
    • YOON JAE SHINJun Gi Choi
    • H02J4/00
    • H03K17/145H03K19/00384Y10T307/696
    • A voltage supply apparatus includes a power noise sensing unit, a voltage selecting unit, a first power voltage supply unit and a second power voltage supply unit. The power noise sensing unit senses noise from first and second powers and outputs a power noise sensing signal. The voltage selecting unit outputs first and second driving signals in response to a voltage-supply-enable-signal and the power noise sensing signal. The first power voltage supply unit applies a voltage of the first power in response to the first and second driving signals. The second power voltage supply unit applies a voltage of the second power in response to the first and second driving signals.
    • 电压供给装置包括电源噪声检测单元,电压选择单元,第一电源电压单元和第二电源电压单元。 功率噪声感测单元感测来自第一和第二功率的噪声,并输出功率噪声感测信号。 电压选择单元响应于电压供应使能信号和功率噪声感测信号输出第一和第二驱动信号。 第一电源电压单元响应于第一和第二驱动信号施加第一功率的电压。 第二电源电压单元响应于第一和第二驱动信号施加第二功率的电压。
    • 10. 发明授权
    • Circuit providing compensated power for sense amplifier and driving method thereof
    • 用于读出放大器的电路提供补偿功率及其驱动方法
    • US07825733B2
    • 2010-11-02
    • US12136196
    • 2008-06-10
    • Jun Gi Choi
    • Jun Gi Choi
    • H03L7/099
    • G11C5/147G11C7/02G11C7/065G11C7/08G11C8/18G11C11/4074G11C11/4091
    • The present invention discloses a circuit providing a power for a sense amplifier that stabilizes a power voltage supplied to the sense amplifier by compensating a noise generated in the power voltage when the sense amplifier operates with an selectively generated decoupling noise. The circuit providing a power for a sense amplifier includes a sense amplifying circuit sensing and amplifying data loaded on a bit line with a first power. A power supplying unit provides the first power to the sense amplifying circuit. A decoupling unit generates a decoupling noise with a second power and provides the decoupling noise to the first power voltage. The decoupling noise is maintained for a period including a time point of an operation of the sense amplifying circuit and a predetermined time thereafter.
    • 本发明公开了一种提供用于感测放大器的电源的电路,其通过补偿当读出放大器以选择性地产生的解耦噪声工作时在电源电压中产生的噪声来稳定提供给读出放大器的电源电压。 提供用于读出放大器的电源的电路包括感测放大电路,以感测和放大加载在具有第一功率的位线上的数据。 供电单元向感测放大电路提供第一功率。 解耦单元产生具有第二功率的去耦噪声,并将解耦噪声提供给第一电源电压。 解耦噪声保持包括感测放大电路的操作的时间点和之后的预定时间的周期。