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1. 发明授权

US4479145A Apparatus for detecting the defect of pattern 失效
标题翻译：用于检测图案缺陷的装置
公开(公告)号：US4479145A
公开(公告)日：1984-10-23
申请号：US400681
申请日：1982-07-22
申请人： Toru Azuma , Junji Hazama , Atsushi Kawahara , Kazunari Hada , Norio Fujii
发明人： Toru Azuma , Junji Hazama , Atsushi Kawahara , Kazunari Hada , Norio Fujii
IPC分类号： G01N21/88 , G06T7/00 , H04N7/18
CPC分类号： G01N21/88 , G06T7/001 , G06T2207/30148
摘要： A pattern examining in which a pattern on an examined object such as reticle or mask is scanned to produce image binary signals of picture elements; binary information corresponding to a local area on the examined object is serially extracted from the image binary signals; and shape detection is effected for detecting by means of the binary information whether or not the pattern in the local area possesses a determined geometric shape or characteristics. The result of the shape detection is compared with the information on design relating to the geometric shape or characteristics which the pattern on the examined object should possess.
摘要翻译：模式检查，其中扫描诸如掩模版或掩模的被检查物体上的图案以产生图像元素的图像二进制信号; 对应于所检查对象上的局部区域的二进制信息从图像二进制信号中被串行提取; 并且通过二进制信息进行形状检测来检测局部区域中的图案是否具有确定的几何形状或特征。将形状检测的结果与关于检查对象的图案所具有的几何形状或特征的设计信息进行比较。

2. 发明授权

US4472738A Pattern testing apparatus 失效
标题翻译：图案检测仪
公开(公告)号：US4472738A
公开(公告)日：1984-09-18
申请号：US381469
申请日：1982-05-24
申请人： Kazunari Hada , Norio Fujii , Atsushi Kawahara , Toru Azuma , Junji Hazama
发明人： Kazunari Hada , Norio Fujii , Atsushi Kawahara , Toru Azuma , Junji Hazama
IPC分类号： G01N21/88 , G01N21/956 , G06T1/00 , G06T7/00 , H04N7/18
CPC分类号： G01N21/956 , G06T7/001 , G06T2207/10016 , G06T2207/30148
摘要： A pattern defect testing apparatus comprises a first detection circuit which defines a first detection area on a two-dimensional pattern and produces a first detection signal when all digital signals representative of densities of picture cells in the first detection area have the same logical value, a second detection circuit which defines a second detection area on the two-dimensional pattern and produces a second detection signal when at least one of digital signals representative of densities of picture cells in the second detection area has a logical value different from that of the digital signals to the first detection circuit, and a discriminating circuit for discriminating the presence of a defect in the second detection area when the first and second detection signals are produced.
摘要翻译：图案缺陷检测装置包括第一检测电路，其定义二维图案上的第一检测区域，并且当表示第一检测区域中的图像单元的密度的所有数字信号具有相同的逻辑值时，产生第一检测信号，第二检测电路，其限定二维图案上的第二检测区域，并且当表示第二检测区域中的图像单元的密度的数字信号中的至少一个具有与数字信号的逻辑值不同的逻辑值时，产生第二检测信号以及鉴别电路，用于在产生第一和第二检测信号时鉴别第二检测区域中的缺陷的存在。

3. 发明授权

US4506382A Apparatus for detecting two-dimensional pattern and method for transforming the pattern into binary image 失效
标题翻译：用于检测二维图案的装置和将图案转换成二进制图像的方法
公开(公告)号：US4506382A
公开(公告)日：1985-03-19
申请号：US370781
申请日：1982-04-21
申请人： Kazunari Hada , Norio Fujii , Atsushi Kawahara , Toru Azuma , Junji Hazama
发明人： Kazunari Hada , Norio Fujii , Atsushi Kawahara , Toru Azuma , Junji Hazama
IPC分类号： G06K9/56 , G06T5/00 , G06T5/30 , H04N1/409 , H04N5/21
CPC分类号： G06K9/56
摘要： Two-dimensional pattern detecting apparatus provided with register for serially receiving binary signals obtained from analog signals of a two-dimensional pattern and adapted to divide the pattern into pixels and to represent the density of bright and dark for pixels by the binary signals. The apparatus further includes a processing circuit adapted to compare with predetermined patterns a pattern composed of 8 peripheral pixels of a partial area of 3.times.3 pixels within the two-dimensional pattern, on the basis of the binary signals stored in the register. The processing circuit outputs a binary signal of a logic value stored in said register corresponding to a central pixel of the partial area when the pattern of the 8 pixels coincides with one of said predetermined patterns, and to outputs a binary signal of a logic value prevailing in 8 binary signals stored in the register corresponding to the 8 pixels when the pattern of the 8 pixels does not coincide with any of the predetermined patterns.
摘要翻译：二维图案检测装置设置有用于串行接收从二维图案的模拟信号获得的二进制信号的寄存器，并且适于将图案划分为像素并且通过二进制信号表示像素的亮和暗的密度。该装置还包括处理电路，其适于根据存储在寄存器中的二进制信号，与二维图案中的3×3像素的部分区域的8个周边像素组成的图案与预定图案进行比较。当8个像素的图案与所述预定图案中的一个一致时，处理电路输出存储在所述寄存器中的对应于该部分区域的中心像素的逻辑值的二进制信号，并输出主要的逻辑值的二进制信号当8像素的图案与任何预定图案不一致时，存储在对应于8个像素的寄存器中的8个二进制信号。

4. 发明授权

US4589139A Apparatus for detecting defects in pattern 失效
标题翻译：用于检测图案中的缺陷的装置
公开(公告)号：US4589139A
公开(公告)日：1986-05-13
申请号：US462515
申请日：1983-01-31
申请人： Kazunari Hada , Norio Fujii , Toru Azuma , Kaoru Kikuchi , Junji Hazama
发明人： Kazunari Hada , Norio Fujii , Toru Azuma , Kaoru Kikuchi , Junji Hazama
IPC分类号： G01R31/308 , G06T7/00 , G06K9/46
CPC分类号： G06T7/0006 , G01R31/308 , G06T2207/20144 , G06T2207/30148
摘要： An apparatus for inspecting a pattern consisting of light and dark areas formed on a planar test specimen according to design information, comprising: an imaging device for viewing the pattern to generate image information; a detector for generating a first signal upon detection that, in response to the image information, a boundary line between the light and dark areas of the pattern is bent in a determined stepping form in the direction of the plane; a memory for generating and storing a second signal, upon detection that the boundary line of the pattern has a bend of stepping form according to the design information, corresponding to the position in the imaging area of the bend in the design information; and an inspecting device for discriminating, upon generation of the first signal, the presence or absence of the second signal in the memory corresponding to the position of the first signal in the image area.
摘要翻译：一种用于根据设计信息检查由平面测试样本上形成的由浅色和暗色区域组成的图案的设备，包括：用于观看图案以生成图像信息的成像装置; 检测器，用于在检测到时产生第一信号，响应于图像信息，图案的亮区和暗区之间的边界线以确定的步进形式沿平面的方向弯曲; 用于产生和存储第二信号的存储器，当检测到所述图案的边界线根据所述设计信息具有与所述设计信息中的所述弯曲部的所述成像区域中的位置相对应的步进形式的弯曲时; 以及检测装置，用于在产生第一信号时，在对应于图像区域中的第一信号的位置的存储器中存在或不存在第二信号。

5. 发明授权

US07522823B2 Thermal processing apparatus, thermal processing method, and substrate processing apparatus 有权
标题翻译：热处理装置，热处理方法以及基板处理装置
公开(公告)号：US07522823B2
公开(公告)日：2009-04-21
申请号：US10926718
申请日：2004-08-26
申请人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
发明人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
IPC分类号： F26B19/00 , H05B3/68
CPC分类号： H01L21/67184 , F27B17/0025 , F27D3/0084 , F27D5/0037 , H01L21/67109 , H01L21/67178 , H01L21/67748
摘要： In a thermal processing unit, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.
摘要翻译：在热处理单元中，基板由本地运输手保持以在转印部和加热单元之间输送，并且由加热单元进行热处理。此外，本地运送手由转移部分中的冷却板冷却。

6. 发明授权

US06937917B2 Substrate processing apparatus, operation method thereof and program 失效
标题翻译：基板处理装置及其操作方法和程序
公开(公告)号：US06937917B2
公开(公告)日：2005-08-30
申请号：US10726920
申请日：2003-12-02
申请人： Kazuya Akiyama , Toru Azuma , Yasufumi Koyama
发明人： Kazuya Akiyama , Toru Azuma , Yasufumi Koyama
IPC分类号： H01L21/027 , G05B19/418 , H01L21/00 , H01L21/02 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32021 , G05B2219/34306 , G05B2219/45031 , Y02P70/161 , Y02P70/163 , Y02P70/605 , Y02P90/20 , Y02P90/205
摘要： Provided is a substrate processing apparatus that can reduce power consumption, while maintaining throughput. In addition to a normal mode in which all units are activated, the apparatus is provided with an energy saving mode that is selectable. When the energy saving mode is selected, only essential units that are requisites for a substrate processing are activated and used in the substrate processing. If it is necessary to increase process efficiency, any additional unit may be activated and used in the processing. During standby, only an essential unit can be activated and the rest is halted, or alternatively, all units may be halted. The transition to the energy saving mode can occur when the standby state continues for a predetermined period of time after the normal mode is selected.
摘要翻译：提供了一种能够在维持生产量的同时降低功耗的基板处理装置。除了所有单元被激活的正常模式之外，该设备具有可选择的节能模式。当选择节能模式时，仅在衬底处理中激活并使用作为衬底处理的必要单元。如果有必要提高过程效率，任何附加单元可能被激活并用于处理。在待机期间，只有一个必要的单元可以被激活，其余的被暂停，或者所有单元可能被停止。当在正常模式被选择之后待机状态持续预定时间段时，可能发生向节能模式的转变。

7. 发明申请

US20050058440A1 Thermal processing apparatus, thermal processing method, and substrate processing apparatus 有权
标题翻译：热处理装置，热处理方法以及基板处理装置
公开(公告)号：US20050058440A1
公开(公告)日：2005-03-17
申请号：US10926718
申请日：2004-08-26
申请人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
发明人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
IPC分类号： H01L21/677 , F27B17/00 , F27D3/00 , F27D5/00 , F27D11/00 , H01L21/00 , H01L21/027 , H01L21/68
CPC分类号： H01L21/67184 , F27B17/0025 , F27D3/0084 , F27D5/0037 , H01L21/67109 , H01L21/67178 , H01L21/67748
摘要： In a thermal processing unit according to the present invention, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.
摘要翻译：在根据本发明的热处理单元中，基板由本地运输手保持以在转印部和加热单元之间输送，并由加热单元进行热处理。此外，本地运送手由转移部分中的冷却板冷却。

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