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1. 发明申请

US20070115079A1 Piezoelectric filter 有权
标题翻译：压电滤波器
公开(公告)号：US20070115079A1
公开(公告)日：2007-05-24
申请号：US11655129
申请日：2007-01-19
申请人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
发明人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
IPC分类号： H03H9/58
CPC分类号： H03H9/587 , B81B2201/0271 , B81C1/00238 , H03H9/105 , H03H9/1092 , H03H9/564
摘要： A piezoelectric filter that includes a first substrate having at least one first piezoelectric resonator disposed on a main surface thereof; a second substrate having at least one second piezoelectric resonator disposed on a main surface thereof. A connection pattern extends around the first piezoelectric resonator and the second piezoelectric resonator and is disposed between the first substrate and the second substrate such that the main surface of the first substrate faces the main surface of the second substrate, and the first piezoelectric resonator is remote from the second piezoelectric resonator. A connecting layer bonds a pad disposed on the main surface of the first substrate to a pad disposed on the main surface of the second substrate, and is electrically connected to the first piezoelectric resonator and the second piezoelectric resonator.
摘要翻译：一种压电滤波器，包括：第一基板，具有设置在其主表面上的至少一个第一压电谐振器; 第二基板，其具有设置在其主表面上的至少一个第二压电谐振器。连接图案围绕第一压电谐振器和第二压电谐振器延伸并且设置在第一基板和第二基板之间，使得第一基板的主表面面向第二基板的主表面，并且第一压电谐振器是远程的从第二压电谐振器。连接层将设置在第一基板的主表面上的焊盘与设置在第二基板的主表面上的焊盘接合，并且电连接到第一压电谐振器和第二压电谐振器。

2. 发明授权

US07378922B2 Piezoelectric filter 有权
标题翻译：压电滤波器
公开(公告)号：US07378922B2
公开(公告)日：2008-05-27
申请号：US11655129
申请日：2007-01-19
申请人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
发明人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
IPC分类号： H03H9/54 , H03H9/64 , H03H9/70
CPC分类号： H03H9/587 , B81B2201/0271 , B81C1/00238 , H03H9/105 , H03H9/1092 , H03H9/564
摘要： A piezoelectric filter that includes a first substrate having at least one first piezoelectric resonator disposed on a main surface thereof; a second substrate having at least one second piezoelectric resonator disposed on a main surface thereof. A connection pattern extends around the first piezoelectric resonator and the second piezoelectric resonator and is disposed between the first substrate and the second substrate such that the main surface of the first substrate faces the main surface of the second substrate, and the first piezoelectric resonator is remote from the second piezoelectric resonator. A connecting layer bonds a pad disposed on the main surface of the first substrate to a pad disposed on the main surface of the second substrate, and is electrically connected to the first piezoelectric resonator and the second piezoelectric resonator.
摘要翻译：一种压电滤波器，包括：第一基板，具有设置在其主表面上的至少一个第一压电谐振器; 第二基板，其具有设置在其主表面上的至少一个第二压电谐振器。连接图案围绕第一压电谐振器和第二压电谐振器延伸并且设置在第一基板和第二基板之间，使得第一基板的主表面面向第二基板的主表面，并且第一压电谐振器是远程的从第二压电谐振器。连接层将设置在第一基板的主表面上的焊盘与设置在第二基板的主表面上的焊盘接合，并且电连接到第一压电谐振器和第二压电谐振器。

3. 发明授权

US07161447B2 Piezoelectric resonator, piezoelectric filter, and communication apparatus 有权
标题翻译：压电谐振器，压电滤波器和通信装置
公开(公告)号：US07161447B2
公开(公告)日：2007-01-09
申请号：US10656246
申请日：2003-09-08
申请人： Tadashi Nomura , Hajime Yamada , Ryuichi Kubo
发明人： Tadashi Nomura , Hajime Yamada , Ryuichi Kubo
IPC分类号： H03H9/09 , H03H9/54
CPC分类号： H03H9/173 , H03H9/02102 , H03H9/02157 , H03H9/174 , H03H9/564 , H03H9/568
摘要： A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.
摘要翻译：压电谐振器包括具有开口或凹部的支撑基板，振动部分，其中至少一对上电极和下电极彼此相对以将至少一层的上表面和下表面夹在中间压电薄膜，所述振动部分形成在所述开口或所述凹部上，以及散热薄膜，设置在所述上部电极和所述压电薄膜中的至少一个上，以便不覆盖所述振动部分。

4. 发明授权

US07327209B2 Piezoelectric thin film resonator 有权
标题翻译：压电薄膜谐振器
公开(公告)号：US07327209B2
公开(公告)日：2008-02-05
申请号：US11715359
申请日：2007-03-08
申请人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
发明人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
IPC分类号： H03H9/15 , H03H9/54 , H03H9/70
CPC分类号： H03H9/173 , H03H9/02133
摘要： A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.
摘要翻译：一种压电薄膜谐振器，其确保膜的强度而不降低谐振特性，并且可以在安装时容易地处理。压电薄膜谐振器具有基板，薄膜构件和增强膜。薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分，其间设置有由该支撑部分支撑的空间。浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

5. 发明申请

US20070152775A1 Piezoelectric thin film resonator 有权
标题翻译：压电薄膜谐振器
公开(公告)号：US20070152775A1
公开(公告)日：2007-07-05
申请号：US11715359
申请日：2007-03-08
申请人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
发明人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
IPC分类号： H03H9/70 , H03H9/54 , H03H9/58
CPC分类号： H03H9/173 , H03H9/02133
摘要： A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.
摘要翻译：一种压电薄膜谐振器，其确保膜的强度而不降低谐振特性，并且可以在安装时容易地处理。压电薄膜谐振器具有基板，薄膜构件和增强膜。薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分，其间设置有由该支撑部分支撑的空间。浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

6. 发明授权

US07259032B2 Hermetically sealing a package to include a barrier metal 有权
标题翻译：密封一个包装，包括一个屏障金属
公开(公告)号：US07259032B2
公开(公告)日：2007-08-21
申请号：US10713253
申请日：2003-11-17
申请人： Koji Murata , Takashi Iwamoto , Hiroki Horiguchi , Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Koji Murata , Takashi Iwamoto , Hiroki Horiguchi , Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： H01L21/00
CPC分类号： H03H9/0557 , H01L24/97 , H01L2221/68345 , H01L2224/05568 , H01L2224/16 , H01L2224/97 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01041 , H01L2924/01042 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01051 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/01327 , H01L2924/09701 , H01L2924/15787 , H01L2924/163 , H01L2924/3025 , H03H3/02 , H03H3/08 , H03H9/059 , H03H9/1085 , H03H9/564 , H01L2224/85 , H01L2924/00 , H01L2224/05599
摘要： A method for manufacturing an electronic device includes the steps of forming a first resist pattern on a primary surface of a SAW element, the first resist pattern having openings at positions corresponding to those at which bumps and a sealing frame are to be formed, sequentially forming metals over the first resist pattern, the metals being formed into adhesion layers, barrier metal layers, and solder layers, removing the first resist pattern on the SAW element such that the bumps and the sealing frame are simultaneously formed. When the bumps and the sealing frame of the SAW element are bonded to bond electrodes of the bond substrate, the solder layers are melted and alloyed by heating.
摘要翻译：一种制造电子器件的方法包括以下步骤：在SAW元件的主表面上形成第一抗蚀剂图案，第一抗蚀剂图案在与要形成凸块和密封框的位置相对应的位置处具有开口，顺序地形成第一抗蚀剂图案上的金属，金属形成粘合层，阻挡金属层和焊料层，去除SAW元件上的第一抗蚀剂图案，使得凸块和密封框架同时形成。当SAW元件的凸起和密封框架结合到接合衬底的接合电极时，焊料层通过加热而熔化并合金化。

7. 发明授权

US06635495B2 Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same 有权
公开(公告)号：US06635495B2
公开(公告)日：2003-10-21
申请号：US09866881
申请日：2001-05-30
申请人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Minoru Noda , Masanori Okuyama
发明人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Minoru Noda , Masanori Okuyama
IPC分类号： H01L2100
CPC分类号： H01L37/02 , G01J5/34 , H01L27/16
摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

8. 发明授权

US08123966B2 Piezoelectric electronic component, process for producing the same, and communication apparatus 失效
标题翻译：压电电子部件，其制造方法以及通信装置
公开(公告)号：US08123966B2
公开(公告)日：2012-02-28
申请号：US11956699
申请日：2007-12-14
申请人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： B44C1/22
CPC分类号： H03H9/02133 , H03H3/02 , H03H3/08 , H03H9/0523 , H03H9/105 , H03H9/1092 , H03H9/174 , H03H9/588
摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.
摘要翻译：提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。压电元件包括焊盘，焊盘输入并输出输入和输出信号。作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

9. 发明授权

US07436102B2 Piezoelectric thin-film resonator and method for producing the same 有权
标题翻译：压电薄膜谐振器及其制造方法
公开(公告)号：US07436102B2
公开(公告)日：2008-10-14
申请号：US11270259
申请日：2005-11-10
申请人： Hidetoshi Fujii , Ryuichi Kubo
发明人： Hidetoshi Fujii , Ryuichi Kubo
IPC分类号： H01L41/08
CPC分类号： H03H3/02 , H03H9/173 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.
摘要翻译：一种压电薄膜谐振器的制造方法，其特征在于，在基板上形成牺牲层，对牺牲层进行等离子体处理，使牺牲层的端面部的表面粗糙度（Ra）为5nm以下，形成带状电介质膜，以连续地设置在基板的表面和牺牲层的端面部分和主表面上，形成包括下电极，上电极和设置在其间的压电薄膜，使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对，该区域设置在牺牲层的上部，并且去除牺牲层以在衬底和电介质膜之间形成气隙。

10. 发明申请

US20070013268A1 Piezoelectric electronic component, and production method therefor, and communication equipment 失效
标题翻译：压电电子元件及其生产方法和通讯设备
公开(公告)号：US20070013268A1
公开(公告)日：2007-01-18
申请号：US10558592
申请日：2004-04-07
申请人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： H01L41/00
CPC分类号： H03H9/02133 , H03H3/02 , H03H3/08 , H03H9/0523 , H03H9/105 , H03H9/1092 , H03H9/174 , H03H9/588
摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.
摘要翻译：提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。压电元件包括焊盘，焊盘输入并输出输入和输出信号。作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

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