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    • 2. 发明申请
    • LINEAR MOTOR AND TABLE FEED APPARATUS
    • 线性电机和台式送料装置
    • US20110219989A1
    • 2011-09-15
    • US13042477
    • 2011-03-08
    • Kazuya YUGAWAAtsushi KawaharaSeigo Nagamatsu
    • Kazuya YUGAWAAtsushi KawaharaSeigo Nagamatsu
    • H02K41/02B23Q1/44B23Q5/28
    • H02K41/03B23Q5/28H02K41/0356
    • A linear motor includes a field magnet unit, an armature unit, and a connecting unit. The field magnet unit includes a first field magnet yoke and a second field magnet yoke each of which has an odd number of permanent magnets arranged thereon in a longitudinal direction such that polarities of the permanent magnets are alternately different, where the first field magnet yoke and the second field magnet yoke are arranged such that respective permanent magnets are opposite to each other and that polarities of the opposite permanent magnets are different from each other. The armature unit is wound with a winding and is arranged between the first field magnet yoke and the second field magnet yoke. The connecting unit is configured by a magnetic substance and connects the first field magnet yoke and the second field magnet yoke. One of the field magnet unit and the armature unit moves relatively to the other.
    • 线性电动机包括场磁体单元,电枢单元和连接单元。 场磁体单元包括第一场磁轭和第二场磁轭,每个磁轭具有在纵向方向上布置有奇数个永磁体,使得永磁体的极性交替不同,其中第一场磁轭和 第二场磁轭被布置成使得各个永磁体彼此相对,并且相对的永磁体的极性彼此不同。 电枢单元缠绕有绕组,并且布置在第一磁场磁轭和第二磁场磁轭之间。 连接单元由磁性物质构成,并连接第一磁场磁轭和第二磁场磁轭。 场磁体单元和衔铁单元之一相对移动到另一个。
    • 4. 发明授权
    • Apparatus for detecting two-dimensional pattern and method for
transforming the pattern into binary image
    • 用于检测二维图案的装置和将图案转换成二进制图像的方法
    • US4506382A
    • 1985-03-19
    • US370781
    • 1982-04-21
    • Kazunari HadaNorio FujiiAtsushi KawaharaToru AzumaJunji Hazama
    • Kazunari HadaNorio FujiiAtsushi KawaharaToru AzumaJunji Hazama
    • G06K9/56G06T5/00G06T5/30H04N1/409H04N5/21
    • G06K9/56
    • Two-dimensional pattern detecting apparatus provided with register for serially receiving binary signals obtained from analog signals of a two-dimensional pattern and adapted to divide the pattern into pixels and to represent the density of bright and dark for pixels by the binary signals. The apparatus further includes a processing circuit adapted to compare with predetermined patterns a pattern composed of 8 peripheral pixels of a partial area of 3.times.3 pixels within the two-dimensional pattern, on the basis of the binary signals stored in the register. The processing circuit outputs a binary signal of a logic value stored in said register corresponding to a central pixel of the partial area when the pattern of the 8 pixels coincides with one of said predetermined patterns, and to outputs a binary signal of a logic value prevailing in 8 binary signals stored in the register corresponding to the 8 pixels when the pattern of the 8 pixels does not coincide with any of the predetermined patterns.
    • 二维图案检测装置设置有用于串行接收从二维图案的模拟信号获得的二进制信号的寄存器,并且适于将图案划分为像素并且通过二进制信号表示像素的亮和暗的密度。 该装置还包括处理电路,其适于根据存储在寄存器中的二进制信号,与二维图案中的3×3像素的部分区域的8个周边像素组成的图案与预定图案进行比较。 当8个像素的图案与所述预定图案中的一个一致时,处理电路输出存储在所述寄存器中的对应于该部分区域的中心像素的逻辑值的二进制信号,并输出主要的逻辑值的二进制信号 当8像素的图案与任何预定图案不一致时,存储在对应于8个像素的寄存器中的8个二进制信号。
    • 5. 发明授权
    • Device for measuring contour length of a two-dimensional pattern
    • 用于测量二维图案轮廓长度的装置
    • US3980870A
    • 1976-09-14
    • US575718
    • 1975-05-08
    • Atsushi Kawahara
    • Atsushi Kawahara
    • G01B3/12G01B11/02G01B11/03G01B11/24G01B21/02G01B21/20G01B11/00G06K9/10
    • G01B11/022G01B11/24
    • A device for measuring the contour length of a two-dimensional pattern comprises means for scanning the pattern and sampling each scanned line at a predetermined length to convert the pattern into digitally coded patterns. A rotary means rotates the two-dimensional pattern relative to the converting means to attain uniform spatial distribution of the two-dimensional pattern. A discriminating means discriminates that the digital coded patterns corresponding to the contour line segments placed between the neighboring scanning lines correspond to the number of times the length of the sample to classify the segments into a number of groups according to the result of the discrimination. A computer multiplies the outputs from the classifying means by predetermined weighting coefficients, respectively, at each rotated position of said two-dimensional pattern to obtain the average of the contour length of the two-dimensional pattern at every rotated position.
    • 用于测量二维图案的轮廓长度的装置包括用于扫描图案并以预定长度对每条扫描线进行采样的装置,以将图案转换成数字编码图案。 旋转装置相对于转换装置旋转二维图案以获得二维图案的均匀的空间分布。 鉴别装置鉴别出与相邻扫描线之间的轮廓线段相对应的数字编码图形,与根据鉴别结果将片段长度分类为多个组的样本长度相对应。 计算机将分类装置的输出分别乘以在所述二维图形的每个旋转位置处的预定加权系数,以获得每个旋转位置处的二维图案的轮廓长度的平均值。
    • 6. 发明授权
    • Particle inspection apparatus, exposure apparatus, and device manufacturing method
    • 粒子检查装置,曝光装置及装置的制造方法
    • US08059269B2
    • 2011-11-15
    • US12831103
    • 2010-07-06
    • Atsushi Kawahara
    • Atsushi Kawahara
    • G01N21/88
    • G03F1/84
    • A particle inspection apparatus includes an irradiation unit configured to apply a light beam onto front and back surfaces of an object to be inspected, first and second detection units configured to detect scattering light from the surfaces, a calculation unit configured to conduct a particle inspection on the surfaces on the basis of outputs from the detection units, and a control unit configured to control the irradiation unit, the detection units, and the calculation unit. The irradiation unit can selectively apply the beam onto the front or back surface. The control unit causes the calculation unit to conduct the particle inspection on the inspection surface on which the light beam is selectively applied, on the basis of outputs made by the detection unit corresponding to simultaneous application and selective application of the light beam.
    • 一种粒子检查装置,包括:被配置为将被检测体的前后表面施加光束的照射部,配置为检测来自所述表面的散射光的第一检测部和第二检测部, 基于来自检测单元的输出的表面,以及被配置为控制照射单元,检测单元和计算单元的控制单元。 照射单元可以选择性地将光束施加到前表面或后表面上。 控制单元使得计算单元基于对应于同时施加和选择性地施加光束的由检测单元产生的输出,在选择了光束的检查表面上进行粒子检查。
    • 7. 发明申请
    • EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
    • 曝光装置及其制造方法
    • US20080218708A1
    • 2008-09-11
    • US12038980
    • 2008-02-28
    • Atsushi Kawahara
    • Atsushi Kawahara
    • G03B27/52
    • G03F7/70916G03F1/84G03F7/70533G03F7/70866
    • An exposure apparatus is configured to transfer a pattern to a substrate by exposing the substrate to light via a reticle. The apparatus comprises an inspection unit configured to inspect the reticle, an exposure unit configured to expose the substrate to light via the reticle inspected by the inspection unit, and a controller configured to control the inspection unit and the exposure unit. The controller (i) sets a partial region of the reticle, (ii) causes the inspection unit to inspect the reticle on which the partial region is set, and (iii) causes the exposure unit to expose the substrate to light via the partial region if the inspection unit finds no abnormality in the partial region.
    • 曝光装置被配置为通过经由掩模版曝光基板而将图案转印到基板。 所述装置包括:检查单元,被配置为检查所述掩模版;曝光单元,被配置为经由所述检查单元检查的所述掩模版曝光所述基板;以及控制器,被配置为控制所述检查单元和所述曝光单元。 控制器(i)设置掩模版的部分区域,(ii)使检查单元检查其上设置有部分区域的掩模版,以及(iii)使曝光单元通过部分区域曝光基板 如果检查单元在部分区域中没有发现异常。
    • 8. 发明授权
    • Method of plating nonconductor product
    • 非导体产品电镀方法
    • US06992000B2
    • 2006-01-31
    • US10486169
    • 2002-08-28
    • Hideo HonmaAtsushi KawaharaAkira Teranishi
    • Hideo HonmaAtsushi KawaharaAkira Teranishi
    • H01L21/26H01L21/42
    • C23C18/1868C23C18/2033C23C18/204C23C18/206C23C18/208H05K3/181Y10S438/903Y10T428/31678
    • A nonconductor product is soaked in a solution suspending a semiconducting powder and is subjected to light irradiation in the solution so that polar group is formed on the surface of the nonconductor product, and then electroless plating is performed on the surface on which the polar group is formed. A resin product is subjected to electroless plating after ultraviolet treatment in which ultraviolet rays are irradiated through water or a solution is performed. Further, electroless plating or electroplating with a different or the same kind of metal is performed on the electroless-plated layer formed by electroless plating. With the method like this, the plated nonconductor product which does not cause problems such as environmental pollution and waste liquid treatment, and whose surface and plated coating is firmly adhered to each other, and, when a resin product is used as an object to be plated, deformation by heat of the resin product can be prevented, and moreover, the adherent strength of the plated coating can be improved.
    • 将非导体产物浸泡在悬浮半导体粉末的溶液中并在溶液中进行光照射,使得在非导体产物的表面上形成极性基团,然后在极性基团的表面上进行无电镀 形成。 紫外线处理后,通过水或溶液照射紫外线,对树脂制品进行化学镀。 此外,通过无电解电镀形成的化学镀层进行化学镀或具有不同或相同种类的金属的电镀。 通过这样的方法,不会引起诸如环境污染和废液处理等问题的电镀非导体产品,并且其表面和镀层彼此牢固地粘合,并且当使用树脂产品作为对象时 可以防止树脂产品的热变形,同时能够提高镀覆层的贴合强度。
    • 9. 发明授权
    • Image scanning signal generating apparatus with pre-scan for exposure
control
    • 具有用于曝光控制的预扫描的图像扫描信号发生装置
    • US4651226A
    • 1987-03-17
    • US661829
    • 1984-10-17
    • Ryuzo MotooriMakoto KimuraMasaki IsogaiAkimasa SatoAtsushi Kawahara
    • Ryuzo MotooriMakoto KimuraMasaki IsogaiAkimasa SatoAtsushi Kawahara
    • H04N1/40H04N1/407H04N1/10H04N3/04
    • H04N1/40056H04N1/4072
    • An image signal generating apparatus includes an optical system for focusing the image of a photographic film onto a predetermined plane and a scanning device for scanning the image with a photoreceptor positioned at the predetermined plane and generating output signals representing the light intensity distribution of the film. The scanning device performs a first scan of the image and a second scan of the image upon completion of the first scan. During the first scan the levels of the output signals indicative of the maximum density and the minimum density of the film are detected, and during the second scan the exposure of the photoreceptor is controlled in accordance with the detected levels. Also, during the second scan, the output signals are clamped to a clamp level calculated in accordance with the detected maximum density level and the minimum level of the output signals during the first scan.
    • 图像信号产生装置包括用于将照相胶片的图像聚焦到预定平面上的光学系统和用于利用位于预定平面处的感光体扫描图像的扫描装置,并产生表示胶片的光强度分布的输出信号。 扫描装置在完成第一次扫描时执行图像的第一次扫描和图像的第二次扫描。 在第一扫描期间,检测指示膜的最大密度和最小密度的输出信号的电平,并且在第二次扫描期间,根据检测到的电平来控制感光体的曝光。 此外,在第二扫描期间,输出信号被钳位到根据检测到的最大浓度水平和在第一扫描期间的输出信号的最小电平计算的钳位电平。