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1. 发明专利

JPH0763634A METHOD FOR MEASURING EXTERNAL LEAKING AMOUNT 失效
公开(公告)号：JPH0763634A
公开(公告)日：1995-03-10
申请号：JP20978093
申请日：1993-08-24
申请人： OMI TADAHIRO , OSAKA OXYGEN IND , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , OKI ATSUSHI , SUGANO YOICHI
IPC分类号： G01M3/20
摘要： PURPOSE:To measure an external leaking amount simply with high sensitivity by measuring components of a second gas included in a first gas passing through a measuring part for measuring the external leaking amount. CONSTITUTION:A leaking amount from a leaking point 101 manufactured by an MCG joint (metallic C ring) is first measured at an He leak detector 102. An H2/Ar gas 104 is supplied to the leaking point 101 having the leaking amount already detected by the He leak detector 102. An amount of N2 and O2 components included in the H2/Ar gas 104 passing through the leaking point is measured by an AP1HS 103. When the AP1MS is used, it is preferable to mix hydrogen in the first gas because a detecting sensitivity is poor only with the Ar, and a concentration of H2 in the H2/Ar gas is desirably not smaller than 1ppm.

2. 发明专利

JPS6351918A GAS PURIFIER FOR SEMI-CONDUCTOR MANUFACTURING DEVICE 失效
公开(公告)号：JPS6351918A
公开(公告)日：1988-03-05
申请号：JP19662186
申请日：1986-08-22
申请人： OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , UCHISAWA OSAMU
IPC分类号： B01D46/10 , B01D46/24 , B01D50/00 , B01D53/04 , C30B25/14 , H01L21/205
摘要： PURPOSE:To grade up purity of gas fed into a reaction chamber by providing, from the flow inlet to the flow outlet side, a first filter, an adsorbent for remov ing impure gas and a high-density second filter for collecting fine particles in a housing. CONSTITUTION:Gas coming from a flow inlet 6 of a housing 2 passes through a plate-shaped first filter 11, and water content and carbon dioxide gas are removed by an adsorbent 9 (for example, zeolite or the like) for removing impure gas, and fine particles such as fine dust, water particles, foreign matters and the like are collected by a following second filter 12. The second filter is constituted of ceramics, metal and the like, and is of high density of around 0.1mu mesh. High-purity gas coming out of the second filter 12 is exhausted out of a flow outlet 7 and transferred to a reaction chamber for semi-conductor manufacturing process.

3. 发明专利

JPS62258276A STOP VALVE 失效
公开(公告)号：JPS62258276A
公开(公告)日：1987-11-10
申请号：JP10329186
申请日：1986-05-06
申请人： NERIKI KK , OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , YONEZAWA KEITARO , DAICHO NORIO , NITTA JIRO , MIYAZAKI KOJI , MIYOSHI HAJIME
IPC分类号： F16K35/00
摘要： PURPOSE:To protect a handle from being brought into contact with other matter by inserting the handle removably in the axial direction into the input section of a drive screw member while providing a restricting means of an anti-removal chip for the handle together with an intermediate transmission tool. CONSTITUTION:A handle 7 of a stop valve 5 is fastened through rotation so as to screw a drive screw member 25 against a valve box 9. The handle 7 is inserted rollably and removably in the axial direction into an input section 25a of the drive screw member 25 while a spring S and an intermediate transmission tool 26 are arranged in a valve close thrust transmission system T. A restricting means 35 of an anti-removal chip 29 for the handle 7 is provided across the drive screw member 25 and the intermediate transmission tool 26. Since the handle can be removed under closed condition of the stop valve, it is protected from being brought into contact with other matter.

4. 发明专利

JPS62258269A STOP VALVE 失效
公开(公告)号：JPS62258269A
公开(公告)日：1987-11-10
申请号：JP10329086
申请日：1986-05-06
申请人： NERIKI KK , OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , YONEZAWA KEITARO , DAICHO NORIO , NITTA JIRO , MIYAZAKI KOJI , MIYOSHI HAJIME
IPC分类号： F16K1/02 , F16K41/12
摘要： PURPOSE:To prevent over fastening of handle by feeling the encounter of a valve face with a proper closing contact force in the way of open valve operation. CONSTITUTION:A handle 4 of a stop valve 1 is rotary fastened to drive a screw member 3 so as to close contact a valve face 14 against a valve seat 7a. Here, a spring S for close contacting the valve face 14 against the valve seat 7a with a proper force is arranged in a valve thrust transmission system T between the drive screw member 3 and a valve body 12. With such arrangement, over fastening of handle, loosening of drive screw member due to vibration and leakage of fluid due to the deformation of valve seat or valve face during valve close operation can be prevented.

5. 发明专利

JPH08288225A GAS INTRODUCTION PIPE DEVICE 失效
公开(公告)号：JPH08288225A
公开(公告)日：1996-11-01
申请号：JP9285495
申请日：1995-04-18
申请人： FRONTEC INC , OSAKA OXYGEN IND , MOTOYAMA ENG WORKS
发明人： FUKUDA KOICHI , FUKUI HIROFUMI , IWASAKI CHISATO , MIZOGAMI SATOSHI , SUGANO YOICHI , MURAKAMI KOICHI
IPC分类号： F16L55/07 , H01L21/205
摘要： PURPOSE: To obtain a gas introduction pipe device by which the mixture amount of a gas used in the previous process with gas to be used in the next process is reduced remarkably by a method wherein confluence parts are divided for respective source gases and a common gas line is connected to the respective confluence parts via respective valves. CONSTITUTION: When a mixed gas of N2 , NH3 and SiH4 is supplied, valves V1 , V2 , V31 , V5 , V6 , V7 are opened, valves V32 , V4 , V8 are closed, and N2 , NH3 and SiH4 are introduced from respective gas introduction ports 1a, 1b, 1c. The N2 , the NH3 and the SiH4 are passed respectively through an MFC(a mass flow controller) and introduction lines L1 , L2 , L31 . Then, they are mixed in a mixing part 6a so as to become a first use gas. The first use gas is discharged to an exhaust line 9 through a common gas line 5 and a use point 7.

6. 发明专利

JPH08312812A DIAPHRAGM VALVE 失效
公开(公告)号：JPH08312812A
公开(公告)日：1996-11-26
申请号：JP12024095
申请日：1995-05-18
申请人： MOTOYAMA ENG WORKS
发明人： SUGANO YOICHI , UCHISAWA OSAMU , HATAYAMA TADAHIRO
IPC分类号： F16K7/16
摘要： PURPOSE: To prevent such a phenomenon that a very small amount of fluid is led to flow backward so that a stagnant part may not remain in a channel in a valve, by providing a lower diaphragm to the lower part of an upper diaphragm so that the volumetric change of fluid due to the membrane movement of the upper diaphragm by which the valve is opened and closed is absorbed in the valve. CONSTITUTION: A lower diaphragm 116 is backed up by a spring 118, and deformed by the reactive force of the spring 118 when an upper diaphragm 114 is opened. When the upper diaphragm 114 is closed, the driving force of a valve is stronger than the spring 118, the upper diaphragm 114 is pushed down by a connecting rod 119, and a part where the upper diaphragm 114 is deformed can be absorbed by the lower diaphragm 116. Therefore, for example, when a very small flow amount is controlled by a gas supply system or when liquid flow amount is controlled, reverse flow from the valve to a flow meter can be prevented so that the control can be carried out with excellent accuracy.

7. 发明专利

JPH0527791B2 失效
公开(公告)号：JPH0527791B2
公开(公告)日：1993-04-22
申请号：JP25851586
申请日：1986-10-31
申请人： MOTOYAMA ENG WORKS
发明人： OOMI TADAHIRO , SUGANO YOICHI , UCHISAWA OSAMU , SATO KAZUHIKO
IPC分类号： F16K7/12 , F16K7/14 , F16K7/16 , F16K41/12

8. 发明专利

JPH0251671A METAL DIAPHRAGM VALVE 失效
公开(公告)号：JPH0251671A
公开(公告)日：1990-02-21
申请号：JP20000888
申请日：1988-08-12
申请人： MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , SATO KAZUHIKO , HATAYAMA TADAHIRO
IPC分类号： F16K7/16
摘要： PURPOSE:To enhance sealing performance by providing an elastic pressing member between a valve spindle and a metal diaphragm, so that the metal diaphragm can be pressedly brought into contact with the valve seat with a uniform sealing surface pressure. CONSTITUTION:A metal diaphragm 7 is arranged so as to be opposite to the valve seat 6 having been formed in the valve box having an inflow passage 3 and an outflow passage 4. On the back side of the metal diaphragm 7, a valve spindle 11 is arranged via an elastically deformable pressing member 13. Thus, when the valve spindle 11 is pressed down by means of a screw 10, the metal diaphragm 7 is pressedly brought into contact with the valve seat with a uniform sealing surface pressure via the elastic member 13, thereby sealing performance can be enhanced.

9. 发明专利

JPH11118044A ECCENTRIC TYPE ROTARY VALVE 失效
公开(公告)号：JPH11118044A
公开(公告)日：1999-04-30
申请号：JP30377097
申请日：1997-10-17
申请人： MOTOYAMA ENG WORKS
发明人： KANNO KOICHI , SUGANO YOICHI
IPC分类号： F16K1/20
摘要： PROBLEM TO BE SOLVED: To increase valve capacity Cv value and improve valve performance. SOLUTION: A valve main body 11 has a valve chamber 19 and a flow passage 20 penetrating this valve chamber 19 inside the main body. A valve shaft 12 is extended in the direction crossing the flow passage 20 and penetrates the valve main body 11. One end of the valve shaft 12 is arranged in the valve chamber 19. A valve seat 13 with a valve hole is provided in the inlet of the valve chamber of the flow passage 20. A valve plug 15 is overhangingly attached to one end of the valve shaft 12. The valve plug 15 is provided in the valve chamber 19 so as to open and close a valve hole caused by the rotation of the valve shaft 12.

10. 发明专利

JPH07279900A VACUUM GENERATOR 失效
公开(公告)号：JPH07279900A
公开(公告)日：1995-10-27
申请号：JP7336294
申请日：1994-04-12
申请人： MOTOYAMA ENG WORKS
发明人： UCHISAWA OSAMU , KIYONO FUMIYUKI , SUGANO YOICHI
IPC分类号： F04F5/20 , F04F5/44
摘要： PURPOSE:To facilitate the gas purge by increasing the ultimate vacuum degree by a vacuum generator, and by decreasing variation in the ultimate vacuum degree caused by variation in pressure of purge gas flowing through an orifice in the vacuum generator. CONSTITUTION:In a vacuum generator 6 in which a nozzle member 14 is located in a purge gas passage, and a suction passage 18 merging with the purge gas passage is formed downstream of the nozzle 17, a second nozzle 17 is composed of a tapered introduction part 23 having a diameter increased toward the nozzle member 14, an apporachway part 24 linearly extending from the downstream side of the introduction part 23 and having a constant cross-section, and a tapered outlet part 25 having a diameter which is enlarged downstream from the downstream end of the approachway part 24. Further, the introduction part 23 is formed to have a large size so as to include therein the prolonging line of a nozzle hole 21 in the nozzle member 41.

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