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1. 发明专利

JPS62258269A STOP VALVE 失效
公开(公告)号：JPS62258269A
公开(公告)日：1987-11-10
申请号：JP10329086
申请日：1986-05-06
申请人： NERIKI KK , OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , YONEZAWA KEITARO , DAICHO NORIO , NITTA JIRO , MIYAZAKI KOJI , MIYOSHI HAJIME
IPC分类号： F16K1/02 , F16K41/12
摘要： PURPOSE:To prevent over fastening of handle by feeling the encounter of a valve face with a proper closing contact force in the way of open valve operation. CONSTITUTION:A handle 4 of a stop valve 1 is rotary fastened to drive a screw member 3 so as to close contact a valve face 14 against a valve seat 7a. Here, a spring S for close contacting the valve face 14 against the valve seat 7a with a proper force is arranged in a valve thrust transmission system T between the drive screw member 3 and a valve body 12. With such arrangement, over fastening of handle, loosening of drive screw member due to vibration and leakage of fluid due to the deformation of valve seat or valve face during valve close operation can be prevented.

2. 发明专利

JPS62258276A STOP VALVE 失效
公开(公告)号：JPS62258276A
公开(公告)日：1987-11-10
申请号：JP10329186
申请日：1986-05-06
申请人： NERIKI KK , OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , YONEZAWA KEITARO , DAICHO NORIO , NITTA JIRO , MIYAZAKI KOJI , MIYOSHI HAJIME
IPC分类号： F16K35/00
摘要： PURPOSE:To protect a handle from being brought into contact with other matter by inserting the handle removably in the axial direction into the input section of a drive screw member while providing a restricting means of an anti-removal chip for the handle together with an intermediate transmission tool. CONSTITUTION:A handle 7 of a stop valve 5 is fastened through rotation so as to screw a drive screw member 25 against a valve box 9. The handle 7 is inserted rollably and removably in the axial direction into an input section 25a of the drive screw member 25 while a spring S and an intermediate transmission tool 26 are arranged in a valve close thrust transmission system T. A restricting means 35 of an anti-removal chip 29 for the handle 7 is provided across the drive screw member 25 and the intermediate transmission tool 26. Since the handle can be removed under closed condition of the stop valve, it is protected from being brought into contact with other matter.

3. 发明专利

JPH0763634A METHOD FOR MEASURING EXTERNAL LEAKING AMOUNT 失效
公开(公告)号：JPH0763634A
公开(公告)日：1995-03-10
申请号：JP20978093
申请日：1993-08-24
申请人： OMI TADAHIRO , OSAKA OXYGEN IND , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , OKI ATSUSHI , SUGANO YOICHI
IPC分类号： G01M3/20
摘要： PURPOSE:To measure an external leaking amount simply with high sensitivity by measuring components of a second gas included in a first gas passing through a measuring part for measuring the external leaking amount. CONSTITUTION:A leaking amount from a leaking point 101 manufactured by an MCG joint (metallic C ring) is first measured at an He leak detector 102. An H2/Ar gas 104 is supplied to the leaking point 101 having the leaking amount already detected by the He leak detector 102. An amount of N2 and O2 components included in the H2/Ar gas 104 passing through the leaking point is measured by an AP1HS 103. When the AP1MS is used, it is preferable to mix hydrogen in the first gas because a detecting sensitivity is poor only with the Ar, and a concentration of H2 in the H2/Ar gas is desirably not smaller than 1ppm.

4. 发明专利

JPS6351918A GAS PURIFIER FOR SEMI-CONDUCTOR MANUFACTURING DEVICE 失效
公开(公告)号：JPS6351918A
公开(公告)日：1988-03-05
申请号：JP19662186
申请日：1986-08-22
申请人： OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , UCHISAWA OSAMU
IPC分类号： B01D46/10 , B01D46/24 , B01D50/00 , B01D53/04 , C30B25/14 , H01L21/205
摘要： PURPOSE:To grade up purity of gas fed into a reaction chamber by providing, from the flow inlet to the flow outlet side, a first filter, an adsorbent for remov ing impure gas and a high-density second filter for collecting fine particles in a housing. CONSTITUTION:Gas coming from a flow inlet 6 of a housing 2 passes through a plate-shaped first filter 11, and water content and carbon dioxide gas are removed by an adsorbent 9 (for example, zeolite or the like) for removing impure gas, and fine particles such as fine dust, water particles, foreign matters and the like are collected by a following second filter 12. The second filter is constituted of ceramics, metal and the like, and is of high density of around 0.1mu mesh. High-purity gas coming out of the second filter 12 is exhausted out of a flow outlet 7 and transferred to a reaction chamber for semi-conductor manufacturing process.

5. 发明专利

JPS6367489A CONNECTOR FOR METALLIC TOOL AND NONMETALLIC TOOL 失效
公开(公告)号：JPS6367489A
公开(公告)日：1988-03-26
申请号：JP21305386
申请日：1986-09-10
申请人： OMI TADAHIRO , MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , HATAYAMA TADAHIRO
IPC分类号： F16L23/036 , F16L23/02 , F16L49/00

6. 发明专利

JPH0251671A METAL DIAPHRAGM VALVE 失效
公开(公告)号：JPH0251671A
公开(公告)日：1990-02-21
申请号：JP20000888
申请日：1988-08-12
申请人： MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , SATO KAZUHIKO , HATAYAMA TADAHIRO
IPC分类号： F16K7/16
摘要： PURPOSE:To enhance sealing performance by providing an elastic pressing member between a valve spindle and a metal diaphragm, so that the metal diaphragm can be pressedly brought into contact with the valve seat with a uniform sealing surface pressure. CONSTITUTION:A metal diaphragm 7 is arranged so as to be opposite to the valve seat 6 having been formed in the valve box having an inflow passage 3 and an outflow passage 4. On the back side of the metal diaphragm 7, a valve spindle 11 is arranged via an elastically deformable pressing member 13. Thus, when the valve spindle 11 is pressed down by means of a screw 10, the metal diaphragm 7 is pressedly brought into contact with the valve seat with a uniform sealing surface pressure via the elastic member 13, thereby sealing performance can be enhanced.

7. 发明专利

JPH07111247A SPECIFIC GAS SUPPLY CONTROLLER 失效
公开(公告)号：JPH07111247A
公开(公告)日：1995-04-25
申请号：JP25541493
申请日：1993-10-13
申请人： MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , UCHISAWA OSAMU , MURAKAMI KOICHI
IPC分类号： B65G53/04 , B65G53/06 , C23C16/52 , F17D1/04 , H01L21/205
摘要： PURPOSE:To facilitate the highly accurate timing control to change the supply sate of a specific gas which is made to flow in accordance with the opening/ closing states of a plurality of gas pressure operating valves which respond to a plurality of solenoid valves operated time-sequentially. CONSTITUTION:A plurality of gas tubes 9a-9c are connected between the respective valve unit parts 4ao-4eo of a plurality of solenoid valves 4A-4E and the respective driving parts 8ai-8ei of a plurality of gas pressure operating valves 8A-8E to drive the respective driving parts 8ai-8ei. The respective inner capacities of the gas tubes 9a-9c are determined in accordance with the operating times of the respective gas pressure operating valves 8A-8E. Therefore, when a gas supply state is switched from the supply state of one specific gas to the supply state of another specific gas, the supply state in which both gases are mixed can be avoided, so that the timing of the changeover can be controlled with a high accuracy.

8. 发明专利

JPH06300148A DIAPHRAGM TYPE VALVE 失效
公开(公告)号：JPH06300148A
公开(公告)日：1994-10-28
申请号：JP8424493
申请日：1993-04-12
申请人： MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , MIZOGAMI SATOSHI , SUGANO YOICHI
IPC分类号： F16J3/02 , F16K7/17
摘要： PURPOSE:To provide a diaphragm type valve which is constituted to facilitate prevention of contamination of fluid during contact with fluid, prevention of corrosion of a part making contact with fluid, and prevention of the occurrence of parasitism of microorganisms. CONSTITUTION:By applying thermal oxidation passivation treatment of a valve body 2 and the outermost surface of a diaphragm 3, film layers 2A and 3A are formed. Since a material is hardly emitted from the film layers 2A and 3A themselves, contamination of contacting fluid is prevented from occurring and emission of a material from a lower layer part is suppressed. Meanwhile, corrosion resistance against various kinds of fluid is excellent and parasitism of microorganism can be suppressed.

9. 发明专利

JPS62110737A MIXING APPARATUS FOR ULTRA-HIGH PURITY GAS 失效
公开(公告)号：JPS62110737A
公开(公告)日：1987-05-21
申请号：JP25070085
申请日：1985-11-11
申请人： MOTOYAMA ENG WORKS
发明人： SUGANO YOICHI , UCHISAWA OSAMU , OMI TADAHIRO
IPC分类号： B01F3/02 , B01F5/00
摘要： PURPOSE:To obtain the titled apparatus preventing pollution by connecting plural mixing valves consisting of two pieces of on-of valves to a common flow path via an outflow path having minimum volume and connecting a common flow path of the mixing valve in an upstream side to the other inflow path of the mixing valve in a downstream side. CONSTITUTION:The mixing valves 24 are connected to the feed lines 20 of the ultra-high purity gases A-F. The mixing valves 24 have two pieces of on-off valves 25, 26 and are provided with the inflow paths 27, 28 and the outflow paths 29, 30 having minimum inner volume. In this constitution, for example, in case of mixing the gases B, D [(a)-(f) are given in accordance with the gases A-F], the on-off valves 25a, 25b, 26b, 25c and 26d are opened and the other on-off valves are wholly closed. In this state, gas B is led to a flow path 33 of gaseous mixture via the on-off valves 26b, 25a. On the other hand, gas D is mixed with gas B in a common flow path 31b via the on-off valves 26d, 25c, 25b. Only the on-off valve 26b is connected in parallel and the flow path of a downstream side wherein the gases B, D are passed is interrupted for the flow path in an upstream side by means of the on-off valve 25d.

10. 发明专利

JPH034928A GAS SUPPLY APPARATUS 失效
公开(公告)号：JPH034928A
公开(公告)日：1991-01-10
申请号：JP13608889
申请日：1989-05-31
申请人： MOTOYAMA ENG WORKS
发明人： OMI TADAHIRO , SUGANO YOICHI , MURAOKA AKIRA
IPC分类号： F17D1/04 , B01J4/00 , C23C16/44 , C23C16/448 , C23C16/455 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To make gas permeation, occlusion, and discharge be minimum and prevent degrading the gas purity by using a metallic material for the whole parts of a gas flow pipe which comes into contact with a gas in a highly pure gas supplying apparatus. CONSTITUTION:In a superhigh pure gas supplying apparatus, the whole parts of a gas flow pipe which comes into contact with a gas is made of a metallic material such as stainless steel. As a result, gas permeation, occlusion, and discharge as well as formation of metal superfine particles and deterioration of used materials are restricted to low degree, and degrading the gas is prevented. The gas supply apparatus is thus suitable for handling superhigh pure gases used in fabrication of semiconductor devices.

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