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1. 发明授权

US06548343B1 Method of fabricating a ferroelectric memory cell 有权
标题翻译：制造铁电存储单元的方法
公开(公告)号：US06548343B1
公开(公告)日：2003-04-15
申请号：US09702985
申请日：2000-10-31
申请人： Scott R. Summerfelt , Theodore S. Moise , Guoqiang Xing , Luigi Colombo , Tomoyuki Sakoda , Stephen R. Gilbert , Alvin L. S. Loke , Shawming Ma , Rahim Kavari , Laura Wills-Mirkarimi , Jun Amano
发明人： Scott R. Summerfelt , Theodore S. Moise , Guoqiang Xing , Luigi Colombo , Tomoyuki Sakoda , Stephen R. Gilbert , Alvin L. S. Loke , Shawming Ma , Rahim Kavari , Laura Wills-Mirkarimi , Jun Amano
IPC分类号： H01L218242
CPC分类号： H01L27/11502 , H01L27/11507 , H01L28/57
摘要： An embodiment of the instant invention is a method of fabricating a ferroelectric capacitor which is situated over a structure, the method comprising the steps of: forming a bottom electrode on the structure (124 of FIG. 1), the bottom electrode having a top surface and sides; forming a capacitor dielectric (126 of FIG. 1) comprised of a ferroelectric material on the bottom electrode, the capacitor dielectric having a top surface and sides; forming a top electrode (128 and 130 of FIG. 1) on the capacitor dielectric, the top electrode having a top surface and sides, the ferroelectric capacitor is comprised of the bottom electrode, the capacitor dielectric, and the top electrode; forming a barrier layer (118 and 120 of FIG. 1) on the side of the bottom electrode, the side of the capacitor dielectric, and the side of the top electrode; forming a dielectric layer on the barrier layer and the structure, the dielectric having a top surface and a bottom surface; and performing a thermal step for a duration at a temperature between 400 and 900 C. in an ambient comprised of a gas selected from the group consisting of: argon, nitrogen, and a combination thereof, the step of performing a thermal step being performed after the step of forming the barrier layer.
摘要翻译：本发明的一个实施例是制造位于结构上方的铁电电容器的方法，所述方法包括以下步骤：在所述结构（图1的124）上形成底电极，所述底电极具有顶表面和边; 在底部电极上形成由铁电材料构成的电容器电介质（图1的126），电容器电介质具有顶表面和侧面; 在电容器电介质上形成顶电极（图1的128和130），顶电极具有顶表面和侧面，铁电电容器由底电极，电容器电介质和顶电极组成; 在底电极侧，电容器电介质侧和顶电极侧形成阻挡层（图1的118和120）; 在所述阻挡层和所述结构上形成电介质层，所述电介质具有顶表面和底表面; 并且在由选自氩，氮及其组合的气体组成的环境中在400-900℃的温度下进行热步骤，所述环境包括：在步骤形成阻挡层的步骤。

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