会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明授权
    • Encapsulation of closely spaced gate electrode structures
    • 密封间隔栅电极结构的封装
    • US08647952B2
    • 2014-02-11
    • US12974037
    • 2010-12-21
    • Peter BaarsRichard CarterAndy Wei
    • Peter BaarsRichard CarterAndy Wei
    • H01L21/336
    • H01L27/092H01L21/28512H01L21/823412H01L21/823425H01L21/823475H01L23/28H01L23/485H01L29/6656H01L29/66628H01L29/7834H01L29/7847H01L2924/0002H01L2924/00
    • Generally, the subject matter disclosed herein relates to sophisticated semiconductor devices and methods for forming the same, wherein the pitch between adjacent gate electrodes is aggressively scaled, and wherein self-aligning contact elements may be utilized to avoid the high electrical resistance levels commonly associated with narrow contact elements formed using typically available photolithography techniques. One illustrative embodiment includes forming first and second gate electrode structures above a semiconductor substrate, then forming a first layer of a first dielectric material adjacent to or in contact with the sidewalls of each of the first and second gate electrode structures. The illustrative method further includes a step of forming a second layer of a second dielectric material on the first layer, followed by forming a third layer of a third dielectric material on the second layer, wherein forming the third layer further comprises forming a first horizontal portion of the third layer above a surface of the semiconductor substrate between the first and second gate electrode structures.
    • 通常,本文公开的主题涉及复杂的半导体器件及其形成方法,其中相邻栅电极之间的间距被积极地缩放,并且其中可以利用自对准接触元件来避免通常与 使用通常可获得的光刻技术形成的窄接触元件。 一个说明性实施例包括在半导体衬底之上形成第一和第二栅电极结构,然后形成与第一和第二栅电极结构中的每一个的侧壁相邻或接触的第一电介质材料的第一层。 说明性方法还包括在第一层上形成第二电介质材料的第二层的步骤,随后在第二层上形成第三电介质材料的第三层,其中形成第三层还包括形成第一水平部分 在第一和第二栅电极结构之间的半导体衬底的表面上方的第三层。