专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06358124B1 Pad conditioner cleaning apparatus 有权
标题翻译：垫调节剂清洗装置
公开(公告)号：US06358124B1
公开(公告)日：2002-03-19
申请号：US09222180
申请日：1998-12-29
申请人： Raijiro Koga , Hiromi Tsuruta , Takashi Kumagai , Gee Hoey , Brian J. Brown , Boris Fishkin , Fred C. Redeker , Bruce Lu , Rex Lu , K. Y. Wang , Roland Shu
发明人： Raijiro Koga , Hiromi Tsuruta , Takashi Kumagai , Gee Hoey , Brian J. Brown , Boris Fishkin , Fred C. Redeker , Bruce Lu , Rex Lu , K. Y. Wang , Roland Shu
IPC分类号： B24B100
CPC分类号： B08B1/007 , B24B53/005 , B24B53/017 , H01L21/67051
摘要： A chemical mechanical polishing apparatus includes a pad conditioner having a conditioner head, a cleaning cup for receiving and cleaning the conditioner head of the pad conditioner, and a fluid dispenser for dispensing a cleaning fluid onto the conditioner head.
摘要翻译：化学机械抛光装置包括具有调节头的垫调节器，用于接收和清洁垫调节器的调节头的清洁杯，以及用于将清洁流体分配到调节头上的流体分配器。

2. 发明授权

US06217430B1 Pad conditioner cleaning apparatus 有权
标题翻译：垫调节剂清洗装置
公开(公告)号：US06217430B1
公开(公告)日：2001-04-17
申请号：US09184786
申请日：1998-11-02
申请人： Raijiro Koga , Hiromi Tsuruta , Takashi Kumagai , Gee Hoey , Brian J. Brown , Boris Fishkin , Fred C. Redeker
发明人： Raijiro Koga , Hiromi Tsuruta , Takashi Kumagai , Gee Hoey , Brian J. Brown , Boris Fishkin , Fred C. Redeker
IPC分类号： B24B2118
CPC分类号： H01L21/67051 , B08B1/007 , B24B53/005 , B24B53/017
摘要： A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.
摘要翻译：一种用于保持和清洁具有调节头的垫调节器的清洁杯，所述清洁杯包括用于在所述调理头的顶侧上喷射清洁溶液的喷嘴。清洁杯还包括从清洁杯的底部向上延伸的多个支撑销，以在其上接收调节头。

3. 发明授权

US5994914A Semiconductor testing device with redundant circuits 失效
标题翻译：具有冗余电路的半导体测试装置
公开(公告)号：US5994914A
公开(公告)日：1999-11-30
申请号：US900339
申请日：1997-07-25
申请人： Hiromi Tsuruta
发明人： Hiromi Tsuruta
IPC分类号： H01L21/66 , G01R31/311 , H01L21/82 , H01L21/822 , H01L27/04 , G01R31/28
CPC分类号： G01R31/311
摘要： In a semiconductor testing device, the defective data of a semiconductor device which is detected by a defective detection unit 1 are converted to address data on the basis of inherent information such as the cell size, the divisional size, etc. of the semiconductor device by an address conversion unit 2, and the address data are compared with a redundant circuit area of the semiconductor device to make a quality (defective or non-defective) judgment of the semiconductor device by a judgment unit 3, whereby when any defective exists in the semiconductor device, the judgment as to whether the defective is replaceable (relievable) by the redundant circuits can be more accurately performed.
摘要翻译：在半导体测试装置中，由缺陷检测单元1检测到的半导体器件的缺陷数据根据诸如半导体器件的单元尺寸，分区尺寸等的固有信息被转换为地址数据，地址转换单元2和地址数据与半导体器件的冗余电路区域进行比较，以通过判断单元3进行半导体器件的质量（有缺陷或无缺陷）判断，从而当存在缺陷存在于可以更准确地执行关于该冗余电路是否可替换（可解除）故障的判断。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式