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    • 8. 发明申请
    • Method for producing single electron semiconductor element
    • 单电子半导体元件的制造方法
    • US20080108227A1
    • 2008-05-08
    • US11878691
    • 2007-07-26
    • Shinya KumagaiShigeo YoshiiNozomu MatsukawaIchiro Yamashita
    • Shinya KumagaiShigeo YoshiiNozomu MatsukawaIchiro Yamashita
    • H01L21/28
    • H01L29/7613B82Y10/00H01L29/66439H01L49/006Y10S438/962Y10S977/773
    • The present invention provides a method for production of a single electron semiconductor element (SET) in which a quantum dot is selectively arranged in a nano gap between fine electrodes, whereby the product yield is significantly improved, leading to excellent practical applicability. The method for production of SET of the present invention is characterized in that a solution containing ferritin including a metal or semiconductor particle therein, and a nonionic surfactant is dropped on a substrate having a source electrode and a drain electrode formed by laminating a titanium film and a film of a metal other than titanium, whereby the ferritin is selectively arranged in a nano gap between the source electrode/drain electrode. In the method for production of SET of the present invention, the metal or semiconductor particle can be fixed as a quantum dot at a suitable position in the nano gap between the source electrode/drain electrode following decomposition of ferritin, and in addition, formation of unnecessary quantum dot can be suppressed.
    • 本发明提供一种单电子半导体元件(SET)的制造方法,其中量子点选择性地排列在细电极之间的纳米间隙中,从而显着提高了产品产率,从而实现了优异的实用性。 本发明的SET的制造方法的特征在于,将含有金属或半导体粒子的铁蛋白和非离子表面活性剂的溶液滴落在具有源极电极和漏电极的基板上,所述源极和漏极通过层叠钛膜和 除钛以外的金属的膜,由此铁素体选择性地排列在源电极/漏电极之间的纳米间隙中。 在本发明的SET的制造方法中,金属或半导体粒子可以在铁蛋白分解后的源电极/漏电极之间的纳米间隙的适当位置作为量子点固定,另外,形成 可以抑制不必要的量子点。