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1. 发明授权

US06656752B1 Ion current density measuring method and instrument, and semiconductor device manufacturing method 失效
标题翻译：离子电流密度测量方法和仪器，以及半导体器件制造方法
公开(公告)号：US06656752B1
公开(公告)日：2003-12-02
申请号：US09890611
申请日：2001-10-11
申请人： Nobuyuki Mise , Tatehito Usui , Masato Ikegawa , Kazuo Nojiri , Kazuyuki Tsunokuni , Tetsuo Ono
发明人： Nobuyuki Mise , Tatehito Usui , Masato Ikegawa , Kazuo Nojiri , Kazuyuki Tsunokuni , Tetsuo Ono
IPC分类号： H01L2166
CPC分类号： H01L22/34
摘要： A wafer is exposed to a plasma. Here, the wafer includes a semiconductor or a conductor 1 provided on an insulator 6, an insulator 2 formed thereon and having a region the thickness of which has been made locally thin, and a 2nd conductor 4 provided on the insulator 2, one of the semiconductor or the conductor 1 and the 2nd conductor 4 having a 1st region from the surface of which a substantially total solid angle is formed, the other having a 2nd region a solid angle formed from the surface of which is made smaller than the 1st region. Then, a voltage is applied to the semiconductor or the conductor 1 and the 2nd conductor 4 so as to measure a time elapsing until the insulator 2 undergoes a dielectric breakdown. Moreover, the ion current density is determined from an electric charge required therefor and an area exposed onto the surface of the 2nd conductor 4. Consequently, it becomes possible to measure, on the wafer, the current density of the ions launched into the wafer, thereby allowing the measuring method of the icon current density to be made suitable for the mass production.
摘要翻译：将晶片暴露于等离子体。这里，晶片包括设置在绝缘体6上的半导体或导体1，形成在其上的绝缘体2，其厚度局部变薄的区域和设置在绝缘体2上的第二导体4，半导体或导体1和第二导体4具有从其表面基本上具有总立体角的第一区域，另一个具有从其表面形成的立体角小于第一区域的第二区域。然后，向半导体或导体1和第二导体4施加电压，以测量直到绝缘体2经历介电击穿的时间。此外，离子电流密度由其所需的电荷和暴露于第二导体4的表面的面积确定。因此，可以在晶片上测量发射到晶片中的离子的电流密度，从而允许图标电流密度的测量方法适合于批量生产。

2. 发明授权

US06427621B1 Plasma processing device and plasma processing method 失效
标题翻译：等离子体处理装置和等离子体处理方法
公开(公告)号：US06427621B1
公开(公告)日：2002-08-06
申请号：US09550169
申请日：2000-04-14
申请人： Masato Ikegawa , Tsutomu Tetsuka , Ichiro Sasaki , Tatehito Usui , Hironobu Kawahara
发明人： Masato Ikegawa , Tsutomu Tetsuka , Ichiro Sasaki , Tatehito Usui , Hironobu Kawahara
IPC分类号： C23C16511
CPC分类号： H01J37/32266 , C23C16/509 , H01J37/32192
摘要： In the plasma processing device for supplying electromagnetic waves to the first plate, generating plasma in the vacuum atmosphere between the first plate and the second plate which is arranged opposite to it, and processing the board loaded on the second plate, wherein the dielectric window for propagating electromagnetic waves is installed in the outer periphery of the first plate and in the window, the electromagnetic wave distribution corrector composed of an electrical conductor or a dielectric is embedded away from the first plate so that at least the side and bottom of the electromagnetic wave distribution corrector are not exposed in the aforementioned vacuum atmosphere. The electromagnetic wave distribution corrector corrects one-siding of the plasma density distribution at the center.
摘要翻译：在用于向第一板提供电磁波的等离子体处理装置中，在与其相对设置的第一板和第二板之间的真空气氛中产生等离子体，并且处理装载在第二板上的板，其中，传播电磁波被安装在第一板的外周和窗口中，由电导体或电介质组成的电磁波分布校正器被从第一板被嵌入，使得至少电磁波的侧面和底部分布校正器在上述真空气氛中不暴露。电磁波分布校正器校正了中心处等离子体密度分布的一面。

3. 发明授权

US4384831A Scroll-type fluid apparatus provided with means for counteracting a moment exerted on orbiting scroll member 失效
标题翻译：涡卷式流体设备设置有用于抵消作用在绕动涡旋件上的力矩的装置
公开(公告)号：US4384831A
公开(公告)日：1983-05-24
申请号：US149991
申请日：1980-05-15
申请人： Masato Ikegawa , Masaya Imai , Kenji Tojo , Masao Shiibayashi
发明人： Masato Ikegawa , Masaya Imai , Kenji Tojo , Masao Shiibayashi
IPC分类号： F04C18/02 , F01C1/02 , F01C21/00
CPC分类号： F01C21/003 , F01C1/0215
摘要： A scroll-type fluid apparatus including an orbiting scroll member, a stationary scroll member, and a plurality of pockets formed in at least one of the orbiting scroll member and the stationary scroll member to cooperate with the other scroll member for confining liquid therein. When an axially urging force is ecerted on the orbiting scroll member, a liquid pressure commensurate with the axially urging force is produced in the pockets, so that such liquid pressure cancels out a biased axially urging force (moment) exerted on the orbiting scroll member.
摘要翻译：一种涡旋式流体设备，包括绕动涡旋件，固定涡旋件和形成在所述绕动涡旋件和固定涡旋件中的至少一个中的多个袋，以与另一个涡旋件配合以限制其中的液体。当在旋转涡旋件上采用轴向推压力时，在口袋中产生与轴向推力相当的液体压力，使得这种液体压力消除了施加在绕动涡旋件上的偏压的轴向推动力（力矩）。

4. 发明授权

US07929246B2 Magnetic disk drive with spoiler 有权
标题翻译：带扰流板的磁盘驱动器
公开(公告)号：US07929246B2
公开(公告)日：2011-04-19
申请号：US11810267
申请日：2007-06-04
申请人： Keiichi Takemori , Masato Ikegawa , Hiroshi Mukai , Hiroyuki Ishii , Yukinobu Abe
发明人： Keiichi Takemori , Masato Ikegawa , Hiroshi Mukai , Hiroyuki Ishii , Yukinobu Abe
IPC分类号： G11B33/14 , G11B5/55
CPC分类号： G11B33/1473 , G11B25/043
摘要： Embodiments of the present invention prevent a magnetic disk drive from increasing in size and in manufacturing cost and reduces a positioning error of a magnetic head. An embodiment of a magnetic disk drive in accordance with the present invention includes: a disk-shaped magnetic disk that is rotated and driven; a magnetic head that reads and writes information to and from the magnetic disk, an arm that supports and moves the magnetic head; a spoiler that is close to a disk surface and extends in a radial direction of the disk; and a cabinet that houses these parts. The spoiler is disposed closer to an upstream side in a rotational direction of the disk than the arm and has a flow rate suppressing clearance positioned in a central portion in a peripheral direction of the spoiler, opened to both sides in an axial direction, and formed in a shape elongated in a radial direction of the disk.
摘要翻译：本发明的实施例防止了磁盘驱动器的尺寸和制造成本的增加，并降低了磁头的定位误差。根据本发明的磁盘驱动器的实施例包括：旋转和驱动的盘形磁盘; 从磁盘读取和写入信息的磁头，支撑并移动磁头的臂; 扰流器，其靠近盘表面并沿盘的径向方向延伸; 和一个装有这些部件的橱柜。该扰流板配置在比臂更靠近盘的旋转方向的上游侧，并且具有位于扰流器的周向的中心部分中的沿轴向两侧开口的流量抑制间隙，并形成在圆盘的径向方向上延伸的形状。

5. 发明申请

US20080043369A1 Magnetic disk drive 有权
标题翻译：磁盘驱动器
公开(公告)号：US20080043369A1
公开(公告)日：2008-02-21
申请号：US11810267
申请日：2007-06-04
申请人： Keiichi Takemori , Masato Ikegawa , Hiroshi Mukai , Hiroyuki Ishii , Yukinobu Abe
发明人： Keiichi Takemori , Masato Ikegawa , Hiroshi Mukai , Hiroyuki Ishii , Yukinobu Abe
IPC分类号： G11B5/127
CPC分类号： G11B33/1473 , G11B25/043
摘要： Embodiments of the present invention prevent a magnetic disk drive from increasing in size and in manufacturing cost and reduces a positioning error of a magnetic head. An embodiment of a magnetic disk drive in accordance with the present invention includes: a disk-shaped magnetic disk that is rotated and driven; a magnetic head that reads and writes information to and from the magnetic disk, an arm that supports and moves the magnetic head; a spoiler that is close to a disk surface and extends in a radial direction of the disk; and a cabinet that houses these parts. The spoiler is disposed closer to an upstream side in a rotational direction of the disk than the arm and has a flow rate suppressing clearance positioned in a central portion in a peripheral direction of the spoiler, opened to both sides in an axial direction, and formed in a shape elongated in a radial direction of the disk.
摘要翻译：本发明的实施例防止了磁盘驱动器的尺寸和制造成本的增加并降低了磁头的定位误差。根据本发明的磁盘驱动器的实施例包括：旋转和驱动的盘形磁盘; 从磁盘读取和写入信息的磁头，支撑并移动磁头的臂; 扰流器，其靠近盘表面并沿盘的径向方向延伸; 和一个装有这些部件的橱柜。该扰流板配置在比臂更靠近盘的旋转方向的上游侧，并且具有位于扰流器的周向的中心部分中的沿轴向两侧开口的流量抑制间隙，并形成在圆盘的径向方向上延伸的形状。

6. 发明授权

US4350479A Scrool-type fluid machine with liquid-filled force-balanced pockets 失效
标题翻译：斯洛酮式流体机械，具有充满液体的力平衡口袋
公开(公告)号：US4350479A
公开(公告)日：1982-09-21
申请号：US138730
申请日：1980-04-09
申请人： Kenji Tojo , Masato Ikegawa , Masao Shiibayashi , Masaya Imai
发明人： Kenji Tojo , Masato Ikegawa , Masao Shiibayashi , Masaya Imai
IPC分类号： F01C1/02 , F04C2/02 , F04C15/00 , F04C18/02 , F01C21/00
CPC分类号： F04C15/0042 , F04C2/025
摘要： A scroll-type fluid machine is provided with a plurality of liquid-confining pockets formed in the sliding surface of the end member of either one of orbiting and stationary scrolls. In operation, a high liquid pressure is generated in the pocket or pockets positioned in the region where a localized high axial urging force is exerted during operation, so that the localized high axial urging force acting on the two scrolls is partially or fully negated.
摘要翻译：一种涡旋式流体机械设置有形成在轨道和静止涡旋件中的任一个的端部构件的滑动表面中的多个液体限制口袋。在操作中，在位于在操作期间施加局部高的轴向推力的区域中的袋或袋中产生高液压，使得作用在两个涡卷上的局部高轴向推动力被部分或全部否定。

7. 发明授权

US07457078B2 Magnetic disk apparatus with reduced disk fluttering by placing a groove in the peripheral wall of the housing 失效
标题翻译：通过在壳体的周壁中放置凹槽来减少磁盘振动的磁盘装置
公开(公告)号：US07457078B2
公开(公告)日：2008-11-25
申请号：US11223462
申请日：2005-09-09
申请人： Masashi Fukaya , Yoshiyuki Hirono , Masato Ikegawa , Hiroshi Mukai
发明人： Masashi Fukaya , Yoshiyuki Hirono , Masato Ikegawa , Hiroshi Mukai
IPC分类号： G11B33/14
CPC分类号： G11B17/028
摘要： Embodiments of the invention reduce disk fluttering while ensuring good assemblability in a magnetic disk apparatus. A magnetic disk apparatus comprises a recording disk that is an information medium configured by one or plural disks; a motor causing the recording disk to rotate; a carriage supporting a head that records information to, or plays back information from, the recording disk; a casing housing the recording disk; and a shroud disposed surrounding an outer periphery of the recording disk. A groove that extends along the recording disk is formed, vertically asymmetrical with respect to an outer peripheral surface of the recording disk, in the shroud surface at a position where a corner portion formed by the outer peripheral surface and a top surface or bottom surface of the recording disk extends in a radial direction.
摘要翻译：本发明的实施例在确保磁盘装置中的良好的组装性的同时减少磁盘抖动。磁盘装置包括作为由一个或多个盘配置的信息介质的记录盘; 使记录盘旋转的马达; 支撑记录盘记录信息或从记录盘重播信息的头部的支架; 容纳记录盘的外壳; 以及围绕记录盘的外周围设置的护罩。沿着记录盘延伸的槽形成为相对于记录盘的外周表面垂直不对称的槽，在由外周表面形成的角部和顶表面或底表面的位置处的护罩表面中记录盘沿径向延伸。

8. 发明申请

US20050217570A1 Apparatus and method for producing single crystal 失效
标题翻译：单晶制造装置及方法
公开(公告)号：US20050217570A1
公开(公告)日：2005-10-06
申请号：US10517527
申请日：2003-06-12
申请人： Hirasawa Shigeki , Masato Ikegawa , Hiroyuki Ishibashi , Akihiro Gunji
发明人： Hirasawa Shigeki , Masato Ikegawa , Hiroyuki Ishibashi , Akihiro Gunji
IPC分类号： C30B15/00 , C30B1/00 , C30B15/14 , C30B35/00
CPC分类号： C30B35/00 , C30B15/14 , Y10T117/10 , Y10T117/1068 , Y10T117/1072 , Y10T117/1088
摘要： An apparatus having a crucible (1) for holding a raw material, a heating means (11) for heating the raw material in the crucible (1) and a crystal transporting means (17) for transporting a seed crystal (13) upwards from the inside of the crucible (1), which further comprises a heat conducting member (3) which extends upwards at least from the vicinity of the upper end of the crucible (1), surrounds a single crystal (15) formed, and is made of a material having heat conductivity, and an interface portion radiation heat blocking member (7) for blocking, at least during cooling after the formation of a single crystal, the radiation heat toward an upper portion above the interface between a taper portion (15a) of the formed single crystal (15) connecting with the seed crystal (13) and a straight bulge portion (15b) having a cylindrical shape connecting with the taper portion (15a) of the formed single crystal (15). The use of the apparatus reduces the temperature difference in the radius direction of the single crystal (15), resulting in the reduction of the occurrence of defects or cracks, which leads to the reduction of the fraction defective in production of single crystals.
摘要翻译：一种具有用于保持原料的坩埚（1）的装置，用于加热坩埚（1）中的原料的加热装置（11）和用于将晶种（13）向上运送的晶体输送装置（17）坩埚（1）的内部还包括至少从坩埚（1）的上端附近向上延伸的导热构件（3），围绕形成的单晶（15），并且由具有导热性的材料和界面部分辐射热阻构件（7），用于至少在形成单晶之后的冷却过程中，朝着锥形部分（15a）之间的界面上方的上部阻挡辐射热，与所述晶种（13）连接的所形成的单晶（15）和与形成的单晶（15）的锥形部分（15a）连接的圆柱形的直的凸起部分（15b）。使用该装置可以降低单晶（15）的半径方向的温度差，导致缺陷或裂纹的发生减少，导致单晶生成不良的部分的降低。

9. 发明授权

US4443166A Scroll fluid apparatus with an arcuate recess adjacent the stationary wrap 失效
标题翻译：涡形流体装置具有邻近固定包装的弧形凹槽
公开(公告)号：US4443166A
公开(公告)日：1984-04-17
申请号：US314459
申请日：1981-10-23
申请人： Masato Ikegawa , Kenji Tojo , Masao Shiibayashi
发明人： Masato Ikegawa , Kenji Tojo , Masao Shiibayashi
IPC分类号： F04C2/02 , F01C1/02 , F01C21/00 , F04C18/02
CPC分类号： F01C1/0215 , F01C21/003 , F04C2250/10 , F05B2250/50
摘要： A scroll fluid apparatus including two scroll members, with one scroll member having a wrap and an annular portion located outside the wrap and having a height corresponding to the height of the wrap. The annular portion is contiguous at its surface in the form of a land with the surface of the wrap for a circumferential extent of within 180 degrees from the terminating end of the wrap, and a strip-shaped recess is formed in the land, with the strip-shaped form having an end portion maintained in communication with a low pressure zone surrounded by the annular portion of the scroll member.
摘要翻译：一种涡卷流体装置，包括两个涡旋件，其中一个涡旋件具有一个卷绕件和位于该包装件外部的一个环形部分，并且其高度对应于包装的高度。环形部分在其表面以邻接形式的邻接部分与包裹物的表面邻接，其周边范围与包装的终止端在180度之内，并且在该区域中形成条形凹部，带状形状具有保持与由涡旋构件的环形部分包围的低压区连通的端部。

10. 发明授权

US08077431B2 Apparatus and method for reducing turbulence of airflow in a hard disk drive 有权
标题翻译：用于减少硬盘驱动器中气流湍流的装置和方法
公开(公告)号：US08077431B2
公开(公告)日：2011-12-13
申请号：US12975276
申请日：2010-12-21
申请人： Yukinobu Abe , Andre S. Chan , Ferdinand Hendriks , Masato Ikegawa , Hiroshi Mukai , Keiichi Takemori
发明人： Yukinobu Abe , Andre S. Chan , Ferdinand Hendriks , Masato Ikegawa , Hiroshi Mukai , Keiichi Takemori
IPC分类号： G11B33/14
CPC分类号： G11B33/148 , G11B5/82 , G11B33/142
摘要： A sickle-shaped disk drive spoiler for reducing turbulence of airflow in a hard disk drive is provided. The sickle-shaped spoiler is configured to direct airflow generated by a rotating disk and includes a tapered first end portion configured to direct the airflow toward the inner diameter of the disk and to reduce the airflow on the side of the disk opposing the spoiler.
摘要翻译：提供了一种用于减少硬盘驱动器中气流湍流的镰刀状磁盘驱动器扰流板。镰形扰流板被配置为引导由旋转盘产生的气流，并且包括锥形的第一端部部分，其构造成将气流引向盘的内径并且减小与扰流板相对的盘的侧面上的气流。

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