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1. 发明授权

US07161447B2 Piezoelectric resonator, piezoelectric filter, and communication apparatus 有权
标题翻译：压电谐振器，压电滤波器和通信装置
公开(公告)号：US07161447B2
公开(公告)日：2007-01-09
申请号：US10656246
申请日：2003-09-08
申请人： Tadashi Nomura , Hajime Yamada , Ryuichi Kubo
发明人： Tadashi Nomura , Hajime Yamada , Ryuichi Kubo
IPC分类号： H03H9/09 , H03H9/54
CPC分类号： H03H9/173 , H03H9/02102 , H03H9/02157 , H03H9/174 , H03H9/564 , H03H9/568
摘要： A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.
摘要翻译：压电谐振器包括具有开口或凹部的支撑基板，振动部分，其中至少一对上电极和下电极彼此相对以将至少一层的上表面和下表面夹在中间压电薄膜，所述振动部分形成在所述开口或所述凹部上，以及散热薄膜，设置在所述上部电极和所述压电薄膜中的至少一个上，以便不覆盖所述振动部分。

2. 发明授权

US07327209B2 Piezoelectric thin film resonator 有权
标题翻译：压电薄膜谐振器
公开(公告)号：US07327209B2
公开(公告)日：2008-02-05
申请号：US11715359
申请日：2007-03-08
申请人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
发明人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
IPC分类号： H03H9/15 , H03H9/54 , H03H9/70
CPC分类号： H03H9/173 , H03H9/02133
摘要： A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.
摘要翻译：一种压电薄膜谐振器，其确保膜的强度而不降低谐振特性，并且可以在安装时容易地处理。压电薄膜谐振器具有基板，薄膜构件和增强膜。薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分，其间设置有由该支撑部分支撑的空间。浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

3. 发明申请

US20070152775A1 Piezoelectric thin film resonator 有权
标题翻译：压电薄膜谐振器
公开(公告)号：US20070152775A1
公开(公告)日：2007-07-05
申请号：US11715359
申请日：2007-03-08
申请人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
发明人： Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
IPC分类号： H03H9/70 , H03H9/54 , H03H9/58
CPC分类号： H03H9/173 , H03H9/02133
摘要： A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.
摘要翻译：一种压电薄膜谐振器，其确保膜的强度而不降低谐振特性，并且可以在安装时容易地处理。压电薄膜谐振器具有基板，薄膜构件和增强膜。薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分，其间设置有由该支撑部分支撑的空间。浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

4. 发明申请

US20070115079A1 Piezoelectric filter 有权
标题翻译：压电滤波器
公开(公告)号：US20070115079A1
公开(公告)日：2007-05-24
申请号：US11655129
申请日：2007-01-19
申请人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
发明人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
IPC分类号： H03H9/58
CPC分类号： H03H9/587 , B81B2201/0271 , B81C1/00238 , H03H9/105 , H03H9/1092 , H03H9/564
摘要： A piezoelectric filter that includes a first substrate having at least one first piezoelectric resonator disposed on a main surface thereof; a second substrate having at least one second piezoelectric resonator disposed on a main surface thereof. A connection pattern extends around the first piezoelectric resonator and the second piezoelectric resonator and is disposed between the first substrate and the second substrate such that the main surface of the first substrate faces the main surface of the second substrate, and the first piezoelectric resonator is remote from the second piezoelectric resonator. A connecting layer bonds a pad disposed on the main surface of the first substrate to a pad disposed on the main surface of the second substrate, and is electrically connected to the first piezoelectric resonator and the second piezoelectric resonator.
摘要翻译：一种压电滤波器，包括：第一基板，具有设置在其主表面上的至少一个第一压电谐振器; 第二基板，其具有设置在其主表面上的至少一个第二压电谐振器。连接图案围绕第一压电谐振器和第二压电谐振器延伸并且设置在第一基板和第二基板之间，使得第一基板的主表面面向第二基板的主表面，并且第一压电谐振器是远程的从第二压电谐振器。连接层将设置在第一基板的主表面上的焊盘与设置在第二基板的主表面上的焊盘接合，并且电连接到第一压电谐振器和第二压电谐振器。

5. 发明授权

US07378922B2 Piezoelectric filter 有权
标题翻译：压电滤波器
公开(公告)号：US07378922B2
公开(公告)日：2008-05-27
申请号：US11655129
申请日：2007-01-19
申请人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
发明人： Ryuichi Kubo , Takahiro Oguchi , Hajime Yamada
IPC分类号： H03H9/54 , H03H9/64 , H03H9/70
CPC分类号： H03H9/587 , B81B2201/0271 , B81C1/00238 , H03H9/105 , H03H9/1092 , H03H9/564
摘要： A piezoelectric filter that includes a first substrate having at least one first piezoelectric resonator disposed on a main surface thereof; a second substrate having at least one second piezoelectric resonator disposed on a main surface thereof. A connection pattern extends around the first piezoelectric resonator and the second piezoelectric resonator and is disposed between the first substrate and the second substrate such that the main surface of the first substrate faces the main surface of the second substrate, and the first piezoelectric resonator is remote from the second piezoelectric resonator. A connecting layer bonds a pad disposed on the main surface of the first substrate to a pad disposed on the main surface of the second substrate, and is electrically connected to the first piezoelectric resonator and the second piezoelectric resonator.
摘要翻译：一种压电滤波器，包括：第一基板，具有设置在其主表面上的至少一个第一压电谐振器; 第二基板，其具有设置在其主表面上的至少一个第二压电谐振器。连接图案围绕第一压电谐振器和第二压电谐振器延伸并且设置在第一基板和第二基板之间，使得第一基板的主表面面向第二基板的主表面，并且第一压电谐振器是远程的从第二压电谐振器。连接层将设置在第一基板的主表面上的焊盘与设置在第二基板的主表面上的焊盘接合，并且电连接到第一压电谐振器和第二压电谐振器。

6. 发明申请

US20050168110A1 Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator 有权
公开(公告)号：US20050168110A1
公开(公告)日：2005-08-04
申请号：US11094622
申请日：2005-03-30
申请人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Hiroyuki Fujino , Yukio Yoshino , Ken-ichi Uesaka , Tadashi Nomura , Daisuke Nakamura , Yoshimitsu Ushimi , Takashi Hayashi
发明人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Hiroyuki Fujino , Yukio Yoshino , Ken-ichi Uesaka , Tadashi Nomura , Daisuke Nakamura , Yoshimitsu Ushimi , Takashi Hayashi
IPC分类号： H03H3/02 , H03H3/04 , H03H9/02 , H03H9/10 , H03H9/17 , H03H9/56 , H01L41/08
CPC分类号： H03H9/174 , C23C14/10 , C23C14/35 , H03H3/02 , H03H3/04 , H03H9/02133 , H03H9/02149 , H03H9/173 , H03H9/564 , H03H9/568 , H04R17/00 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155 , Y10T29/49156
摘要： A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric thin film resonator are provided. The piezoelectric thin film resonator is provided with a substrate having an opening, first and second insulation films which are provided on one surface of the substrate while covering the opening and which primarily include SiO2 and Al2O3, respectively, Al2O3 having oxygen defect and being in an amorphous state, and a piezoelectric thin film which is provided on the second insulation film and is sandwiched between electrodes and which primarily includes ZnO.

7. 发明授权

US06737940B2 Piezoelectric resonator, manufacturing method for the same, piezoelectric filter, manufacturing method for the same, duplexer, and electronic communication device 有权
标题翻译：压电谐振器，其制造方法，压电滤波器，其制造方法，双工器和电子通信装置
公开(公告)号：US06737940B2
公开(公告)日：2004-05-18
申请号：US10175088
申请日：2002-06-20
申请人： Masaki Takeuchi , Hajime Yamada , Yoshihiko Goto , Tadashi Nomura
发明人： Masaki Takeuchi , Hajime Yamada , Yoshihiko Goto , Tadashi Nomura
IPC分类号： H03H900
CPC分类号： H03H9/173 , H03H3/02 , H03H9/174 , H03H9/564 , H03H9/568 , Y10T29/42
摘要： A piezoelectric resonator includes a substrate and a plurality of vibrating portions constructed such that a thin film portion having a piezoelectric thin film of one or more layers is sandwiched by at least a pair of upper electrodes and a lower electrode, which are opposed to each other, on the upper and lower surfaces of the thin film portion. The vibrating portions are separated by at least a distance equal to about &lgr;/2, where &lgr; represents the vibration wavelength, from elements affecting the vibration characteristics.
摘要翻译：一种压电谐振器包括基板和多个振动部分，其被构造成使得具有一层或多层的压电薄膜的薄膜部分被至少一对彼此相对的上电极和下电极夹在中间，在薄膜部分的上表面和下表面上。振动部分分离至少等于约λ/ 2的距离，其中λ表示振动波长，来自影响振动特性的元件。

8. 发明授权

US07019604B2 Piezoelectric filter, duplexer, composite piezoelectric resonator, communication device and method for adjusting frequency of piezoelectric filter 有权
标题翻译：压电滤波器，双工器，复合压电谐振器，通信装置和调节压电滤波器频率的方法
公开(公告)号：US07019604B2
公开(公告)日：2006-03-28
申请号：US10623856
申请日：2003-07-18
申请人： Yoshihiko Gotoh , Hajime Yamada , Tadashi Nomura , Masaki Takeuchi
发明人： Yoshihiko Gotoh , Hajime Yamada , Tadashi Nomura , Masaki Takeuchi
IPC分类号： H03H9/17
CPC分类号： H03H3/04 , H03H9/564 , H03H2003/0428 , H03H2003/0471
摘要： A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation can be achieved. The piezoelectric filter includes a plurality of piezoelectric resonators including a substrate and a vibration portion provided on the substrate, the vibration portion having a structure in which the top and bottom surfaces of a thin film portion including at least one piezoelectric thin film are sandwiched between at least a pair of an upper electrode and a lower electrode facing each other, wherein the upper electrode of a predetermined piezoelectric resonator is made of a material having susceptibility to etching that is different from that of the upper electrode of the other piezoelectric resonator.
摘要翻译：构造压电滤波器和其他电子部件，使得可以提高频率调整的精度，并且可以实现调节操作的效率的提高。压电滤波器包括多个压电谐振器，包括基板和设置在基板上的振动部分，振动部分具有这样的结构，其中包括至少一个压电薄膜的薄膜部分的顶表面和底表面夹在至少一对上电极和下电极彼此面对，其中预定压电谐振器的上电极由对另一个压电谐振器的上电极不同的蚀刻敏感性的材料制成。

9. 发明授权

US06906451B2 Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator 有权
标题翻译：压电谐振器，压电滤波器，双工器，通信装置和制造压电谐振器的方法
公开(公告)号：US06906451B2
公开(公告)日：2005-06-14
申请号：US10329602
申请日：2002-12-27
申请人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Hiroyuki Fujino , Yukio Yoshino , Ken-ichi Uesaka , Tadashi Nomura , Daisuke Nakamura , Yoshimitsu Ushimi , Takashi Hayashi
发明人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Hiroyuki Fujino , Yukio Yoshino , Ken-ichi Uesaka , Tadashi Nomura , Daisuke Nakamura , Yoshimitsu Ushimi , Takashi Hayashi
IPC分类号： H03H3/02 , H03H3/04 , H03H9/02 , H03H9/10 , H03H9/17 , H03H9/56 , H01L41/08
CPC分类号： H03H9/174 , C23C14/10 , C23C14/35 , H03H3/02 , H03H3/04 , H03H9/02133 , H03H9/02149 , H03H9/173 , H03H9/564 , H03H9/568 , H04R17/00 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155 , Y10T29/49156
摘要： A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric thin film resonator are provided. The piezoelectric thin film resonator is provided with a substrate having an opening, first and second insulation films which are provided on one surface of the substrate while covering the opening and which primarily include SiO2 and Al2O3, respectively, Al2O3 having oxygen defect and being in an amorphous state, and a piezoelectric thin film which is provided on the second insulation film and is sandwiched between electrodes and which primarily includes ZnO.
摘要翻译：提供具有稳定的谐振频率的温度特性的压电薄膜谐振器，其制造方法和使用该压电薄膜谐振器的通信装置。压电薄膜谐振器设置有具有开口的第一绝缘膜和第二绝缘膜的基板，所述第一和第二绝缘膜设置在基板的一个表面上，同时覆盖开口并且主要包括SiO 2和Al 2 O 3分别具有氧缺陷并处于非晶状态的Al 2 O 3 N 3，以及压电薄膜其设置在第二绝缘膜上并夹在电极之间并且主要包括ZnO。

10. 发明授权

US06888424B2 Piezoelectric resonator, filter, and electronic communication device 失效
标题翻译：压电谐振器，滤波器和电子通信装置
公开(公告)号：US06888424B2
公开(公告)日：2005-05-03
申请号：US10785284
申请日：2004-02-24
申请人： Masaki Takeuchi , Hajime Yamada , Yoshihiko Goto , Tadashi Nomura , Yukio Yoshino
发明人： Masaki Takeuchi , Hajime Yamada , Yoshihiko Goto , Tadashi Nomura , Yukio Yoshino
IPC分类号： H01L41/08 , H01L41/09 , H01L41/18 , H03H3/02 , H03H3/04 , H03H9/02 , H03H9/17 , H03H9/00
CPC分类号： H03H9/174 , H03H3/04 , H03H9/0207 , H03H9/173 , H03H2003/0407
摘要： A piezoelectric resonator includes a substrate, a vibration unit disposed on the substrate and having a structure in which at least one pair of an upper electrode and a lower electrode opposed to each other, the upper and lower electrodes sandwiching the upper and lower surfaces of an internal thin-film portion including at least one layer of a piezoelectric thin-film, and an external thin-film portion provided under the lower electrode and including at least one layer of a piezoelectric thin-film or a dielectric thin-film, the vibration unit being vibrated in an n-th harmonic (n is an integer of 2 or more), the upper electrode and the lower electrode being provided substantially in the positions of the loops of the n-th harmonic.
摘要翻译：压电谐振器包括基板，设置在基板上的振动单元，具有这样的结构，其中至少一对上电极和下电极彼此相对，上电极和下电极夹着上表面和下表面包括至少一层压电薄膜的内部薄膜部分和设置在所述下部电极下方并且包括至少一层压电薄膜或电介质薄膜的外部薄膜部分，所述振动单元以n次谐波（n为2以上的整数）振动，上部电极和下部电极基本上设置在n次谐波的环路的位置。

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