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    • 8. 发明授权
    • Direct tunneling memory with separated transistor and tunnel areas
    • 具有分离晶体管和隧道区域的直接隧道存储器
    • US07462539B2
    • 2008-12-09
    • US11892872
    • 2007-08-28
    • Kouji TsunodaTatsuya UsukiMasao Taguchi
    • Kouji TsunodaTatsuya UsukiMasao Taguchi
    • H01L21/00H01L21/20
    • H01L27/11526G11C16/0416H01L27/105H01L27/11543H01L29/0692H01L29/7883
    • A semiconductor device has: an isolation region formed on a semiconductor substrate and defining a continuous active region including a select transistor region and a direct tunnel element region; a gate insulating film formed on a channel region of the select transistor region; a tunnel insulating film formed on a partial area of the direct tunnel element region and having a thickness different from a thickness of the gate insulating film; a continuous floating gate electrode formed above the gate insulating film and the tunnel insulating film; an inter-electrode insulating film formed on a surface of the floating gate electrode; a control gate electrode facing the floating gate electrode via the inter-electrode insulating film; and a pair of source/drain regions formed on both sides of the channel region of the select transistor region and not overlapping the tunnel insulating film.
    • 半导体器件具有形成在半导体衬底上的隔离区域,并且限定包括选择晶体管区域和直接隧道元件区域的连续有源区域; 形成在所述选择晶体管区域的沟道区上的栅极绝缘膜; 隧道绝缘膜,其形成在所述直接隧道元件区域的部分区域上,并且具有与所述栅极绝缘膜的厚度不同的厚度; 形成在栅极绝缘膜和隧道绝缘膜上方的连续浮栅; 形成在所述浮栅电极的表面上的电极间绝缘膜; 通过所述电极间绝缘膜与所述浮栅相对的控制栅电极; 以及形成在选择晶体管区域的沟道区域的两侧并且不与隧道绝缘膜重叠的一对源极/漏极区域。
    • 9. 发明申请
    • Direct tunneling semiconductor memory device and fabrication process thereof
    • 直接隧道半导体存储器件及其制造工艺
    • US20060043464A1
    • 2006-03-02
    • US11012277
    • 2004-12-16
    • Kouji TsunodaTatsuya Usuki
    • Kouji TsunodaTatsuya Usuki
    • H01L29/788
    • H01L27/11521H01L27/115H01L29/42324H01L29/7883
    • A direct-tunneling semiconductor memory device includes a device isolation structure formed on a semiconductor substrate, including a device isolation trench and a device isolation insulation film filling the device isolation trench, a dielectric film covering both sidewall surfaces and a top surface of a floating gate electrode formed on the semiconductor substrate, a conductive part provided on the sidewall surfaces of the floating gate electrode via the dielectric film, the conductor part constituting a part of a control gate electrode, and first and second diffusion regions formed at respective lateral sides of the floating gate electrode, wherein the first and second diffusion regions are formed on a surface of the device isolation groove with offset from a region right underneath the floating gate electrode, the conductive part is formed in the device region with offset from the device isolation trench.
    • 直接隧道半导体存储器件包括形成在半导体衬底上的器件隔离结构,包括器件隔离沟槽和填充器件隔离沟槽的器件隔离绝缘膜,覆盖两个侧壁表面的电介质膜和浮动栅极的顶表面 形成在所述半导体基板上的电极,经由所述电介质膜设置在所述浮栅电极的侧壁面上的导电部,构成控制栅电极的一部分的导体部,以及形成在所述第一扩散区 浮置栅电极,其中所述第一和第二扩散区形成在所述器件隔离槽的表面上,偏离所述浮置栅电极正下方的区域,所述导电部分形成在所述器件区域中,偏离所述器件隔离沟槽。