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1. 发明授权

US09034152B2 Reactive sputtering apparatus 有权
标题翻译：反应溅射装置
公开(公告)号：US09034152B2
公开(公告)日：2015-05-19
申请号：US13310230
申请日：2011-12-02
申请人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Satoshi Uchino , Yoshimitsu Shimane
发明人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Satoshi Uchino , Yoshimitsu Shimane
IPC分类号： H01J37/34 , C23C14/00
CPC分类号： H01J37/3244 , C23C14/0063 , C23C14/0068 , H01J37/3405 , H01J37/3411 , H01J37/3441 , H01J37/3447 , H01J2237/3328
摘要： A reactive sputtering apparatus includes a chamber, a substrate holder provided in the chamber, a target holder which is provided in the chamber and configured to hold a target, a deposition shield plate which is provided in the chamber so as to form a sputtering space between the target holder and the substrate holder, and prevents a sputter particle from adhering to an inner wall of the chamber, a reactive gas introduction pipe configured to introduce a reactive gas into the sputtering space, an inert gas introduction port which introduces an inert gas into a space that falls outside the sputtering space and within the chamber, and a shielding member which prevents a sputter particle from the target mounted on the target holder from adhering to an introduction port of the reactive gas introduction pipe upon sputtering.
摘要翻译：反应性溅射装置包括室，设置在室中的基板保持器，设置在室中并构造成保持目标的目标保持器，设置在室中的沉积屏蔽板，以在第二区域之间形成溅射空间，目标保持架和基板支架，防止溅射粒子附着在室内壁;反应性气体引入管，被配置为将溅射空间引入反应气体;将惰性气体引入到惰性气体导入口落在溅射空间内部和室内的空间，以及防止溅射颗粒从溅射中安装在靶保持体上的靶的溅射粒子附着在反应性气体导入管的导入口上的屏蔽部件。

2. 发明申请

US20120152736A1 REACTIVE SPUTTERING APPARATUS 有权
标题翻译：反应溅射装置
公开(公告)号：US20120152736A1
公开(公告)日：2012-06-21
申请号：US13310230
申请日：2011-12-02
申请人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Satoshi Uchino , Yoshimitsu Shimane
发明人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Satoshi Uchino , Yoshimitsu Shimane
IPC分类号： C23C14/34
CPC分类号： H01J37/3244 , C23C14/0063 , C23C14/0068 , H01J37/3405 , H01J37/3411 , H01J37/3441 , H01J37/3447 , H01J2237/3328
摘要： A reactive sputtering apparatus includes a chamber, a substrate holder provided in the chamber, a target holder which is provided in the chamber and configured to hold a target, a deposition shield plate which is provided in the chamber so as to form a sputtering space between the target holder and the substrate holder, and prevents a sputter particle from adhering to an inner wall of the chamber, a reactive gas introduction pipe configured to introduce a reactive gas into the sputtering space, an inert gas introduction port which introduces an inert gas into a space that falls outside the sputtering space and within the chamber, and a shielding member which prevents a sputter particle from the target mounted on the target holder from adhering to an introduction port of the reactive gas introduction pipe upon sputtering.
摘要翻译：反应性溅射装置包括室，设置在室中的基板保持器，设置在室中并构造成保持目标的目标保持器，设置在室中的沉积屏蔽板，以在第二区域之间形成溅射空间，目标保持架和基板支架，防止溅射粒子附着在室内壁;反应性气体引入管，被配置为将溅射空间引入反应气体;将惰性气体引入到惰性气体导入口落在溅射空间内部和室内的空间，以及防止溅射颗粒从溅射中安装在靶保持体上的靶的溅射粒子附着在反应性气体导入管的导入口上的屏蔽部件。

3. 发明授权

US08147664B2 Sputtering apparatus 有权
标题翻译：溅射装置
公开(公告)号：US08147664B2
公开(公告)日：2012-04-03
申请号：US12787506
申请日：2010-05-26
申请人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Yukihiro Kobayashi
发明人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Yukihiro Kobayashi
IPC分类号： C23C14/34
CPC分类号： C23C14/564 , C23C14/34 , H01J37/34 , H01J37/3447
摘要： A sputtering apparatus includes a target holder which is placed in a vacuum vessel and can hold a target configured to deposit a film on a substrate, a substrate holder which can mount the substrate, a first shield member which is disposed in a vicinity of the substrate holder, and configured to form a closed state in which the substrate holder and the target holder are shielded from each other, or an open state in which the substrate holder and the target holder are opened to each other, a first opening/closing driving unit adapted to open/close the first shield member to enter the open state or the closed state, a second shield member, having an annular-shaped, disposed on the surface of the substrate holder and an outer peripheral portion of the substrate, and a driving unit adapted to move the substrate holder in order to bring the substrate holder, on which the second shield member is disposed, close to the first shield member in the closed state. The first shield member has at least one annular-shaped, first protruding portion formed on it to extend in the direction of the second shield member. The second shield member has at least one annular-shaped, second protruding portion formed on it to extend in the direction of the first shield member. The first protruding portion and the second protruding portion fit together in a non-contact state at the position up to which the driving unit brings the substrate holder close to the first shield member.
摘要翻译：溅射装置包括放置在真空容器中的靶保持器，并且可以将被配置为在基板上沉积膜的靶材，能够安装基板的基板保持器，设置在基板附近的第一屏蔽部件并且构造成形成其中基板保持器和目标保持器彼此被屏蔽的关闭状态或其中基板保持器和目标保持器彼此打开的打开状态;第一打开/关闭驱动单元适于打开/关闭第一屏蔽构件以进入打开状态或关闭状态，具有环形的第二屏蔽构件，设置在基板保持器的表面和基板的外周部分上，驱动适于移动衬底保持器的单元，以便使处于关闭状态的第二屏蔽构件所设置的衬底保持器靠近第一屏蔽构件。第一屏蔽构件具有形成在其上的至少一个环形的第一突出部分，以在第二屏蔽构件的方向上延伸。第二屏蔽构件具有形成在其上的至少一个环形的第二突出部分，以在第一屏蔽构件的方向上延伸。第一突出部分和第二突出部分在驱动单元使基板保持器靠近第一屏蔽构件的位置处以非接触状态配合在一起。

4. 发明申请

US20100243438A1 SPUTTERING APPARATUS 有权
标题翻译：溅射装置
公开(公告)号：US20100243438A1
公开(公告)日：2010-09-30
申请号：US12787506
申请日：2010-05-26
申请人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Yukihiro Kobayashi
发明人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Yukihiro Kobayashi
IPC分类号： C23C14/34
CPC分类号： C23C14/564 , C23C14/34 , H01J37/34 , H01J37/3447
摘要： A sputtering apparatus includes a target holder which is placed in a vacuum vessel and can hold a target configured to deposit a film on a substrate, a substrate holder which can mount the substrate, a first shield member which is disposed in a vicinity of the substrate holder, and configured to form a closed state in which the substrate holder and the target holder are shielded from each other, or an open state in which the substrate holder and the target holder are opened to each other, a first opening/closing driving unit adapted to open/close the first shield member to enter the open state or the closed state, a second shield member, having an annular-shaped, disposed on the surface of the substrate holder and an outer peripheral portion of the substrate, and a driving unit adapted to move the substrate holder in order to bring the substrate holder, on which the second shield member is disposed, close to the first shield member in the closed state. The first shield member has at least one annular-shaped, first protruding portion formed on it to extend in the direction of the second shield member. The second shield member has at least one annular-shaped, second protruding portion formed on it to extend in the direction of the first shield member. The first protruding portion and the second protruding portion fit together in a non-contact state at the position up to which the driving unit brings the substrate holder close to the first shield member.
摘要翻译：溅射装置包括放置在真空容器中的靶保持器，并且可以将被配置为在基板上沉积膜的靶材，能够安装基板的基板保持器，设置在基板附近的第一屏蔽部件并且构造成形成其中基板保持器和目标保持器彼此屏蔽的关闭状态或其中基板保持器和目标保持器彼此打开的打开状态;第一打开/关闭驱动单元适于打开/关闭第一屏蔽构件以进入打开状态或关闭状态，具有环形的第二屏蔽构件，设置在基板保持器的表面和基板的外周部分上，驱动适于移动衬底保持器的单元，以便使处于关闭状态的第二屏蔽构件所设置的衬底保持器靠近第一屏蔽构件。第一屏蔽构件具有形成在其上的至少一个环形的第一突出部分，以在第二屏蔽构件的方向上延伸。第二屏蔽构件具有形成在其上的至少一个环形的第二突出部分，以在第一屏蔽构件的方向上延伸。第一突出部分和第二突出部分在驱动单元使基板保持器靠近第一屏蔽构件的位置处以非接触状态配合在一起。

5. 发明申请

US20080213988A1 SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD 有权
标题翻译：基板加热装置和半导体制造方法
公开(公告)号：US20080213988A1
公开(公告)日：2008-09-04
申请号：US11951807
申请日：2007-12-06
申请人： Masami Shibagaki , Kenji Numajiri , Akihiro Egami , Akira Kumagai , Susumu Akiyama
发明人： Masami Shibagaki , Kenji Numajiri , Akihiro Egami , Akira Kumagai , Susumu Akiyama
IPC分类号： H01L21/425 , F26B19/00
CPC分类号： H01L29/7802 , H01L21/046 , H01L21/67103 , H01L21/67109 , H01L29/0878 , H01L29/66068
摘要： A substrate heating apparatus having a heating unit for heating a substrate placed in a process chamber which can be evacuated includes a suscepter which is installed between the heating unit and a substrate, and on which the substrate is mounted, and a heat receiving member which is installed to oppose the suscepter with the substrate being sandwiched between them, and receives heat from the heating unit via the suscepter. A ventilating portion which allows a space formed between the heat receiving member and substrate to communicate with a space in the process chamber is formed.
摘要翻译：具有用于加热放置在能够抽真空的处理室中的基板的加热单元的基板加热装置包括安装在加热单元和基板之间并且其上安装有基板的可变元件和安装成与夹在其间的基板相对的接收器，并且经由接收器从加热单元接收热量。形成通气部，其使形成在受热部件和基板之间的空间与处理室中的空间连通。

6. 发明授权

US06862508B2 Vehicle data communication system having supervised coordination of networks which control respective basic operating functions of vehicle 有权
标题翻译：车辆数据通信系统具有监控车辆基本操作功能的网络的协调
公开(公告)号：US06862508B2
公开(公告)日：2005-03-01
申请号：US10686660
申请日：2003-10-17
申请人： Susumu Akiyama , Tsutomu Tashiro
发明人： Susumu Akiyama , Tsutomu Tashiro
IPC分类号： B60R16/023 , B60R16/02 , F02D45/00 , F16H61/02 , G06F17/00 , H04L12/24 , H04L12/26 , H04L12/28 , H04L12/44 , H04L12/46
CPC分类号： H04L41/00 , H04L12/44
摘要： A vehicle LAN is formed of networks of ECUs with each network controlling a specific basic system of the vehicle such as the power train, and each network including a supervisory ECU with the supervisory ECUs able to mutually communicate via a high-level communication line. Each supervisory ECU coordinates the control operations of its own network, based on status information from that network and on control requests transmitted from other networks, so that only small amounts of data need be transferred within the system.
摘要翻译：车辆LAN由ECU的网络形成，每个网络控制诸如动力传动系的车辆的特定基本系统，并且每个网络包括具有能够经由高级通信线路相互通信的监督ECU的监控ECU。每个监督ECU基于来自该网络的状态信息和从其他网络发送的控制请求来协调其自身网络的控制操作，从而仅在系统内传送少量数据。

7. 发明授权

US06842108B2 Power supply integrated circuit having communication function 有权
标题翻译：电源集成电路具有通讯功能
公开(公告)号：US06842108B2
公开(公告)日：2005-01-11
申请号：US10158928
申请日：2002-06-03
申请人： Susumu Akiyama , Takayuki Toya
发明人： Susumu Akiyama , Takayuki Toya
IPC分类号： B60R16/023 , B60R16/02 , B60R16/03 , H04B1/713 , H04B1/715 , H04B15/02 , H04M11/04
CPC分类号： B60R16/0315 , Y10T307/258 , Y10T307/658
摘要： A power supply integrated circuit is provided which makes it possible to make an on-vehicle apparatus compact and to allow power supply cable communication having resistance to noise. The power supply integrated circuit is connected to a micro-controller incorporated in an ECU and a power supply cable. The power supply integrated circuit has an LPF and a regulator. The power supply integrated circuit also has an interface circuit, a BPF, a transmitting section, and a receiving section. The LPF passes only the power supply voltage, and the BPF passes only transmission signal.
摘要翻译：提供了一种电源集成电路，其使得可以使车载设备紧凑并且允许具有抗噪声的电源电缆通信。电源集成电路连接到并入ECU和电源电缆的微型控制器。电源集成电路具有LPF和调节器。电源集成电路还具有接口电路，BPF，发送部分和接收部分。 LPF仅通过电源电压，BPF仅传送传输信号。

8. 发明授权

US4864568A Communication control system 失效
标题翻译：通讯控制系统
公开(公告)号：US4864568A
公开(公告)日：1989-09-05
申请号：US109170
申请日：1987-10-14
申请人： Yoshihisa Sato , Yuji Hirabayashi , Susumu Akiyama , Katsunori Ito , Takao Saito
发明人： Yoshihisa Sato , Yuji Hirabayashi , Susumu Akiyama , Katsunori Ito , Takao Saito
IPC分类号： G01M17/007 , B60R16/02 , B60R16/03 , G05B23/02 , G06F11/20 , H04L1/06 , H04L1/22
CPC分类号： G06F11/2007 , H04L1/06 , H04L1/22 , B60R16/0315
摘要： Control units are mutually connected by separate common signal lines. A data link is provided between the control units via a preselected one of the common signal lines. A check is made as to whether the preselected common signal line is operating normally or abnormally. When the preselected common signal line is operating abnormally, the preselected common signal line is replaced by another common signal line in the data link.
摘要翻译：控制单元通过单独的公共信号线相互连接。在控制单元之间经由预选的公共信号线之一提供数据链路。检查预选的公共信号线是正常还是异常运行。当预选的公共信号线工作异常时，预选的公共信号线由数据链路中的另一条公共信号线替代。

9. 发明授权

US4713765A Control system for an engine having an air intake passage 失效
标题翻译：具有进气通道的发动机的控制系统
公开(公告)号：US4713765A
公开(公告)日：1987-12-15
申请号：US704032
申请日：1985-02-21
申请人： Tomoaki Abe , Hideya Fujisawa , Norio Omori , Masumi Kinugawa , Katsunori Ito , Susumu Akiyama , Tiaki Mizuno , Toshitaka Yamada
发明人： Tomoaki Abe , Hideya Fujisawa , Norio Omori , Masumi Kinugawa , Katsunori Ito , Susumu Akiyama , Tiaki Mizuno , Toshitaka Yamada
IPC分类号： F02D41/18 , F02M51/00 , G01F1/68
CPC分类号： F02D41/187
摘要： A control system for an engine has a temperature sensitive element as part of a device for measuring the air flow in an air intake manifold to the engine. Further, a first pulse signal is generated, corresponding to the rotation of the engine, for controlling the setting of a flip-flop. A transistor is conducted in the set state of the flip-flop to supply a heating electric current to the element. The element supplied with the current is raised to the temperature that corresponds to the air flow in the manifold. When the temperature of the element is raised until the specified temperature difference to the air temperature (measured by a sub temperature sensitive element) is set, the temperature difference is detected by a comparator, and the flip-flop is reset by the detection signal. A pulse-shaped signal corresponding to the set state of the flip-flop is produced as a measurement output signal, supplied as one detection signal of the operating state of the engine to an engine control unit, and the current to the element is controlled to be supplied by the pulse-shaped signal.
摘要翻译：用于发动机的控制系统具有温度敏感元件，作为用于测量到发动机的进气歧管中的气流的装置的一部分。此外，产生与发动机的旋转对应的第一脉冲信号，用于控制触发器的设定。晶体管在触发器的置位状态下被导通，以向元件提供加热电流。提供电流的元件升高到对应于歧管中气流的温度。当元件的温度升高直到与空气温度（由次级温度敏感元件测量）的指定温度差设定为止时，通过比较器检测温度差，并且触发器由检测信号复位。产生与触发器的设定状态相对应的脉冲状信号作为测量输出信号，作为发动机的运行状态的一个检测信号提供给发动机控制单元，并且将对该元件的电流控制为由脉冲信号提供。

10. 发明授权

US4671242A Engine control apparatus 失效
标题翻译：发动机控制装置
公开(公告)号：US4671242A
公开(公告)日：1987-06-09
申请号：US736373
申请日：1985-05-21
申请人： Susumu Akiyama , Katsunori Ito , Yuzi Hirabayashi , Masumi Kinugawa , Norio Omori
发明人： Susumu Akiyama , Katsunori Ito , Yuzi Hirabayashi , Masumi Kinugawa , Norio Omori
IPC分类号： F02D41/00 , F02D41/18 , F02D41/24 , F02D41/34
CPC分类号： F02D41/2412 , F02D41/182 , F02D41/187
摘要： An engine control apparatus has an air flow rate measuring device for measuring an intake air flow rate. A temperature sensing element having a temperature characteristic and constituting the device is arranged in an intake pipe. The device generates an output pulse signal having a pulse width T corresponding to the intake air flow rate. An engine control unit has the one-dimensional map for storing the relationship between the engine speed N and the pulse width to of the signal corresponding to the air flow rate. This data to is read out from the one-dimensional map in accordance with the engine speed N. Subsequently, the data to is subtracted from the data T to calculate a time duration t. The unit also has a two-dimensional map for storing the relationship between each time duration t and the corresponding rate G/N in correspondence with each of the present engine speeds. A corresponding rate G/N is read out from the two-dimensional map in response to the calculated time duration t. The resultant rate G/N is used to calculate fuel injection quantity.
摘要翻译：发动机控制装置具有用于测量进气流量的空气流量测量装置。具有温度特性并构成装置的温度感测元件设置在进气管中。该装置产生具有对应于进气流量的脉冲宽度T的输出脉冲信号。发动机控制单元具有存储发动机转速N与对应于空气流量的信号的脉冲宽度对的关系的一维映射。根据发动机转速N从一维映射中读出该数据。接着，从数据T中减去数据，计算持续时间t。该单元还具有用于存储与每个当前发动机速度相对应的每个持续时间t和相应速率G / N之间的关系的二维图。响应于计算的持续时间t，从二维图中读出对应的速率G / N。合成速率G / N用于计算燃料喷射量。

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