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    • 3. 发明申请
    • FinFET Body Contact Structure
    • FinFET主体接触结构
    • US20070202659A1
    • 2007-08-30
    • US11696331
    • 2007-04-04
    • Richard DonzeKarl EricksonWilliam HovisTerrance KueperJohn SheetsJon Tetzloff
    • Richard DonzeKarl EricksonWilliam HovisTerrance KueperJohn SheetsJon Tetzloff
    • H01L21/76
    • H01L29/785H01L21/84H01L27/1203H01L29/42384H01L29/66795
    • A FinFET body contact structure and a method for creating the FinFET body contact structure are disclosed. The body contact structure comprises a wide fin portion of a semiconductor fin, the wide fin portion having a polysilicon polygon shape formed on a top surface of the wide fin portion. The polysilicon polygon shape has a center area having no polysilicon. FinFETs are formed on two vertical surfaces of the wide fin portion and gates of the FinFETs are coupled to the polysilicon polygon shape. Top surfaces of the wide fin portion and the polysilicon polygon shape are silicided. Silicide bridging is prevented by sidewall spacers. All convex angles on the polysilicon polygon shape are obtuse enough to prevent creation of bridging vertices. The center area is doped of an opposite type from a source and a drain of an associated FinFET.
    • 公开了FinFET体接触结构和用于产生FinFET体接触结构的方法。 本体接触结构包括半导体鳍片的宽鳍片部分,宽鳍片部分形成在宽鳍片部分的顶表面上的多晶硅多边形形状。 多晶硅多晶形状具有不具有多晶硅的中心区域。 FinFET形成在宽鳍片部分的两个垂直表面上,并且FinFET的栅极耦合到多晶硅多边形形状。 宽鳍片部分和多晶硅多边形形状的顶表面被硅化。 通过侧壁间隔物防止硅化物桥接。 多晶硅多边形形状上的所有凸角都足够钝,以防止桥接顶点的产生。 中心区域与相关联的FinFET的源极和漏极相反地掺杂。