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1. 发明授权

US06966997B1 Methods for patterning polymer films, and use of the methods 失效
标题翻译：图案化聚合物膜的方法和方法的使用
公开(公告)号：US06966997B1
公开(公告)日：2005-11-22
申请号：US09720259
申请日：2000-05-12
申请人： Olle Inganäs , Tobias Nyberg , Tomas Granlund
发明人： Olle Inganäs , Tobias Nyberg , Tomas Granlund
IPC分类号： C08J7/04 , B41C1/06 , C08G65/22 , C08J7/00 , G03F7/00 , H01L51/00 , H01L51/30 , H01L51/40 , B44C1/24
CPC分类号： H01L51/0023 , B41C1/06 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L51/0017 , H01L51/0037
摘要： In a method for patterning a polymer film forming a coating on a material surface, a thin film of polymer is deposited on the surface and the patterning takes place by applying to the material surface a stamp made of an elastomeric material in conformal contact with the surface of the thin film, such that portions thereof contacting one or more protruding elements of the elastomeric stamp formed by one or more indentations thereof, are attached to the protruding element or elements and removed from the material surface with the stamp. In a method for transferring a patterned polymer film onto a material surface, a thin film polymer is deposited on a stamp surface and the stamp is applied in conformal contact with the material surface, such that thin film of polymer is transferred thereto from one or more protruding elements of the elastomeric stamp formed by at least one indentation thereof, thus leaving a patterned thin film of polymer on the material surface when removing the stamp therefrom. Use for patterning an etched resist in the form of a thin film of polymer on a gold layer.
摘要翻译：在用于图案化在材料表面上形成涂层的聚合物膜的方法中，聚合物薄膜沉积在表面上，并且通过向材料表面施加由表面保形接触的弹性体材料制成的印模来进行图案化使得其与由一个或多个凹部形成的弹性体印模的一个或多个突出元件接触的部分附接到突出元件，并用印模从材料表面移除。在将图案化聚合物膜转移到材料表面上的方法中，将薄膜聚合物沉积在印模表面上，并且印模与材料表面保形接触地施加，使得聚合物薄膜从一个或多个由其至少一个压痕形成的弹性体印模的突出元件，从而当从其上移除印模时，在材料表面上留下图案化的聚合物薄膜。用于在金层上形成聚合物薄膜形式的蚀刻抗蚀剂。

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